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    • 8. 发明公开
    • APPARATUS FOR MACHINING BRITTLE PLATE AND METHOD FOR MACHINING BRITTLE PLATE
    • EP4101585A1
    • 2022-12-14
    • EP21814662.9
    • 2021-07-15
    • Bando Kiko Co., Ltd
    • BANDO, Kazuaki
    • B24B9/00B24B9/10B24B49/10B24B49/12H01L21/304
    • A processing apparatus for brittle plate and a processing method for brittle plate, which can reduce time and labor of manual positioning of a processing wheel to the brittle plate after replacement of the processing wheel and has high efficiency in processing of the brittle plate as a whole are provided by automatically measuring a positional shift amount of the processing wheel before processing of the brittle plate without testing the positioning between the brittle plate and the processing wheel groove by a manual work several times, by automatically correcting the positional shift of the processing wheel on the basis of the positional shift amount, and by causing the processing wheel whose positional shift was corrected to process the outer peripheral edge of the brittle plate.
      A processing apparatus 1 for brittle plate includes a table 4 which holds a brittle plate 2, a processing head 7 having a processing wheel 6 for processing an outer peripheral edge 5 of the brittle plate 2 held by the table 4, a measuring portion 8 which measures a positional shift amount Δ in an axis direction of the processing wheel 6 with respect to the brittle plate 2, and a control portion 9 which corrects a positional shift in a Z-axis direction of the processing wheel 6 on the basis of a positional shift amount Δ in the axis direction of the processing wheel 6 measured by the measuring portion 8 and causes the processing wheel 6 whose positional shift was corrected to process the outer peripheral edge 5 of the brittle plate 2.