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    • 3. 发明授权
    • Vorrichtung und Verfahren zum Temperieren mindestens eines Prozessierguts
    • 装置和方法用于回火至少一个Prozessierguts
    • EP1277237B1
    • 2010-09-15
    • EP00987007.2
    • 2000-10-20
    • Saint-Gobain Glass France S.A.
    • PROBST, Volker
    • H01L31/18H01L21/00H01L21/324
    • H01L21/67115
    • The invention relates to a device and a method for tempering at least one process good (3) under a certain process gas atmosphere (111) of at least one process gas (4) by means of a tempering unit (6) which is provided with at least one energy source (5) for receiving an amount of energy by means of the process good (3), a tempering container (11) comprising a tempering room (16) for storing the process good (3) under the process gas atmosphere (111) during tempering and a tempering chamber (13). The tempering container (11) is arranged at a distance (18) to the tempering chamber (13) and in the tempering chamber (13) in such a way that there is a gap (14) between the tempering container (11) and the tempering chamber (13). The tempering unit is also provided with a means (19) for producing an additional gas atmosphere (141) of an additional gas in the gap (14), whereby said additional gas atmosphere is different from the process gas atmosphere (111). The additional gas atmosphere is provided with a pressure gradient (2). According to the inventive device and method, a toxic and/or corrosive process gas can be used for processing the process good. It is especially possible to produce a photovoltaic thin-film chalcopyrite absorber of a solar cell and/or of a solar module using the inventive device and method.