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    • 5. 发明公开
    • Detector for helium leaks
    • Heliumleckdetektor。
    • EP0352371A2
    • 1990-01-31
    • EP88202518.2
    • 1988-11-11
    • VARIAN S.p.A.
    • Audi, Mauro
    • G01M3/04G01M3/20
    • G01M3/202
    • The detector substantially comprises an ion pump (1) and a sniffer probe made up by one or more capillary tubes of silica glass (10) closed at one end and connected to the ion pump at the opposed end, having an overall surface comprised between 0.1 and 10 cm². A heater (12) heats the capillary tube to a temperature comprised between 300 and 900°C at which temperature silica glass is substantially permeable to helium only. By carrying out the detection under such conditions, an increase of the ion current drawn by the pump is obtained, which is detected through a suitable device included in the detector control unit (2). The heater is slaved to a command device causing it to be turned off when the pump current exceeds a predetermined threshold.
    • 检测器基本上包括离子泵(1)和由一个或多个二氧化硅玻璃(10)的毛细管构成的嗅探探头,该毛细管在一端封闭并且在相对端与离子泵连接,整个表面包含在0.1 和10厘米2。 加热器(12)将毛细管加热到300-900℃之间的温度,在该温度下石英玻璃仅基本上可渗透氦气。 通过在这种条件下进行检测,可以获得由泵吸收的离子电流的增加,通过包括在检测器控制单元(2)中的合适装置来检测。 当泵电流超过预定阈值时,将加热器从属于指令装置,使其关闭。
    • 7. 发明公开
    • Improved electronic feeder for an ion pump
    • Elektronische Versorgungfüreine Ionenpumpe。
    • EP0337530A2
    • 1989-10-18
    • EP89200709.7
    • 1989-03-20
    • VARIAN S.p.A.
    • Busso, MarioAudi, Mauro
    • H01J41/12
    • H01J41/12
    • An improved electronic device allows for the the feeding of an ion pump (11) with a plurality of voltages that are changed as a function of the current drawn by the pump and therefore of the pressure value within the pump.
      This is achieved thanks to a transformer (10) having a primary winding comprising several sections connected to as many switch contacts (20,22...24,26) controlled by associated relays (66,68...70,72).
      As an alternative, the voltage feeding the ion pump (11) is changed by controlling the trigger angle of a triac (84), or controlling the bias voltage applied to the gate of a field effect transistor (134) connected to the primary winding (122) of a power supply transformer (124).
    • 改进的电子装置允许以离子泵(11)的供给为基础,其中多个电压根据由泵抽取的电流以及因此在泵内的压力值而改变。 这是通过具有初级绕组的变压器(10)实现的,该初级绕组包括几个部分,其连接到由相关联的继电器(66,68 ... 70,72)控制的开关触点(20,22,24,26)。 作为替代,通过控制三端双向可控硅(84)的触发角度,或者控制施加到连接到初级绕组的场效应晶体管(134)的栅极的偏置电压来改变馈送离子泵(11)的电压 122)。