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1. 发明公开

EP1469298A1 SPECTRAL MEASURING DEVICE 审中-公开
标题翻译： SPEKTRALMESSVORRICHTUNG
公开(公告)号：EP1469298A1
公开(公告)日：2004-10-20
申请号：EP02792020.6
申请日：2002-12-26
申请人： Tochigi Nikon Corporation , Nikon Corporation
发明人： USAMI, Mamoru, c/o Nikon Corporation , IWAMOTO, Toshiyuki, c/o NIKON CORPORATION
IPC分类号： G01N21/01 , G01N21/35
CPC分类号： G01N21/3581 , G01N21/03 , G01N2021/151
摘要： A holder (30) that holds a specimen (100) is disposed outside a vacuum chamber (50) with a light transmission window (52a). A light detection unit and a light radiation unit having a terahertz light generator (6) are fixed on a base (53) disposed inside the vacuum chamber. The light radiation unit irradiates terahertz pulse light onto the specimen (100) placed outside the vacuum chamber via the light transmission window (52a) and the resulting specimen light from the specimen (100) is received at the light detection unit via the light transmission window (52a). The base (53) in the vacuum chamber and the holder (30) disposed outside the vacuum chamber are connected via a connecting member (54a) passing displaceably through a barrier wall of a vacuum chamber (50) with airtight sealing so as to fix the relative position of the holder to the base.
摘要翻译：保持试样（100）的保持器（30）设置在具有透光窗（52a）的真空室（50）的外侧。具有太赫兹光发生器（6）的光检测单元和光辐射单元固定在设置在真空室内的基座（53）上。光辐射单元经由透光窗（52a）将太赫兹脉冲光照射到放置在真空室外部的样品（100）上，并且来自样品（100）的所得样本光经由透光窗被接收在光检测单元（52A）。真空室中的基座53和设置在真空室外的保持器30经由可气密地穿过真空室50的阻挡壁的连接构件54a连接，支架与基座的相对位置。

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