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    • 3. 发明公开
    • VERFAHREN ZUR HERSTELLUNG VON POLYKRISTALLINEM SILICIUM
    • EP3097053A1
    • 2016-11-30
    • EP15700394.8
    • 2015-01-16
    • Wacker Chemie AG
    • FAERBER, StefanBERGMANN, AndreasPECH, ReinerRIESS, Siegfried
    • C01B33/035
    • C01B33/035C30B15/36
    • The subject matter of the invention is a method for producing polycrystalline silicon, comprising a) depositing of polycrystalline silicon by means of CVD on at least one U-shaped substrate which is heated by way of direct current passage to a temperature at which polycrystalline silicon is deposited on the substrate, as a result of which at least one U-shaped polycrystalline silicon rod pair is produced, wherein the substrate is connected at each of its free ends to a graphite electrode and is supplied with current in this way; b) removal of the at least one polycrystalline silicon rod pair from the reactor; c) elimination of graphite residues from the electrode-side ends of the at least two polycrystalline silicon rods of the at least one polycrystalline silicon rod pair; d) comminution of the at least two polycrystalline silicon rods into rod pieces or into fragments; characterized in that the graphite residues are chipped off each electrode-side end of the at least two polycrystalline silicon rods by means of at least one mechanical pulse.
    • 本发明的主题是一种制造多晶硅的方法,其包括:a)通过CVD在通过直流通路加热的至少一个U形衬底上沉积多晶硅至多晶硅为 沉积在衬底上,由此产生至少一个U形多晶硅棒对,其中衬底在其每个自由端连接到石墨电极并且以这种方式被供应电流; b)从反应器中除去至少一个多晶硅棒对; c)从所述至少一个多晶硅棒对的至少两个多晶硅棒的电极侧末端消除石墨残渣; d)将所述至少两个多晶硅棒粉碎成棒片或碎片; 其特征在于,借助于至少一个机械脉冲将所述石墨残渣从所述至少两个多晶硅棒的每个电极侧端部切下。