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1. 发明公开

EP4382764A1 MOTION SYSTEM WITH A CONFIGURABLE FEEDFORWARD CONTROL 审中-公开
公开(公告)号：EP4382764A1
公开(公告)日：2024-06-12
申请号：EP22212450.5
申请日：2022-12-09
申请人： ETEL S.A.
发明人： Graf, Basile Renaud
IPC分类号： F16F15/00 , G05B19/404
CPC分类号： G05B19/404 , G05B2219/4904820130101 , G05B2219/5017620130101 , F16F15/002
摘要： The present invention relates to a motion system (10) comprising a motion hardware system (100) and a motion control system (200) configured to control the movement of the motion hardware system (100). The hardware system (100) comprises a motion stage (102), a platform (110) supporting the motion stage (102), and a machine frame (116) resting on a ground surface (300). The platform (110) comprises a base (112) and an active vibration isolation system (114) arranged between the base (112) and the machine frame (116). The active vibration isolation system (114) comprises actuators to provide together at least three degrees-of-freedom (DOF) actuation of the base (12). The motion control system (200) comprises a feedforward control (210) comprising a vibration isolation system controller (230) for controlling the at least three DOF actuation of the active vibration isolation system (114) to compensate, by exerting a counteracting force (F) on the base (112), for expected reactions forces exerted by the motion stage (102) on the base (112) when operating. The feedforward control (210) comprises a memory (224) for storing a string of characters defining the motion equations based on the topology of the motion stage (102), and a processing unit (222) for processing said string of characters to compute said counteracting force (F).

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