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    • 2. 发明公开
    • DIFFRACTIVE OPTICAL ELEMENTS AND METHODS FOR PATTERNING THIN FILM ELECTROCHEMICAL DEVICES
    • 衍射光学元件AND METHOD FOR结构电化学薄膜器件
    • EP2912713A1
    • 2015-09-02
    • EP13849358.0
    • 2013-10-25
    • Applied Materials, Inc.
    • SONG, DaoyingKWAK, Leo, B.ADAMS, Bruce, E.MOFFITT, Theodore, P.
    • H01M14/00H01M2/10
    • G02B27/4233B23K26/362G02F1/153H01M4/0402H01M2010/0495H01M2220/30
    • A method of fabricating an electrochemical device, comprising: depositing device layers, including electrodes and corresponding current collectors, and an electrolyte layer, on a substrate; and directly patterning at least one of said device layers by a laser light pattern generated by a laser beam incident on a diffractive optical element, the laser light pattern directly patterning at least an entire device in a single laser shot. The laser direct patterning may include, among others: die patterning of thin film electrochemical devices after all active layers have been deposited; selective ablation of cathode/anode material from corresponding current collectors; and selective ablation of electrolyte material from current collectors, Furthermore, directly patterning of the electrochemical device may be by a shaped beam generated by a laser beam incident on a diffractive optical element, and the shaped beam may be moved across the working surface of the device.
    • 电化学装置的制造方法,的方法,包括:沉积装置层,包括电极和相应的集电体,和电解质层的基片,一个上; 直接和图案化,通过将激光束入射的衍射光学元件上所产生的激光光图案,所述设备层中的至少一个中,激光图案直接至少在一个单个激光照射图案在整个设备。 激光直接图案可以包括,尤其是:薄膜电化学装置的havebeen沉积所有有源层之后的图案化; 从相应的电流收集器的阴极/阳极材料的选择性消融; 和从集电体,进一步电解质材料的选择性烧蚀,直接图案化所述电化学装置可以是通过由激光束入射的衍射光学元件上产生的成形的光束,并且所述成形光束可以在器件的工作表面上移动 ,