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1. 发明专利

JP2001028464A METHOD OF EVALUATING ALIGNMENT ACCURACY OF FLIP-CHIP CONNECTION 失效
公开(公告)号：JP2001028464A
公开(公告)日：2001-01-30
申请号：JP20116699
申请日：1999-07-15
申请人： AGENCY IND SCIENCE TECHN
发明人： AOYANAGI MASAHIRO , NAKAGAWA HIROSHI , SATO HIROSHI , AKAHO HIROSHI
IPC分类号： H01L21/60 , G01R31/02 , H01L39/02
摘要： PROBLEM TO BE SOLVED: To enable the misalignment of a flip-chip connection to be evaluated to an accuracy of the order of microns to submicrons without using a large and expensive equipment, where the accuracy of the order of micron to sub- micron must be required in the near future. SOLUTION: This evaluation method is used to evaluate misalignment of a bonding which is carried out to bond an integrated circuit chip to a board (multi-chip module, dissimilar integrated circuit chip or the like) in a flip-chip connection manner, where the resistance of a fine wire resistor is evaluated, and an alignment accuracy is obtained resting on a change in resistance. The resistance of the fine wire resistor of an evaluating chip connected to a board in a flip-chip connection manner is measured, with which the misalignment of the chip from the board can be very accurately evaluated. With the use of a fine wire resistor of width of size of one micron or so, a misalignment volume of submicrons can be evaluated.

2. 发明专利

JP2000356681A SUPERCONDUCTING MAGNETIC FIELD GENERATING DEVICE AND SUPERCONDUCTING DETECTOR 失效
公开(公告)号：JP2000356681A
公开(公告)日：2000-12-26
申请号：JP16598199
申请日：1999-06-11
申请人： AGENCY IND SCIENCE TECHN
发明人： NAKAGAWA HIROSHI , AOYANAGI MASAHIRO , AKAHO HIROSHI
IPC分类号： G01T1/24 , G01T1/00 , H01L39/22
摘要： PROBLEM TO BE SOLVED: To provide a superconducting magnetic field generating device capable of generating a large magnetic field inside by giving a weak initial current from the outside, capable of generating finally a magnetic field by a superconducting permanent current in the separated state from the outside with no electric power supplied, and capable of generating a magnetic field by utilizing the superconducting permanent current with no loss, and a superconducting detector. SOLUTION: A superconducting tunnel junction element 5 is, for example, a radiation detector with a micro-strip coil, and is arranged inside a very low temperature environment 8. A direct current is applied on a primary coil 21 of a superconducting transformer 2 from a direct-current power source 1 to send the current into a first superconducting loop 6, and a control signal is given to a first superconducting gate 3 to set a circulating current in the first and a second superconducting loop circuits 6, 7, and the direct current in the primary coil 21 of the superconducting transformer 2 is reduced, and a superconducting permanent circulating current is generated in the second superconducting loop circuit 7. And besides, when the superconducting permanent circulating current flows in the second superconducting loop circuit 7, the superconducting permanent circulating current is cut off by switching the first and a second superconducting gates 3, 4 simultaneously.

3. 发明专利

JP2000258519A MAGNETIC SHIELD IN AMPLIFIER EMPLOYING SUPERCONDUCTING QUANTUM INTERFEROMETER 失效
公开(公告)号：JP2000258519A
公开(公告)日：2000-09-22
申请号：JP5774999
申请日：1999-03-04
申请人： AGENCY IND SCIENCE TECHN , RIKAGAKU KENKYUSHO
发明人： IKEDA TOKIHIRO , SHIMIZU HIROHIKO , SATO HIROMI , OTANI KO , KATO HIROSHI , MIYASAKA HIROMASA , OTANI TOMOYUKI , KAWAI KAZUHIKO , OKU TAKAYUKI , WATANABE HIROSHI , TAKIZAWA YOSHIYUKI , NAKAGAWA HIROSHI , AOYANAGI MASAHIRO , AKAHO HIROSHI
IPC分类号： G01R33/02 , G01R33/035 , H01L39/22 , H03F19/00
摘要： PROBLEM TO BE SOLVED: To obtain a magnetic shield satisfying various requirements for employing an SQUID amplifier chip by providing another container-like shield made of a material exhibiting high permeability regardless of the temperature and covering one shield from the outside. SOLUTION: The magnetic shield comprises a container-like superconducting niobium magnetic shield 16 containing an SQUID amplifier chip 22, and a container-like outer permalloy shield 26 covering the superconducting niobium magnetic shield 16 from the outside. The superconducting magnetic shield 16 internally fixed with a board 24 for supporting the SQUID amplifier chip 22 is secured into the recess 14 of a socket 12 by means of a cover 18 for positioning the superconducting magnetic shield 16. The superconducting magnetic shield 16 is further covered with the container-like outer permalloy shield 26 from the outside and shielded from the outside.

4. 发明专利

JPH11298055A SUPERCONDUCTING SAMPLING MEASURING CIRCUIT 失效
公开(公告)号：JPH11298055A
公开(公告)日：1999-10-29
申请号：JP9644898
申请日：1998-04-08
申请人： AGENCY IND SCIENCE TECHN
发明人： NAKAGAWA HIROSHI , AOYANAGI MASAHIRO , SATO HIROSHI , AKAHO HIROSHI
IPC分类号： H01L39/22 , G01R13/34
摘要： PROBLEM TO BE SOLVED: To eliminate crosstalks of trigger pulse applied from the outside, and prevent the malfunctions of a sampling gate in a superconducting sampling measuring circuit. SOLUTION: While the superposing relation of an ultrashort pulse Ip is kept to the pulse waveform Iu to be measured, corresponding to the superposing timing which is specified each time by a Josephson transmission line type delay time variable device 50, the superposed waveforms of the pulse waveform Iu to be measured and the ultrashort pulse Ip are delayed by a specified time tdf from the risis time of a trigger pulse Itu, and they are given to a sampling gate Is. For its sake, a signal delay line 41 with the fixed time tdf is provided under a cryogenic environment.

5. 发明专利

JPH11261311A BONDING PAD STRUCTURE AND BONDING METHOD 失效
公开(公告)号：JPH11261311A
公开(公告)日：1999-09-24
申请号：JP5873298
申请日：1998-03-11
申请人： AGENCY IND SCIENCE TECHN
发明人： AOYANAGI MASAHIRO , AKAHO HIROSHI , NAKAGAWA HIROSHI , SATO HIROSHI
IPC分类号： H01L21/60 , H01L39/02 , H01P5/08
摘要： PROBLEM TO BE SOLVED: To allow a signal to normally pass through a pad connection part without being distorted by converting the line of strip line structure into the line of planar waveguide structure where a signal line and a ground electrode are arranged on the same plane just before bonding pads and the interval of them is kept to be constant. SOLUTION: A wiring layer for connecting ground pads 31 with a ground plane is formed on an insulating layer above the ground plane. The wiring layer and the ground plane are electrically connected through vias 30 passing through the insulating layer. An insulating film is arranged on the ground plane becoming a ground electrode and the line of strip line structure where a signal line 12 is arranged is formed on the film. The line of the strip line structure is converted into the line of planar waveguide structure where a signal line, a wiring layer which is integrally connected with the signal line and a wiring layer which is integrally connected with the ground electrode and the vias 30 are arranged on the same plane and the interval of them is set to be almost constant.

6. 发明专利

JPH10321925A SUPERCONDUCTOR SAMPLING CIRCUIT AND ULTRA-SHORT PULSE GENERATOR USEABLE IN THE SAME 失效
公开(公告)号：JPH10321925A
公开(公告)日：1998-12-04
申请号：JP13351897
申请日：1997-05-23
申请人： AGENCY IND SCIENCE TECHN
发明人： AOYANAGI MASAHIRO , AKAHO HIROSHI , NAKAGAWA HIROSHI , SATO HIROSHI
IPC分类号： G01R13/34 , G11C11/44 , G11C27/02 , H01L39/22
摘要： PROBLEM TO BE SOLVED: To improve the flexibility of a Josephson sampler, and enable measuring a circuit to be measured which is formed by a different forming process. SOLUTION: A bias current is superposed on a waveform to be measured Iu from a circuit 11 to be measured, and a very short pulse Ip from a pulse generating circuit 22 and given to a sampling gate Js. The waveform to be measured Iu is displayed on a magnified time axis, by controlling the magnitude of the bias current is, while the superposition timing of the ultra-short pulse Ip is shifted by a minute time width. In this Josephson sampler, constituent elements 22, 30, 61, Js which are to be arranged under cryogenic environment are mounted on a measuring circuit chip 40, which is different from a circuit chip 50 to be measured on which the circuit 11 to be measured is mounted. The circuit 11 to be measured is connected with the Josephson sampler by flip-chip bonding (41, 42, 51) between the circuit chip 50 to be measured and the measuring circuit chip 40.

7. 发明专利

JPH10125965A OXIDE SUPERCONDUCTING ELECTRONIC DEVICE COMPOSED OF PRBA2 CU3O7-Y 失效
公开(公告)号：JPH10125965A
公开(公告)日：1998-05-15
申请号：JP27776896
申请日：1996-10-21
申请人： AGENCY IND SCIENCE TECHN
发明人： OKA KUNIHIKO , SUU SHIKOU , ITO TOSHIMITSU , AKAHO HIROSHI
IPC分类号： H01L39/22 , H01L39/24
摘要： PROBLEM TO BE SOLVED: To realize wide-range properties from insulatability to superconductivity by combining one kind or more of nonsuperconducting, such as insulating, semiconducting, or mormal-conducting, PrBa2 Cu3 O7-y crystals or thin films, with a superconducting PrBa2 Cu3 O7-y crystal of thin film, pure or to be doped with other elements. SOLUTION: It is possible to produce a Josephson element and a superconducting three-terminal element of high quality, etc., by combining a PrBa2 Cu3 O7-y (s) having various properties manufactured by a solution pulling method, a floating zone method, a melting solidifying method, and a thin-film epitaxial method, with a PrBa2 Cu3 O7-y single crystal or thin film of a normal conductor N or insulator I being nonsuperconducting and produced by a stationary gradual cooling method, a solution lifting method, a melting solidifying method, and a thin-film epitaxial method.

8. 发明专利

JP2000299505A FLIP-CHIP CONNECTION METHOD OF SUPERCONDUCTING INTEGRATED CIRCUIT 失效
公开(公告)号：JP2000299505A
公开(公告)日：2000-10-24
申请号：JP10390599
申请日：1999-04-12
申请人： AGENCY IND SCIENCE TECHN
发明人： AOYANAGI MASAHIRO , NAKAGAWA HIROSHI , SATO HIROSHI , AKAHO HIROSHI
IPC分类号： H01L39/02 , H01L21/60
摘要： PROBLEM TO BE SOLVED: To significantly reduce the inductance of the connection part of a superconducting integrated circuit chip with a circuit board by using bumps of a height of several microns and to modify the high-speed signal transmission characteristics of a superconducting integrated circuit. SOLUTION: This flip-chip connection method is performed by a method wherein a plurality of bumps 12, which consist of a Pb/In alloy and have a height of several microns, are arranged on an Nb wiring 11 on a substrate, which is a superconducting integrated circuit chip, a plurality of bumps 12, which consist of a Pb/In alloy and have a height of several microns, are arranged on an Nb wiring 11 on a substrate, which is a circuit board which is used as a multichip module, the chip is held on the circuit board in such a way that the chip is made to oppose to the circuit board and after the positions of both are made to accurately align with each other, the chip and the circuit board are brought into contact with each other and are heated for a constant time and the chip is pressed to the circuit board to form a bonding of the chip to the circuit board.

9. 发明专利

JPH0794793A STRUCTURE OF SUPERCONDUCTING INTEGRATED CIRCUIT AND ITS MANUFACTURE 失效
公开(公告)号：JPH0794793A
公开(公告)日：1995-04-07
申请号：JP25639993
申请日：1993-09-20
申请人： AGENCY IND SCIENCE TECHN
发明人： NAKAGAWA HIROSHI , AKAHO HIROSHI , TAKADA SUSUMU
IPC分类号： H01L39/22 , H01L39/24
摘要： PURPOSE:To form thin films on the arbitrary parts in a superconducting circuit by an electrolytic treatment. CONSTITUTION:A Josephson junction device which is composed of a lower superconducting electrode 31, an upper superconducting electrode 33 and a tunnel barrier layer 32 sandwiched between those two electrodes 31 and 33 is provided on a semiconductor layer 30 and etched so as to have a required pattern. The whole device is dipped into electrolyte 36 and the positive terminal of an external power supply 37 is connected to the semiconductor layer 30 and the negative terminal is connected to a cathode 38 immersed in the electrolyte 36. With this constitution, oxide films 41 is formed on the respective exposed side surfaces of the lower superconducting electrode 31, the tunnel barrier layer 32 and the upper superconducting electrode 33.

10. 发明专利

JPH01209772A SUPERCONDUCTING CONTACT 失效
公开(公告)号：JPH01209772A
公开(公告)日：1989-08-23
申请号：JP3484188
申请日：1988-02-17
申请人： AGENCY IND SCIENCE TECHN
发明人： AKAHO HIROSHI , SHINOKI FUJITOSHI
IPC分类号： H01L39/22
摘要： PURPOSE:To provide high rapidity, high sensitivity and high accuracy by composing a lower electrode made of an oxide superconductor, a contact layer made of noble metal formed on the electrode, and an opposite electrode made of a superconductor formed on the layer. CONSTITUTION:A thin Y-Ba-Cu-O superconductor film 2 is formed as a lower electrode by a normal method on a substrate 1. The surface of the film 2 is processed with oxygen plasma in a high frequency oxygen plasma under the conditions of 1Torr of oxygen pressure, 11W of applying power and 21V of a DC bias voltage for 1 hour. A thin gold film 3 is deposited 300Angstrom as a contact layer, and a thin Nb film 4 is deposited as an opposite electrode on the film 3 by a depositing method or a reactive sputtering method. Thus, a superconducting current flows between the films 2 and 4.

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