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    • 5. 发明公开
    • VACUUM VALVE
    • VAKUUMVENTIL
    • EP3133631A1
    • 2017-02-22
    • EP15779643.4
    • 2015-02-23
    • Kabushiki Kaisha Toshiba
    • NIWA, YoshimitsuSAKAGUCHI, WataruSEKIMORI, Yuki
    • H01H33/664
    • H01H33/6646H01H1/06H01H33/664H01H33/6642H01H33/6643
    • A vacuum valve according to embodiments of the present disclosure, comprising: an electrode having a first surface which a hollow part is formed on, which electrode spiral electrode slits which slantingly cross an axial direction are formed on outer circumference of, a conductor fixed on a second surface of the electrode, which second surface is opposite side of the first surface, a contact point having a first concavity which opens to the conductor side, which contact point is fixed on the first surface of the electrode, and a connecting plate whose resistivity is lower than one of the contact point, which connecting plate is disposed inside the first concavity, and connecting plate slits which extend inward from circumference as a starting point are formed on, wherein central axes of the connecting plate slits incline in a rotatory direction of the spiral of the electrode slits.
    • 一种根据本公开实施例的真空阀,包括:电极,其具有形成有中空部分的第一表面,在固定在其上的导体的外周上形成有沿轴向方向倾斜地穿过的电极螺旋形电极狭缝 电极的第二表面,该第二表面是与第一表面相对的一侧,接触点具有向导体侧开口的第一凹部,该接触点固定在电极的第一表面上,以及连接板,其电阻率 低于连接板设置在第一凹部内的接触点中的一个,并且形成有作为起点的从周围向内延伸的连接板狭缝,其中连接板狭缝的中心轴沿旋转方向倾斜 电极狭缝的螺旋状。