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    • 8. 发明公开
    • CARBONACEOUS THIN FILM, PROCESS FOR PRODUCING THE SAME AND MEMBER UTILIZING THE THIN FILM
    • KOHLENSTOFFHALTIGERDÜNNERFILM,HERSTELLUNGSVERFAHRENDAFÜRUND ELEMENT UNTER VERWENDUNG DESDÜNNENFILMS
    • EP1726680A1
    • 2006-11-29
    • EP05719554.7
    • 2005-02-25
    • Japan Science and Technology Agency
    • IWAMURA, Eiji
    • C23C14/00C01B31/02B82B1/00
    • C23C14/0605C23C14/582Y10T428/24132Y10T428/26
    • The present invention provides a novel carbon-based material in which carbons different in property are combined in such a manner as to be applicable to a device. The carbon-based thin film provides a carbon-based thin film 10 including first phases 1 that contain amorphous carbon and extend in a film thickness direction, and a second phase 2 that contains a graphite structure and intervenes between the first phases 1. In the thin film, at least one selected from the group consisting of the following a) to e) is satisfied: a) the second phase contains more graphite structures per unit volume than the first phases; b) a density of the second phase is larger than that of the first phases; c) an electric resistivity of the second phase is lower than that of the first phases; d) an elastic modulus of the second phase is higher than that of the first phases; and e) in the second phase, a basal plane of the graphite structure is oriented along the film thickness direction.
    • 本发明提供了一种新颖的碳基材料,其中不同性质的碳以可适用于装置的方式组合。 碳基薄膜提供包括含有无定形碳并在膜厚度方向上延伸的第一相1的碳基薄膜10和包含石墨结构并介入第一相1之间的第二相2。 薄膜,满足以下a)至e)中的至少一种:a)第二相每单位体积含有比第一相更多的石墨结构; b)第二相的密度大于第一相的密度; c)第二相的电阻率低于第一相的电阻率; d)第二相的弹性模量高于第一相的弹性模量; 和e)在第二阶段中,石墨结构的基面平面沿着膜厚度方向取向。