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    • 3. 发明公开
    • (AMIDE AMINO ALKANE) METAL COMPOUND, METHOD OF MANUFACTURING METAL-CONTAINING THIN FILM USING SAID METAL COMPOUND
    • (AMID氨基的烷),产生一个含金属薄膜这种金属连接金属化合物和方法
    • EP2636674A1
    • 2013-09-11
    • EP11838078.1
    • 2011-11-02
    • Ube Industries, Ltd.
    • FUJIMURA, OsamuKANATO, HirokiSHIRAI, MasashiNIHEI, Hiroshi
    • C07F3/02C07F1/02C07F1/04C07F3/06C07F5/00C07F13/00C07F15/02C07F15/04C07F15/06C23C16/18C23C16/40
    • H01L51/0083C07C211/65C07F3/02C07F3/06C07F5/003C07F13/005C07F15/025C07F15/045C07F15/065C23C16/18C23C16/403C23C16/407H01L51/0077H01L51/0084H01L51/0089H01L51/0092
    • The present invention relates to an (amide amino alkane) metal compound represented by the formula (1):

      wherein
      M represents a metal atom;
      R 1 represents a linear, branched or cyclic alkyl group having 1 to 6 carbon atoms;
      R 2 and R 3 may be the same as, or different from each other, and each independently represents a linear or branched alkyl group having 1 to 3 carbon atoms, or R 2 and R 3 may form a substituted or unsubstituted 5- or 6-membered ring together with the nitrogen atom to which they are bound;
      Z represents a linear or branched alkylene group having 1 to 10 carbon atoms (a part of which may optionally form a ring); and
      n represents a number of the ligands, which is equal to the valence of the metal (M), and represents an integer of from 1 to 3; with the proviso that
      the metal compounds in which M is Li (Lithium), Be (Beryllium), Ge (Germanium) or Nd (Neodymium) are excluded;
      the metal compounds in which M is Mg (Magnesium) and R 1 is methyl group are excluded;
      the metal compounds in which M is Zn (Zinc) and R 1 is methyl group are excluded;
      the metal compounds in which M is Bi (Bismuth) and R 1 is t-butyl group are excluded; and
      in cases where n is two or greater, two or more ligands may be the same as, or different from each other; and a method of producing a metal-containing thin film using the metal compound.
    • 本发明涉及由下式表示(烷烃酰胺氨基)与金属化合物(1):M worin darstellt金属原子; R 1表示具有1至6个碳原子的直链,支链或环状烷基; R 2和R 3可以是相同的,或从海誓山盟不同,并且各自unabhängigdarstellt的直链或具有1至3个碳原子,或R 2和R 3可以形成一个5元或6 substituiertem奥德unsubstituiertem支链烷基 - 元与氮原子一起环它们所约束; Z代表具有1至10个碳原子(它的一部分可以任选形成环)的直链或支链亚烷基; 和n darstellt一些配体,所有这一切是等于金属(M)的化合价,并且在从1至3的整数darstellt; 其条件所做的金属化合物,其中M是Li(锂),BE(铍),Ge(锗),或Nd(钕)被排除在外; 其中,M为Mg(镁)和R 1中的金属化合物是甲基被排除; 其中,M的金属化合物是Zn(锌)和R 1是甲基基团排除在外; 其中M为Bi(铋)和R 1中的金属化合物是叔丁基被排除; 和在其中n是2或更大时,两个或更多个配体可以是相同的,或从不同的海誓山盟例; 和使用了该金属化合物的含有金属的薄膜的方法。