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    • 6. 发明公开
    • Ovenized system containing micro-electromechanical resonator
    • Temperaturstabilisiertes System,das einen mikroelektromechanischen Resonatorenthält
    • EP2595315A1
    • 2013-05-22
    • EP11189555.3
    • 2011-11-17
    • IMEC
    • Borremans, JonathanPertijs, Michiel
    • H03H9/02H03H9/08H03L1/04
    • H03H9/02448H03H9/08H03L1/022H03L1/04
    • Device comprising an ovenized system containing a MEM resonator with mechanical supports forming heating resistances for heating the resonator body through Joules heating. A temperature control system controls the temperature of the resonator by driving an electrical current through the heating resistances. The internal voltage of the resonator body is monitored by means of a replica circuit comprising resistances in parallel over the heating resistances and replicating the resistance ratio thereof. A compensation means is connected to an intermediate connection of the replica circuit and compensates for deviations of the replicated voltage level at the intermediate connection from a predetermined voltage level.
    • 装置包括一个包含具有机械支撑件的MEM谐振器的烘箱系统,其形成用于通过焦耳加热加热谐振器本体的加热电阻。 温度控制系统通过驱动电流通过加热电阻来控制谐振器的温度。 谐振器本体的内部电压通过复合电路进行监视,复制电路在加热电阻上并联电阻并复制其电阻比。 补偿装置连接到复制电路的中间连接,并补偿中间连接处的复制电压电平与预定电压电平的偏差。