会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 6. 发明公开
    • PHOTORESIST RESIDUE AND POLYMER RESIDUE REMOVING LIQUID COMPOSITION
    • FLÜSSIGEZUSAMMENSETZUNG ZUR ENTFERNUNG VON FOTOLACK- UND POLYMERRESTEN
    • EP2613199A1
    • 2013-07-10
    • EP11821952.6
    • 2011-09-02
    • Kanto Kagaku Kabushiki Kaisha
    • OHWADA, Takuo
    • G03F7/42C11D7/26C11D7/50H01L21/027H01L21/304
    • G03F7/422C11D7/261C11D7/263C11D7/265C11D7/5022C11D11/0047G03F7/426H01L21/02063H01L21/31133
    • Provided are a photoresist residue and polymer residue removing liquid composition, and a method of removing the residue used therewith, for removing photoresist residue and polymer residue produced during a process of manufacturing a semiconductor circuit element having metallic wiring. Specifically, the composition does not contain nitrogen-containing organic hydroxyl compounds, ammonia or fluorine compounds, and contains an aliphatic polycarboxylic acid having a melting point of 25°C or higher with an excellent residue removing property and having a metallic oxide main component as the residue removing component. The photoresist residue and polymer residue removing liquid composition, and the method of removing the residue used therewith, is capable of preventing the aliphatic polycarboxylic acid from being recrystallized by evaporation of water after a solution has adhered around a cleaning device liquid ejecting nozzle or a cleaning tank and a chamber. In the photoresist residue and polymer residue removing liquid composition containing the aliphatic polycarboxylic acid with a melting point of 25°C or higher, the removing liquid contains an organic solvent that is miscible with water and has a vapor pressure of 17 mm Hg or less at 25°C and a hydroxyl group within the structure.
    • 提供了光致抗蚀剂残渣和聚合物残渣除去液体组合物,以及除去其中使用的残留物的方法,用于除去在具有金属布线的半导体电路元件的制造过程中产生的光致抗蚀剂残留物和聚合物残留物。 具体而言,该组合物不含有有机羟基化合物,氨或氟化合物,并且含有熔点为25℃以上且脂肪族除去性优异且具有金属氧化物主成分的脂肪族多元羧酸作为 残渣去除组分。 光致抗蚀剂残渣和聚合物残渣除去液体组合物以及除去残留物的除去方法能够防止在溶液附着在清洗装置液体喷射喷嘴或清洗之后通过蒸发水使脂肪族多元羧酸重结晶 坦克和一个房间。 在含有熔点为25℃以上的脂肪族多元羧酸的光致抗蚀剂残渣和聚合物残渣除去液组合物中,除去液含有与水混溶的有机溶剂,蒸气压为17mmHg以下 25℃和结构内的羟基。