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1. 发明公开

EP3867529A1 A SET OF PUMPS, AND A METHOD AND SYSTEM FOR EVACUATING A VACUUM CHAMBER IN A RADIOACTIVE ENVIRONMENT 审中-公开
公开(公告)号：EP3867529A1
公开(公告)日：2021-08-25
申请号：EP19794211.3
申请日：2019-10-16
申请人： Edwards Limited
发明人： CHEW, Andrew
IPC分类号： F04B37/02 , F04B37/14 , F04B41/06 , F04F9/00

2. 发明公开

EP2975271A1 OIL DIFFUSION PUMP AND VACUUM FILM FORMATION DEVICE 审中-公开
标题翻译：油扩散泵和真空成膜装置
公开(公告)号：EP2975271A1
公开(公告)日：2016-01-20
申请号：EP13878178.6
申请日：2013-03-14
申请人： Shincron Co., Ltd.
发明人： SAISHO, Shinichiro
IPC分类号： F04F9/00
CPC分类号： F23D91/04 , F04F5/20 , F04F5/40 , F04F9/00 , F24H2250/08 , H05B6/108
摘要： Provided is an oil diffusion pump equipped with an oil vapor generator capable of eliminating the problems occurring when a heater wire is used as a heating source for an operating oil. The present invention is a vacuum pump for which an oil vapor generator (70) is arranged within a casing (51) and this oil vapor generator is operated to vaporize an operating oil (8), thereby producing oil vapor and this oil vapor is sprayed from a jet (53, 53a) to exhaust intake air. The oil vapor generator (70) is equipped with: a container (71, 72) in the interior of which oil is stored, with the lower end of the tubular member (71), which comprises a material to be heated, being closed; and induction coil (75) wrapped around the atmosphere-side perimeter of the tubular member (71) (in particular, the case inner wall (71b)) with an insulating material (73) therebetween; and a power supply means that applies a low-frequency alternating current of several tens of Hz to several hundreds of Hz to the induction coil (75). The configuration is such that the tubular member (71) itself is heated when the power supply means is operated and the low-frequency alternating current is applied to the induction coil (75), thereby vaporizing the oil within the container.
摘要翻译：本发明提供一种配备有油蒸气发生器的油扩散泵，其能够消除使用加热线作为工作油的加热源时发生的问题。本发明是一种真空泵，其中油蒸汽发生器（70）布置在壳体（51）内，并且该油蒸汽发生器被操作以蒸发操作油（8），从而产生油蒸气并且该油蒸汽被喷射从喷嘴（53,53a）排出进气。油蒸气产生器（70）具备：容器（71,72），其内部收纳有油，该筒状部件（71）的下端部由被加热材料封闭; 和感应线圈（75），隔着绝缘材料（73）卷绕在管状部件（71）的大气侧周围（特别是壳体内壁（71b））的周围; 以及向感应线圈（75）施加几十Hz至几百Hz的低频交流电的电源装置。当电源装置工作并且低频交流电流施加到感应线圈（75）上时，管状部件（71）本身被加热，从而使容器内的油蒸发。

3. 发明授权

EP0829647B1 Improvements in diffusion pumps 失效
标题翻译：扩散泵的改进
公开(公告)号：EP0829647B1
公开(公告)日：2003-07-02
申请号：EP97306595.6
申请日：1997-08-28
申请人： The BOC Group plc
发明人： Huntley, Graeme
IPC分类号： F04F9/00
CPC分类号： F04F9/00 , F04F5/20

4. 发明公开

EP0822339A2 Vapor jet vacuum pump and method of manufacture 失效
标题翻译： Diffusionpumpe和Verfahren zur Herstellung
公开(公告)号：EP0822339A2
公开(公告)日：1998-02-04
申请号：EP97305756.5
申请日：1997-07-31
申请人： VARIAN ASSOCIATES, INC.
发明人： Nuzzi, Frank , Sakhtah, Mohamad
IPC分类号： F04F9/00
CPC分类号： F04F9/00
摘要： A vapor jet vacuum pump includes a pump housing, a boiler sealed to the pump housing and a jet assembly mounted within the pump housing. The pump housing is a low porosity metal casting and has an inlet and a foreline. The boiler includes a boiler housing defining a reservoir for a liquid, and a heater for vaporizing the liquid to form a vapor. The jet assembly directs a vapor jet toward the housing. In a preferred embodiment, the boiler housing is a low porosity metal casting. A method for making the pump housing includes the steps of casting two or more low porosity housing blanks, machining the housing blanks to provide finished housing elements and attaching the finished housing elements together to form the pump housing.
摘要翻译：蒸气喷射真空泵包括泵壳体，与泵壳体密封的锅炉和安装在泵壳体内的喷射组件。泵壳是低孔隙金属铸件，并具有入口和前级管。锅炉包括限定用于液体的储存器的锅炉壳体和用于蒸发液体以形成蒸气的加热器。喷射器组件将蒸汽射流引向壳体。在优选实施例中，锅炉壳体是低孔隙率金属铸件。用于制造泵壳体的方法包括铸造两个或更多个低孔隙率壳体坯件的步骤，加工壳体坯件以提供成品壳体元件并将成品壳体元件附接在一起以形成泵壳体。

5. 发明授权

EP3088749B1 OIL DIFFUSION PUMP AND OIL VAPOR GENERATOR USED THEREFOR 有权
公开(公告)号：EP3088749B1
公开(公告)日：2019-10-30
申请号：EP14895619.6
申请日：2014-06-24
申请人： Shincron Co., Ltd.
发明人： SAISHO, Shinichiro
IPC分类号： F04F9/00 , F04F5/20

6. 发明公开

EP1805420A1 TREIBMITTEL-VAKUUMPUMPE 有权
标题翻译：发泡剂真空泵
公开(公告)号：EP1805420A1
公开(公告)日：2007-07-11
申请号：EP05803340.8
申请日：2005-10-31
申请人： Technische Universität Hamburg-Harburg , TuTech Innovation GmbH
发明人： DOMS, Marco , MÜLLER, Jörg
IPC分类号： F04F9/00 , F04F5/20 , F04F5/46
CPC分类号： F04F9/00 , F04B19/006 , F04F5/20 , F04F5/46
摘要： The invention relates to a motivating fluid vacuum pump used in microsystems technology, comprising an evaporator chamber and a pump chamber that are separated by a nozzle arrangement. The design of the motivating fluid vacuum pump is improved by: a planar arrangement of at least one nozzle, which vertically extends into the depth and which is situated between two, in particular, parallel plates, these plates closing the evaporator chamber and the pump chamber; an opening in the pump chamber, preferably above the nozzle arrangement, for drawing in a medium to be pumped, and; an opening for expulsing a preferably compressed gas underneath the nozzle arrangement.

7. 发明公开

EP0829647A2 Improvements in diffusion pumps 失效
标题翻译：扩散泵的改进
公开(公告)号：EP0829647A2
公开(公告)日：1998-03-18
申请号：EP97306595.6
申请日：1997-08-28
申请人： The BOC Group plc
发明人： Huntley, Graeme
IPC分类号： F04F9/00
CPC分类号： F04F9/00 , F04F5/20
摘要： A diffusion pump comprising a hollow outer body including an outlet for connection to a backing pump, an inlet for communication with a chamber to be evacuated, a sump for containing a working fluid and means for heating the working fluid when present in the base characterised in that a reservoir for the working fluid is integral with the hollow outer body.
摘要翻译： 1。一种扩散泵，包括：中空外主体，其包括用于连接至前级泵的出口;与待抽空的腔室连通的入口;用于容纳工作流体的贮槽;以及用于当存在于基座中时加热工作流体的装置，其特征在于，用于工作流体的储存器与中空外部体是一体的。

8. 发明公开

EP0806572A2 Improvements in diffusion pumps 失效
标题翻译： Diffusionspumpe
公开(公告)号：EP0806572A2
公开(公告)日：1997-11-12
申请号：EP97302923.4
申请日：1997-04-29
申请人： The BOC Group plc
发明人： Huntley, Graeme
IPC分类号： F04F9/00
CPC分类号： F04F9/00
摘要： A diffusion pump 1 comprises a hollow outer body 2 containing a vapour chimney 8 with at least one jet stage 12. At least a portion of the internal surface of the hollow outer body 2 is covered with a wicking material 20 for absorbing a working fluid. The use of the wicking material 20 allows the diffusion pump to be used in orientations other than the conventional upright configuration.
摘要翻译：扩散泵1包括具有至少一个喷射级12的蒸气烟囱8的中空外体2.中空外体2的内表面的至少一部分被吸收工作流体的芯吸材料20覆盖。芯吸材料20的使用允许扩散泵用于除了常规直立构型之外的取向。

9. 发明授权

EP2975271B1 OIL DIFFUSION PUMP AND VACUUM FILM FORMATION DEVICE 有权
公开(公告)号：EP2975271B1
公开(公告)日：2019-08-07
申请号：EP13878178.6
申请日：2013-03-14
申请人： Shincron Co., Ltd.
发明人： SAISHO, Shinichiro
IPC分类号： F04F9/00 , H05B6/10

10. 发明授权

EP1468191B1 VAPOR JET VACUUM PUMP HAVING EJECTOR STAGE IN FORELINE CONDUIT 有权
标题翻译：喷气式喷射真空泵在喷射式导管中具有喷射级
公开(公告)号：EP1468191B1
公开(公告)日：2007-04-11
申请号：EP03768663.1
申请日：2003-11-03
申请人： Varian, Inc.
发明人： HABLANIAN, Marsbed
IPC分类号： F04F9/00
CPC分类号： F04F9/04 , F04F9/00
摘要： A vapor jet vacuum pump includes a housing having an inlet port and a foreline conduit, a vapor jet assembly within the housing, a vapor source for supplying a vapor to the vapor jet assembly, and at least one ejector stage. The ejector stage includes an ejector nozzle mounted in the foreline conduit and a fluid inlet located external to the housing and coupled by an ejector conduit to the ejector nozzle. The fluid inlet may be an air inlet for drawing in air at atmospheric pressure. The ejector stage may be driven by a backing pump coupled to the foreline conduit.
摘要翻译：蒸气喷射真空泵包括具有入口端口和前级管道的壳体，壳体内的蒸汽喷射组件，用于向蒸气喷射组件供应蒸气的蒸气源以及至少一个喷射器级。喷射器级包括安装在前级管道中的喷射器喷嘴和位于外壳外部并通过喷射器管道耦合到喷射器喷嘴的流体入口。流体入口可以是用于在大气压力下吸入空气的空气入口。喷射器级可以由连接到前级导管的前级泵驱动。

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