专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

EP3913372B1 METHOD AND DEVICE FOR COMPENSATION FOR DIMENSIONAL VARIATIONS IN LOW TEMPERATURE SAMPLE GROUP HOLDERS 有权
公开(公告)号：EP3913372B1
公开(公告)日：2024-03-06
申请号：EP21178942.5
申请日：2012-07-23
发明人： NEEPER, Robert, K.
IPC分类号： G01N35/00 , G01N35/04

2. 发明授权

EP2756285B1 VOLUMETRIC MEASUREMENT 有权
公开(公告)号：EP2756285B1
公开(公告)日：2023-05-31
申请号：EP12832367.2
申请日：2012-09-14
发明人： LEE, David, Charles , SHORT, Martin, G. , WHITESIDE, Melvyn , REDBURN, Tim
IPC分类号： G01N21/49 , G01F23/292 , G01B11/06 , G01F17/00 , H04N5/225 , H04N5/33

3. 发明公开

EP3691836A1 SUBSTRATE TRANSPORT APPARATUS WITH INDEPENDENT ACCESSORY FEEDTHROUGH 审中-公开
公开(公告)号：EP3691836A1
公开(公告)日：2020-08-12
申请号：EP18864263.1
申请日：2018-10-05
申请人： Brooks Automation, Inc.
发明人： PLAISTED, Sean, E. , SHARROCK, Leigh, F , AITKEN, Chris
IPC分类号： B25J9/00 , B25J9/04 , B25J9/08 , B25J9/10 , B25J11/00 , G05B19/04 , H01L21/677

4. 发明授权

EP3253261B1 TURN-SECURE RACK 有权转让
公开(公告)号：EP3253261B1
公开(公告)日：2019-08-14
申请号：EP16703753.0
申请日：2016-02-05
申请人： Brooks Automation, Inc.
发明人： WEBER-HOVENDAHL, Lars , NIELSEN, Michael Gabs Kaagaard
IPC分类号： G01N35/04 , A47F7/00 , G01N35/02 , B01L9/06

5. 发明公开

EP3484671A1 SUBSTRATE PROCESSING APPARATUS 审中-公开
公开(公告)号：EP3484671A1
公开(公告)日：2019-05-22
申请号：EP17743430.5
申请日：2017-07-07
申请人： Brooks Automation, Inc.
发明人： TSANG, Vincent, W. , SU, Charles, W.
IPC分类号： B25J9/04 , B25J9/10 , F16H19/00 , H01L21/677

6. 发明公开

EP2140241A4 MEASUREMENT INSTRUMENT AND METHOD 审中-公开
标题翻译： VERFAHREN的信使
公开(公告)号：EP2140241A4
公开(公告)日：2017-01-11
申请号：EP08743228
申请日：2008-04-24
申请人： BROOKS AUTOMATION INC
发明人： BORENSTEIN MICHAEL
IPC分类号： G01D3/024 , G01L15/00
CPC分类号： G01L11/00 , G01D3/024 , G01D21/00 , G01L15/00 , G01N9/00
摘要： A measurement instrument having a processor, a first sensor and a second sensor. The processor is adapted to output a measurement signal embodying a measurement of a physical quantity. The first sensor and second sensor are connected to the processor and are operable to generate respectively first and second measurements of the physical quantity. The processor defines a first measurement range within which the measurement signal is dependent on the first measurement and not the second measurement. The processor defines a second measurement range within which the measurement signal is dependent on the second measurement and not the first measurement. The first and second ranges meet at a predetermined transition. The first and second measurements are different at the transition and the measurement embodied in the measurement signal crosses the transition without an abrupt change.
摘要翻译：一种具有处理器，第一传感器和第二传感器的测量仪器。处理器适于输出体现物理量测量的测量信号。第一传感器和第二传感器连接到处理器并且可操作以分别产生物理量的第一和第二测量值。处理器定义第一测量范围，其中测量信号取决于第一测量而不是第二测量。处理器定义第二测量范围，其中测量信号取决于第二测量而不是第一测量。第一和第二范围在预定的转变处相遇。第一和第二测量在转变时是不同的，并且测量信号中体现的测量与没有突然变化的过渡相交。

7. 发明公开

EP2756285A1 VOLUMETRIC MEASUREMENT 有权
标题翻译：体积测量
公开(公告)号：EP2756285A1
公开(公告)日：2014-07-23
申请号：EP12832367.2
申请日：2012-09-14
申请人： Brooks Automation, Inc.
发明人： LEE, David, Charles , SHORT, Martin, G. , WHITESIDE, Melvyn , REDBURN, Tim
IPC分类号： G01N21/49
CPC分类号： G01F17/00 , G01B11/0608 , G01F23/292 , H04N5/2256 , H04N5/33
摘要： A volumetric measurement system having an imaging device and a light source, where the light source is configured to illuminate the container and the sample regardless of a blockage or obstruction of the sample on at least part of the container.

8. 发明授权

EP1094921B1 TRANSFERRING SUBSTRATES WITH DIFFERENT HOLDING END EFFECTORS 有权
标题翻译：具有不同横BODIES运输SUBSTRATES
公开(公告)号：EP1094921B1
公开(公告)日：2012-04-11
申请号：EP99942580.4
申请日：1999-02-17
申请人： BROOKS AUTOMATION, INC.
发明人： HOFMEISTER, Christopher, A.
IPC分类号： H01L21/677
CPC分类号： B25J9/042 , B25J9/044 , H01L21/67766 , H01L21/67781 , H01L21/68707 , Y10S414/141
摘要： A method of transferring semi-conductor substrates from a first location (34) to a second location (16). The first (34) and second (16) locations are adapted to hold a plurality of the substrates in individual support area. The method comprises use of a transfer mechanism (32) with two substrate holding end effectors (46, 48) which each have support areas adapted to individually support different maximum numbers of substrates thereon. The substrates are transferred from the first location (34) to the second location (16) with the first end effector (46) and, when empty individual support areas in the second location (16) or substrates at the first location are less than the maximum number of support areas on the first end effector (46), transferring substrates from the first location (34) to the second location (16) with use of the second end effector (48).

9. 发明公开

EP1786710A4 REDUCED CAPACITY CARRIER AND METHOD OF USE 审中-公开
标题翻译：与容量降低以及使用方法CARRIER
公开(公告)号：EP1786710A4
公开(公告)日：2011-10-12
申请号：EP05791673
申请日：2005-08-19
申请人： BROOKS AUTOMATION INC
发明人： ULYSSES GILCHRIST , BUFANO MICHAEL L , FOSNIGHT WILLIAM , HOFMEISTER CHRISTOPHER , FRIEDMAN GERALD M
IPC分类号： H01L21/68
CPC分类号： H01L21/67763 , H01L21/67326 , H01L21/67353 , H01L21/67369 , H01L21/67373 , H01L21/67376 , H01L21/67383 , H01L21/67389 , H01L21/67393 , H01L21/67772 , H01L21/67778 , H01L21/6779 , Y10S414/139
摘要： A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.

10. 发明公开

EP2310681A2 METHOD AND APPARATUS FOR PROVIDING TEMPERATURE CONTROL TO A CRYOPUMP 审中-公开
标题翻译：方法和设备提供温度控制对低温泵
公开(公告)号：EP2310681A2
公开(公告)日：2011-04-20
申请号：EP09774335.5
申请日：2009-06-30
申请人： Brooks Automation, Inc.
发明人： BALL-DIFAZIO, Doreen, J. , JOHNSON, William, L. , MORRIS, Ronald, N. , SULLIVAN, Robert, P.
IPC分类号： F04B37/08 , F04B37/00
CPC分类号： F04B37/08 , B01D8/00 , F04B37/085
摘要： Cryopump components are improved using thin layer heating elements for temperature control or to serve as heaters. These heating elements may be located and prevent pooling during regeneration. The temperature control may also be achieved through the use of ceramic heating elements. The ceramic heating elements may also include a second function of structural support within the cryopump. Temperature control may further be achieved via the radiation shield, where the radiation shield includes a clad sheeting or coating.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式