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    • 4. 发明公开
    • Flow duct with flowmeter
    • Strömungskanalmit Durchflussmesser
    • EP1530029A1
    • 2005-05-11
    • EP04256818.8
    • 2004-11-04
    • Toyota Boshoku Kabushiki KaishaDENSO CORPORATION
    • Osuka, TomohiroKamiya, Shinichi
    • G01F1/684G01F1/32
    • G01F1/6842G01F1/32Y02T10/146
    • An induction duct device (10) may include a duct body (20) having a straight tubular portion (22) and a restricting portion (24, 24'), a rectifier member (12) attached to the tubular portion (22) so as to rectify air that is introduced into the duct body (20), and a flow meter (30) attached to the duct body (20) for measuring a flow rate of air that passes through the duct body (20). The restricting portion (24, 24') is coaxially disposed in the tubular portion (22) and has a desired restriction rate (R) relative to the tubular portion (22). The restriction rate (R) of the restricting portion (24, 24') is set to a value that can eliminate deflection of the air. The flow meter (30) is positioned at a desired distance (L) from the rectifier member (12) so as to measure the flow rate of the air in the restricting portion (24, 24') without being affected by swirls produced at a proximity of a downstream end of the rectifier member (12).
    • 感应管道装置(10)可包括具有直管状部分(22)和限制部分(24,24')的管道主体(20),连接到管状部分(22)上的整流构件(12),以便 对引导到管体(20)的空气进行整流,以及安装在管体(20)上的流量计(30),用于测量通过管体(20)的空气流量。 限制部分(24,24')同轴地设置在管状部分(22)中并且具有相对于管状部分(22)的期望限制速率(R)。 限制部分(24,24')的限制率(R)被设定为能够消除空气偏转的值。 流量计(30)被定位在与整流构件(12)所需的距离(L)处,以便在不受在一个或多个处所产生的涡流的影响下测量限制部分(24,24')中的空气的流量 整流构件(12)的下游端的接近。
    • 5. 发明公开
    • Flow detector with flow control valve
    • 德维特威尔(Durchflussmesser)
    • EP0922940A1
    • 1999-06-16
    • EP98309786.6
    • 1998-11-30
    • SMC CORPORATION
    • Miyazoe, Shinji, c/o SMC Corp.Tsukuba Tech.Ctr.
    • G01F15/18F15B13/00
    • G01F1/32G01F1/684G01F15/005G01F15/18G01F15/185G05D7/0635Y10T137/5109Y10T137/7976Y10T137/8242Y10T137/87885
    • A flow detector comprises a body 1 having a fluid channel 2 penetrating its interior and having a detection section 11 of a flow sensor 10 disposed in the fluid channel. An input and an output block 3 and 5 have respectively an input and an output channel 4 and 6 in communication with the fluid channel 2 in the detector body 1. A flow control valve 21 is provided in the output block 5. The detector body 1 and each of the input and output blocks 3 and 5 are joined together via seal members 16a and 16c that seal the channels 2, 4 and 6 provided in the body and blocks and are fixedly connected at positions separate from said channels using screws. The flow detector can be used in a clean environment (e.g. a semiconductor fabrication apparatus) and is an integrated apparatus that enables the flow to be measured and regulated.
    • 流量检测器包括主体1,其具有贯穿其内部的流体通道2,并且具有设置在流体通道中的流量传感器10的检测部分11。 输入和输出块3和5分别具有与检测器主体1中的流体通道2连通的输入和输出通道4和6.流量控制阀21设置在输出块5中。检测器主体1 并且每个输入和输出块3和5通过密封构件16a和16c连接在一起,密封构件16a和16c密封设置在主体中的通道2,4和6,并且通过螺钉固定地连接在与所述通道分开的位置处。 流量检测器可以在清洁的环境(例如半导体制造装置)中使用,并且是能够测量和调节流量的集成装置。
    • 6. 发明公开
    • Flowmeter
    • Strömungsmesser。
    • EP0679872A1
    • 1995-11-02
    • EP95106008.6
    • 1995-04-21
    • Ito, Yoshihiro
    • Ito, Yoshihiro
    • G01F1/20
    • G01F1/32G01F1/20G01F1/3227G01F1/3263
    • A measuring unit 12 comprises a vibrator 13 which is disposed in a fluid flowing into the measuring unit 12 and is able to reciprocally vibrate in a direction of width of the flow passage when there occurs a differential pressure due to a flow velocity, a flow separator 15 which is disposed downstream of the vibrator 13 to abut with the vibrator 13 for holding the vibrator 13 in the measuring unit 12 and also separating the fluid, and forms a frequency converter 14 capable of supplying the differential pressure to the vibrator 13 from the upstream side so that the vibrator 13 can reciprocally vibrate, a vibrator abutting portion 16 disposed upstream of the vibrator 13 and coming into abutment with the vibrator 13 when the vibrator 13 is vibrated, and a frequency detector 17 capable of detecting reciprocal frequency of the vibrator 13.
    • 测量单元12包括振动器13,其被设置在流入测量单元12的流体中,并且当由于流速而发生压差时能够在流动通道的宽度方向上往复振动;流量分离器 15,其设置在振动器13的下游,以与用于将振动器13保持在测量单元12中的振动器13邻接并且还分离流体,并且形成能够从上游向振动器13供应差压的变频器14 使得振动器13可以往复振动,当振动器13振动时设置在振动器13上游并与振动器13邻接的振动器邻接部分16以及能够检测振动器13的相互频率的频率检测器17 。