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    • 6. 发明公开
    • Form measuring instrument, form measuring method, and program
    • Formmesssystem,Formmessverfahren und Programm
    • EP2253931A1
    • 2010-11-24
    • EP10163182.8
    • 2010-05-18
    • Mitutoyo Corporation
    • Tamai, ToshiyukiGoto, Tomonori
    • G01B21/04
    • G01B21/04G01B5/008G05B19/401G05B2219/37194G05B2219/37197
    • Form measuring instrument includes: first measuring means which moves contact piece from first position in parallel with second axis to trace surface of workpiece, measure amount of displacement of contact piece, to obtain first profile; second placing means which rotates workpiece about first axis by 90 degrees to place workpiece at second position from first position; second measuring means which moves contact piece from second position in parallel with second axis to trace surface of workpiece, measure amount of displacement of contact piece, to obtain second profile; extremum position calculating means which fits circles to first and second profiles and calculate positions, in direction parallel with second axis, of first and second extremums indicating circles' extremums; and moving means which moves workpiece in direction parallel with second axis and direction parallel with third axis such that positions, in direction parallel with second axis, of first and second extremums become 0.
    • 形状测量仪器包括:第一测量装置,其将接触片从第一位置平行于第二轴线移动到工件的迹线表面,测量接触片的位移量,以获得第一轮廓; 第二放置装置,其将工件围绕第一轴旋转90度,以将工件从第一位置放置在第二位置; 第二测量装置,使接触片从与第二轴平行的第二位置移动到工件的迹线表面,测量接触片的位移量,以获得第二轮廓; 极点位置计算装置,其将圆适合于第一和第二轮廓,并计算指示圆的极值的第一和第二极值的平行于第二轴的方向的位置; 以及移动装置,其使工件沿与第二轴平行的方向和与第三轴平行的方向移动,使得在第一和第二极值的平行于第二轴的方向上的位置变为0。