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1. 发明公开

EP2644755A1 SINGLE CRYSTAL PULLING DEVICE AND LOW HEAT CONDUCTIVE MEMBER TO BE USED IN SINGLE CRYSTAL PULLING DEVICE 有权
标题翻译：装置：用于使用在设备中进行繁殖育种用单晶硅单晶和低温热传导件
公开(公告)号：EP2644755A1
公开(公告)日：2013-10-02
申请号：EP11843787.0
申请日：2011-11-21
申请人： Toyo Tanso Co., Ltd.
发明人： OKADA, Osamu , KAWAKAMI, Masaaki
IPC分类号： C30B15/10 , C04B35/83 , C30B29/06
CPC分类号： C30B15/14 , C30B15/10 , C30B15/30 , C30B29/06 , Y10T117/1032 , Y10T117/1068 , Y10T117/1072
摘要： A single crystal pulling apparatus (1) has a quartz crucible (2) for accommodating silicon melt (3), a graphite crucible (4) for retaining the quartz crucible (2), a tray (5) for securing and holding the graphite crucible (4) from below, and a crucible rotating shaft (6) for supporting the tray (5) from below and for elevating and lowering the tray (5) and the crucibles (2), (4) while rotating them. A low heat conductive member (10) is interposed on a joint surface between the tray (5) and the crucible rotating shaft (6). The low heat conductive member (10) is formed in a substantially tubular shape, and is interposed in such a manner that a protruding portion of the crucible rotating shaft (6) is inserted through a center hole of the low heat conductive member (10). Thereby, a gap portion (11) is formed below a bottom portion of the tray (5).
摘要翻译：的单晶提拉装置（1）具有一个石英坩埚（2），用于容纳硅熔液（3）中，石墨坩埚（4），用于保持石英坩埚（2），托盘（5）用于固定和保持石墨坩埚（4）从下方，从下方支撑所述托盘（5）和用于提升和降低所述托盘（5）的坩埚旋转轴（6）和所述坩埚（2），（4），同时使它们旋转。甲低导热构件（10）插置在托盘（5）和坩埚旋转轴（6）之间的接合表面。该低导热构件（10）被形成为大致筒状，并且被插入在寻求的方式并坩埚旋转轴的突出部分（6）通过低导热性构件的中心孔（10）插入，从而，间隙部分（11）形成下方的托盘（5）的底部。

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