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    • 4. 发明公开
    • Improvements in or relating to electronic distance measuring instruments
    • Mikrowelleneinrichtung zur genauen elektronischen Entfernungsmessung。
    • EP0060654A1
    • 1982-09-22
    • EP82301118.4
    • 1982-03-04
    • PLESSEY SOUTH AFRICA LIMITED
    • Downing, Barry John
    • G01S13/36H03B9/14H03D9/06H01Q13/02
    • H01Q1/247G01S7/032H03B9/141H03D9/0616
    • A microwave head for use with electronic distance measuring systems in which the distance measurement depends on the measurement of the phases of intermodulation products of the modulations of transmitted and received signals, using the same plane of polarisation for the transmit and receive function. The microwave head comprises generator means (110) for generating a microwave carrier, tuner means (115) for tuning the microwave carrier, modulator means (115) for modulating the microwave carrier, heterodyning means for heterodyning the modulated carrier with a modulated received carrier, common collimating means for collimating the transmitted carrier and focusing the received carrier and means for causing the local oscillator bias energy to dominate any microwave power reflected back towards the heterodyning means from the common collimating means.
    • 用于电子距离测量系统的微波头,其中距离测量取决于发射和接收信号的调制的互调产物的相位的测量,使用相同的发射和接收功能平面。 微波头包括用于产生微波载波的发生器装置(110),用于调谐微波载波的调谐装置(115),用于调制微波载波的调制装置(115),用调制接收载波外调调制载波的外差装置, 用于准直发射的载波并聚焦所接收的载波的公共准直装置和用于使本地振荡器偏置能量主导从公共准直装置向外差装置反射回的任何微波功率的装置。
    • 9. 发明公开
    • SILICON SUBSTRATE DEVICE AND ITS MANUFACTURING METHOD
    • 硅衬底装置及其制造方法
    • EP1536555A1
    • 2005-06-01
    • EP02807763.4
    • 2002-09-04
    • MITSUBISHI DENKI KABUSHIKI KAISHA
    • KUMAGAI, Munehito, MITSUBISHI DENKI K. K.YOSHIDA, Yukihisa, MITSUBISHI DENKI K. K.MATSUURA, Tsukasa, MITSUBISHI DENKI K. K.HONMA, Yukihiro, MITSUBISHI DENKI K. K.
    • H03D9/06H01L39/22H01P3/12H01P11/00
    • H03D9/0616
    • A first narrow rectangular groove having a rectangular cross section and a second narrow rectangular groove substantially orthogonal to the first narrow rectangular groove and having a rectangular cross section are formed on a first silicon substrate, and a third narrow rectangular groove provided at a position facing the first narrow rectangular groove and having a rectangular cross section is formed on a second silicon substrate. A device substrate including a frequency conversion device is provided in the second narrow rectangular groove, so that the frequency conversion device is located in a portion in which the first and second narrow rectangular grooves are orthogonal to each other. Further, the first silicon substrate on which the device substrate is provided is bonded onto the second silicon substrate, so that the first narrow rectangular groove opposes to the third narrow rectangular groove, then a rectangular waveguide is formed, which includes the first narrow rectangular groove and the third narrow rectangular groove, and in which a high frequency received signal propagates to be incident onto the frequency conversion device.
    • 具有矩形截面的第一窄矩形凹槽和与第一窄矩形凹槽基本垂直并具有矩形截面的第二窄矩形凹槽形成在第一硅衬底上,第三窄矩形凹槽设置在面对 在第二硅衬底上形成第一窄矩形凹槽并具有矩形横截面。 在第二窄的矩形槽中设置有包括频率转换装置的器件基板,使得频率转换装置位于第一和第二窄矩形槽彼此正交的部分中。 此外,将其上设置有器件衬底的第一硅衬底接合到第二硅衬底上,使得第一窄矩形凹槽与第三窄矩形凹槽相对,然后形成矩形波导,其包括第一窄矩形凹槽 和第三窄矩形槽,并且其中高频接收信号传播以入射到频率转换装置上。