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1. 发明专利

JP2001066154A PACKAGE FOR ENCODER, HEAT SINK, STEM AND MANUFACTURE OF PACKAGE FOR ENCODER 失效
公开(公告)号：JP2001066154A
公开(公告)日：2001-03-16
申请号：JP23921199
申请日：1999-08-26
申请人： NIPPON TELEGRAPH & TELEPHONE , NTT ELECTRONICS CORP
发明人： HIGURE EIJI , SAWADA YASUSHI , OHIRA FUMIKAZU , ITAYA YOSHIO , JIN YOSHITO , MEGURO SHINICHI , OGUCHI OSAMU , FUKUDA MITSUO
IPC分类号： G01D5/30 , H01L23/02 , H01L31/12
摘要： PROBLEM TO BE SOLVED: To provide a package of a high-reliability integrated encoder hardly affected by a surrounding environment, capable of executing easily relative positioning with an external scale. SOLUTION: In this package, an encoder chip 1 is positioned and fixed on a heat sink 2 with a prescribed accuracy relative to a first reference line or a reference face 4 formed on the heat sink 2. The heat sink 2 is integrated with a stem 3, and the encoder chip 1 and a part of the stem 3 are put in a cap 6 having a glass pane 5 installed on the outgoing side of a light beam of the encoder chip 1, and the interval between the cap 6 and the stem 3 is sealed. A second reference line or reference face 7 with prescribed position relation to the first reference line or the reference face 4 is formed on a part of the stem 3 exposed to the outside of the cap 6.

2. 发明专利

JP2000352525A ENCODER 失效
公开(公告)号：JP2000352525A
公开(公告)日：2000-12-19
申请号：JP16359299
申请日：1999-06-10
申请人： NIPPON TELEGRAPH & TELEPHONE , NTT ELECTRONICS CORP
发明人： SAWADA YASUSHI , HIGURE EIJI , OGUCHI OSAMU
IPC分类号： G01D5/38
摘要： PROBLEM TO BE SOLVED: To constitute a signal called a Z signal which provides a measurement reference value and which has not been implemented before or signals for detecting an optical system for measuring the number of revolutions and an optical system to form light called A phase and B phase for detecting a travelling or rotating direction in one micro encoder to be incorporated in a compact motor and a robot arm and used. SOLUTION: By providing one pattern for generating a Z signal at a location corresponding to a reference location within the range of extent of a light beam with which the surface of a scale 9 to form A-phase and B-phase light is irradiated in the vicinity of a periodic pattern on the scale 9, three signals of A phase, B phase and the Z signal are obtained by one beam. The light beam with which the scale 9 is irradiated is inclined with respect to the surface of the scale 9 for performing this measurement.

3. 发明专利

JPH06208837A PLASMA DRAWING GRID OF ION BEAM PROCESSOR 失效
公开(公告)号：JPH06208837A
公开(公告)日：1994-07-26
申请号：JP281793
申请日：1993-01-11
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： SAWADA YASUSHI , SHIMADA JUNICHI , OGUCHI OSAMU
IPC分类号： H01J27/02 , H01J37/08
摘要： PURPOSE:To achieve high opening rate at low cost, and to extend the life span by carrying out anisotropic etching on a silicon substrate of (110) orientation so that a (111) surface becomes a termination surface, and whereby forming a plurality of through holes. CONSTITUTION:After a grid-shape photoresist pattern 3 of orientation (110) is manufactured on both surfaces or either surface by photolithography (printing technique), the pattern is immersed in hydrofluoric acid, and an oxide film SiO2 is removed from a part where no resist pattern exists. When the resist is removed by a solvent, boring of the film SiO2 is completed. Since the etching rate ratio of the (110) surface to a (111) surface reaches 90-200 by carrying out anisotropic etching by means of a potassium hydroxide solution, the (111) surface is barely etched, and vertical through holes are formed in the direction where the four corners of a parallelogram are pointed. High opening rate can be achieved at low cost, while the life span can be extended.

4. 发明专利

JPS6418112A OPTICAL BRANCHING AND COUPLING CIRCUIT 失效
公开(公告)号：JPS6418112A
公开(公告)日：1989-01-20
申请号：JP17305687
申请日：1987-07-13
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： YOSHINO KAORU , IKEDA MASAHIRO , OGUCHI OSAMU
IPC分类号： G02B6/122 , G02B6/12
摘要： PURPOSE:To increase an angle of branching and to enable size reduction and integration by arranging a low-refractive-index layer whose thickness and refracting index are specified at the intersection part of two optical waveguides at an angle where the layer bisects the angle of the intersection and the section crosses the optical paths of light signals in optical waveguides. CONSTITUTION:Optical waveguides 5a and 5b, and 6a and 6b consisting of cores 3 and clads 4 are arranged crossing each other, and the low-refractive-index layer 8 is arranged at the intersection part 7 at the angle where the layer bisects the angle of the intersection and its section crosses at least part of the optical paths of light signals. The thickness of the layer 8 is nearly equal to or smaller than the wavelength of signal light in a medium and the refractive index is lower than those of the optical waveguides 5a and 5b, and 6a and 6b. Then 1st light input 9 inputted from the optical waveguide 5a is reflected partially by the low-refractive-index layer 8 and propagated to the optical waveguide 6b as a 2nd light output 10. The thickness (d) and refractive index of the low-refractive-index layer 8, on the other hand, are selected properly and then the 1st light input 9 is branched to the optical branch waveguides 5b and 6b. Consequently, the angle of branching is made large and the size reduction and integration are enabled.

5. 发明专利

JPH06148560A MICRO-ROTOR AND ITS MANUFACTURE 失效
公开(公告)号：JPH06148560A
公开(公告)日：1994-05-27
申请号：JP32384092
申请日：1992-11-10
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： UKITA HIROO , HIGURE EIJI , TANAKA HIDENAO , OGUCHI OSAMU
IPC分类号： C23F1/00 , B81B5/00 , B81C99/00 , G02B27/00 , H02N11/00
摘要： PURPOSE:To generate a high speed rotating of a micro-rotor when it is irradiated with a laser beam, etc., by installing paddles on the side of a post, and eliminating the existence of any symmetrical plane parallel with the axis of the micro-rotor. CONSTITUTION:As a post 3 irradiated with a laser beam 8 is in columnar form having a rotational symmetrical axis, the post 3 is trapped so that the upper part is positioned at the focus 9a, and the axis of a micro-rotor 1 becomes parallel with the optical axis of the laser beam 8. Because paddles 2 formed on the side of the post 3 are asymmetrical about the rotational axis, the light pressure applied to the paddles 2 to be irradiated with the laser beam spreading from the focus does not nullify in the total in case the post 3 is trapped at the focus of the laser beam. The total of the light pressure applied to the curved surface of the paddle 2 in the form of a circular arc is greater than the total of the light pressure applied to the mating plane because the area of the curved surface of the paddle 2 is greater than the area of the mating plane, and a torque is generated in the direction of the curved surface, and the micro-rotor 1 rotates.

6. 发明专利

JPH0518878A CHEMICAL SENSOR 失效
公开(公告)号：JPH0518878A
公开(公告)日：1993-01-26
申请号：JP17407191
申请日：1991-07-15
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： UKITA HIROO , OGUCHI OSAMU , KUWANO HIROKI
IPC分类号： G01N5/02
摘要： PURPOSE:To attain down-sizing of a sensor and improvement of measuring sensitivity by measuring adsorption amount and the like of specified gas molecular to a selective adsorption layer, based upon reflection beam of laser beam corresponding to proper vibration of an oscillator. CONSTITUTION:An oscillator 17 supported by a base plate 11, vibrates vertically by thermal strain when pulsated thermal energy is applied to. Also, when a laser beam is applied to the element from a reference semiconductor laser 15 via a reflector surface 19, the reflected beam thereof returns to the laser 15 side and interferes with an internal laser beam of a light guide part 14. In this occasion, changing of interval between a reflection surface of an oscillator 17 and an output end surface 16 thereof is emitted into a light guide part 23, as detected light output based on light phase changing of which period is one half of wavelength lambda of the laser beam, and therewith amperage corresponding to the detection output flows through a light detector 22. In other words, output of the detected light is detected 22 and resonance frequency of the vibratory element is measured. In this case, when specific gas molecular sticks to a selective adsorption layer 18, the resonance frequency of the oscillator 17 varies and thereby adsorption amount to the adsorption layer 18 and the like can be presumed.

7. 发明专利

JPH08261793A ENCODER AND ITS MANUFACTURE 失效
公开(公告)号：JPH08261793A
公开(公告)日：1996-10-11
申请号：JP6762595
申请日：1995-03-27
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： SAWADA YASUSHI , OGUCHI OSAMU , OHIRA FUMIKAZU
IPC分类号： G01D5/26 , G02B6/122 , G02F1/025 , G02F1/095 , H01L27/15 , H01L31/12 , H01S5/00 , H01S3/18
摘要： PURPOSE: To provide an encoder an optical waveguide of which has a function of a lens and which is highly-integrated, compact and applicable to various semiconductor lasers, with a process of forming a 90 deg. phase shift film eliminated. CONSTITUTION: A semiconductor laser 1, a film-like optical waveguide 3 and a photodiode 2 at a position interfering a diffraction light, are formed on the same substrate. A step difference 36 having an optical path difference of (1/4 + an integer) times a light wavelength is provided at half an end face of the waveguide of the opposite side to the semiconductor laser 1.

8. 发明专利

JPH0883952A OPTICAL COUPLER AND ITS MANUFACTURE 失效
公开(公告)号：JPH0883952A
公开(公告)日：1996-03-26
申请号：JP21839994
申请日：1994-09-13
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： SAWADA RENJI , OGUCHI OSAMU , SHIMADA JUNICHI , TSUBAMOTO MIEKO
IPC分类号： H01S5/00 , G02B6/12 , H01S5/026 , H01S3/18
摘要： PURPOSE: To improve optical connection efficiency between a semiconductor optical element and an optical waveguide by providing a gap between the edge of a core layer and an outgoing edge of a semiconductor laser or a light receiving edge of a photo diode and burying the gap with fluoropolyimide while simultaneously forming an upper clad layer on top of the core layer. CONSTITUTION: An outgoing edge of a semiconductor or a light receiving edge of a photodiode is covered by fluoropolyimide with a large content of fluorine having the same composition as a lower clad layer 8, and a core layer 9 comprising fluoropolyimide of a low fluorine content is provided. A gap 13m is provided between the edge of the core layer 9 and the outgoing edge of the semiconductor or the light receiving edge of the photodiode is provided. The gap 13 is buried by fluoropolyimide having more fluorine content than that of the core layer 9, while, at the same time, an upper clad layer 15 is formed on top of the core layer 9. This enables optical connection efficiency between a semiconductor optical element and an optical waveguide to improve and damage and degradation of the semiconductor optical element to decrease.

9. 发明专利

JPH03291523A ENCODER 失效
公开(公告)号：JPH03291523A
公开(公告)日：1991-12-20
申请号：JP9351490
申请日：1990-04-09
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： SAWADA YASUSHI , TANAKA HIDENAO , OGUCHI OSAMU , SHIMADA JUNICHI
IPC分类号： G01D5/38
摘要： PURPOSE:To miniaturize the size and to improve the measurement accuracy by providing a semiconductor laser which s so constituted that two light beams emitted from both end surfaces cross each other and a photodetector which is arranged at the interference position of diffracted light between the two light beams. CONSTITUTION:The light beams 41 and 42 emitted from both the end surfaces 22c and 22d of the semiconductor laser 22 are converged by lenses 26a and 26b and made incident on a scale 30 while crossing each other. Then the light beams 41 and 42 are diffracted by a diffraction grating 32 to become diffracted light beams 43 and 44, which pass through a lens 24c to become the interference light, whose light intensity is detected by a photodiode 23. The photodiode 23 generates a current corresponding to the light intensity of the interference light and the light intensity is varied in proportion to arrow-(b)-directional movement quantity between the light beams 41 and 42 and grating 32, i.e. a device main body 20 and the scale 30, so the current is also varied in proportion to the movement quantity. For the purpose, the main body 20 or scale 30 is fitted to a mobile object and then the movement quantity of the mobile object can be found form the current value of the photodiode 23.

10. 发明专利

JPH09133515A SINGLE ACTING OR FINE/ROUGH DOUBLE ACTING MICROMETER HEAD AND MICROMETER 失效
公开(公告)号：JPH09133515A
公开(公告)日：1997-05-20
申请号：JP12195896
申请日：1996-05-16
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： NAKADA HIROSHI , SAWADA YASUSHI , OGUCHI OSAMU
IPC分类号： G01D5/38 , G01B3/18 , G01B11/02
摘要： PROBLEM TO BE SOLVED: To provide a single acting or fine/rough double acting micrometer head and micrometer measuring length of a to-be-measured material in submicron unit. SOLUTION: In a micrometer head provided with a spindle 1 and a thimble, an intermediate part a little to front of a sleeve 3 is notched extending over the spindle 1 for providing a notched part 28, and a micro optical encoder 26 is oriented toward a guide axis hole 23 opened by notching of the notched part 28. Meanwhile, when the thimble is rotated for reciprocating by the stroke of the spindle 1, a linear scale 29 of diffraction grating is made to adhere to a flat part 1d provided to the notched part 28 of the spindle 1 oriented toward the micro optical encoder 26, and the linear scale 29 is oriented toward the micro optical encoder 26 with a fine gap in between.

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