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1. 发明公开

EP2852815A1 CONVERTISSEUR CHROMATIQUE D'ALTIMETRIE 有权
公开(公告)号：EP2852815A1
公开(公告)日：2015-04-01
申请号：EP13724261.6
申请日：2013-05-21
申请人： Unitechnologies SA
发明人： BURRY, Jean-Michel , BERGER, Leon
IPC分类号： G01B11/25
CPC分类号： G01B11/0608 , G01B11/24 , G01B11/2509 , G01B2210/50 , G01C5/00 , G02B13/22 , G02B19/0028 , G02B19/0076 , G02B26/02 , G02B27/14 , G02B27/30
摘要： The present invention relates to a chromatic converter for altimetry, intended to produce a real and complete image of a preset observation zone of a sample surface that is representative of the local height of the sample, the converter especially comprising: (i) a device for illuminating the sample, comprising at least one polychromatic light source; and (ii) a mask allowing N incident beams to be generated simultaneously from the polychromatic light, each incident beam defining one object point. The illuminating device is arranged in order to cover at any moment all of the preset observation zone, whereas the mask is arranged in such a way that it blocks a portion of the polychromatic light in order to allow only the N incident beams to pass, the latter defining object points that are distributed over substantially the entire extent of the observation zone. An Offner autocollimator comprising at least one Mangin mirror is employed to introduce axial chromaticity into the incident beams.
摘要翻译：本发明涉及一种用于测高的彩色转换器，用于产生代表样本局部高度的样本表面的预设观察区域的真实和完整的图像，该转换器尤其包括：（i）用于测量照射样品，包括至少一个多色光源; 和（ii）允许从多色光同时产生N个入射光束的掩模，每个入射光束定义一个目标点。照明装置被布置成在任何时刻覆盖所有预设的观察区域，而掩模以这样的方式布置，即它遮挡多色光的一部分以便仅允许N个入射光束通过，后者定义了分布在观察区的整个范围内的物点。采用包括至少一个Mangin反射镜的Offner自动准直仪来将轴向色度引入到入射光束中。

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