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1. 发明公开

EP3984061A2 SUBSTRATE PROCESS APPARATUS 审中-实审
公开(公告)号：EP3984061A2
公开(公告)日：2022-04-20
申请号：EP20821578.0
申请日：2020-06-15
申请人： Brooks Automation, Inc.
发明人： KRUPYSHEV, Alexander , SHARROCK, Leigh , BABBS, Daniel , MAY, Robert
IPC分类号： H01L21/677 , H01L21/687 , H01L21/67

2. 发明公开

EP3913372A1 METHOD AND DEVICE FOR COMPENSATION FOR DIMENSIONAL VARIATIONS IN LOW TEMPERATURE SAMPLE GROUP HOLDERS 有权
公开(公告)号：EP3913372A1
公开(公告)日：2021-11-24
申请号：EP21178942.5
申请日：2012-07-23
申请人： Brooks Automation, Inc.
发明人： NEEPER, Robert, K.
IPC分类号： G01N35/00 , G01N35/04
摘要： In accordance with one or more aspects of the disclosed embodiment an apparatus is provided. The apparatus includes a pick head configured to transfer sample containers to and from a sample group holder, at least one sensor connected to the pick head and configured to detect at least one predetermined feature of the sample group holder, and a controller configured to receive a detection signal from the at least one sensor corresponding to detection of the at least one predetermined feature, determine a change in a predetermined characteristic of the sample group holder based on a detected position of the at least one predetermined feature, and determine a location of one or more samples in the sample group holder to allow for the transfer of the one or more sample containers to and from the sample group holder based on the edge detection signal.

3. 发明公开

EP3888119A1 LOAD PORT MODULE 审中-公开
公开(公告)号：EP3888119A1
公开(公告)日：2021-10-06
申请号：EP19890201.7
申请日：2019-11-26
申请人： Brooks Automation, Inc.
发明人： SOUNOUGATOV, Radik , CARLSON, Robert
IPC分类号： H01L21/673 , H01L21/677

4. 发明公开

EP3888118A1 LOAD PORT MODULE 审中-实审转让
公开(公告)号：EP3888118A1
公开(公告)日：2021-10-06
申请号：EP19889663.1
申请日：2019-11-26
申请人： Brooks Automation, Inc.
发明人： SOUNOUGATOV, Radik , CARLSON, Robert , KROLAK, Michael
IPC分类号： H01L21/673 , H01L21/677

5. 发明公开

EP3861570A1 SUBSTRATE PROCESSING APPARATUS 审中-公开
公开(公告)号：EP3861570A1
公开(公告)日：2021-08-11
申请号：EP19868791.5
申请日：2019-10-04
申请人： Brooks Automation, Inc.
发明人： TSANG, Vincent, W. , CAVENEY, Robert, T.
IPC分类号： H01L21/677 , B25J9/06 , B25J18/02 , B25J18/04 , H01L21/683

6. 发明公开

EP3691836A1 SUBSTRATE TRANSPORT APPARATUS WITH INDEPENDENT ACCESSORY FEEDTHROUGH 审中-公开
公开(公告)号：EP3691836A1
公开(公告)日：2020-08-12
申请号：EP18864263.1
申请日：2018-10-05
申请人： Brooks Automation, Inc.
发明人： PLAISTED, Sean, E. , SHARROCK, Leigh, F , AITKEN, Chris
IPC分类号： B25J9/00 , B25J9/04 , B25J9/08 , B25J9/10 , B25J11/00 , G05B19/04 , H01L21/677

7. 发明授权

EP3253261B1 TURN-SECURE RACK 有权转让
公开(公告)号：EP3253261B1
公开(公告)日：2019-08-14
申请号：EP16703753.0
申请日：2016-02-05
申请人： Brooks Automation, Inc.
发明人： WEBER-HOVENDAHL, Lars , NIELSEN, Michael Gabs Kaagaard
IPC分类号： G01N35/04 , A47F7/00 , G01N35/02 , B01L9/06

8. 发明公开

EP3484671A1 SUBSTRATE PROCESSING APPARATUS 审中-公开
公开(公告)号：EP3484671A1
公开(公告)日：2019-05-22
申请号：EP17743430.5
申请日：2017-07-07
申请人： Brooks Automation, Inc.
发明人： TSANG, Vincent, W. , SU, Charles, W.
IPC分类号： B25J9/04 , B25J9/10 , F16H19/00 , H01L21/677

9. 发明公开

EP2140241A4 MEASUREMENT INSTRUMENT AND METHOD 审中-公开
标题翻译： VERFAHREN的信使
公开(公告)号：EP2140241A4
公开(公告)日：2017-01-11
申请号：EP08743228
申请日：2008-04-24
申请人： BROOKS AUTOMATION INC
发明人： BORENSTEIN MICHAEL
IPC分类号： G01D3/024 , G01L15/00
CPC分类号： G01L11/00 , G01D3/024 , G01D21/00 , G01L15/00 , G01N9/00
摘要： A measurement instrument having a processor, a first sensor and a second sensor. The processor is adapted to output a measurement signal embodying a measurement of a physical quantity. The first sensor and second sensor are connected to the processor and are operable to generate respectively first and second measurements of the physical quantity. The processor defines a first measurement range within which the measurement signal is dependent on the first measurement and not the second measurement. The processor defines a second measurement range within which the measurement signal is dependent on the second measurement and not the first measurement. The first and second ranges meet at a predetermined transition. The first and second measurements are different at the transition and the measurement embodied in the measurement signal crosses the transition without an abrupt change.
摘要翻译：一种具有处理器，第一传感器和第二传感器的测量仪器。处理器适于输出体现物理量测量的测量信号。第一传感器和第二传感器连接到处理器并且可操作以分别产生物理量的第一和第二测量值。处理器定义第一测量范围，其中测量信号取决于第一测量而不是第二测量。处理器定义第二测量范围，其中测量信号取决于第二测量而不是第一测量。第一和第二范围在预定的转变处相遇。第一和第二测量在转变时是不同的，并且测量信号中体现的测量与没有突然变化的过渡相交。

10. 发明授权

EP1901983B1 LOAD PORT MODULE 有权转让
标题翻译：充电接口模块
公开(公告)号：EP1901983B1
公开(公告)日：2015-03-04
申请号：EP06786631.9
申请日：2006-07-10
申请人： Brooks Automation, Inc.
发明人： HALL, Daniel, A. , SINDLEDECKER, Glenn, L. , COADY, Matthew, W. , TROLIO,Marcello , SPINAZOLA, Michael
IPC分类号： C23F1/00 , H01L21/67 , H01L21/673 , B65G1/00 , C23C16/00 , H01L21/677
CPC分类号： H01L21/67775 , B65G47/34 , H01L21/67265 , H01L21/67379 , H01L21/67772 , H01L2924/0002 , H01L2924/00

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