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1. 发明授权

EP3205993B1 PRESSURE SENSOR 有权
公开(公告)号：EP3205993B1
公开(公告)日：2020-10-21
申请号：EP15849018.5
申请日：2015-09-28
申请人： The University of Tokyo , Seiko Instruments Inc.
发明人： SHIMOYAMA Isao , MATSUMOTO Kiyoshi , TAKAHASHI Hidetoshi , NGUYEN Minh-Dung , UCHIYAMA Takeshi , OUMI Manabu , SHINOHARA Yoko , SUDA Masayuki
IPC分类号： G01L9/00 , H01L29/84 , G01L23/10 , G01L1/22

2. 发明公开

EP3118598A1 PRESSURE SENSOR 有权
标题翻译：压力传感器
公开(公告)号：EP3118598A1
公开(公告)日：2017-01-18
申请号：EP15762325.7
申请日：2015-02-27
申请人： Seiko Instruments Inc. , The University of Tokyo
发明人： SHIMOYAMA Isao , MATSUMOTO Kiyoshi , TAKAHASHI Hidetoshi , NGUYEN Minh-Dung , UCHIYAMA Takeshi , OUMI Manabu , SHINOHARA Yoko , SUDA Masayuki
IPC分类号： G01L9/00 , H01L29/84
CPC分类号： G01L9/0052 , G01L9/0002 , G01L9/0019 , G01L23/18
摘要： The present invention relates to a pressure sensor (1) which detects variation in pressures, the pressure sensor including a cantilever (4) which is bent according to a pressure difference between the inside and the outside of a cavity in a sensor main body, and an intra-lever gap (21) which is formed on a proximal end portion (4a) of the cantilever. The proximal end portion is partitioned into a first support portion (22) and a second support portion (23) by an intra-lever gap in a second direction (L2) orthogonal to a first direction (L1) in which the proximal end portion and a distal end portion (4b) are connected to each other in plan view. A doped layer (24) which is provided on a portion of the first and second support portions forms a first displacement detection portion (25) and a second displacement detection portion (26). Lengths of the first and second displacement detection portions are shorter than those of the first and second supports along the second direction.
摘要翻译：本发明涉及检测压力变化的压力传感器（1），该压力传感器包括根据传感器主体中的腔室的内部和外部之间的压力差而弯曲的悬臂（4），以及形成在悬臂的近端部分（4a）上的杆内间隙（21）。近端部分通过杆内间隙沿与第一方向（L1）正交的第二方向（L2）分隔成第一支撑部分（22）和第二支撑部分（23），其中近端部分在平面图中远端部分（4b）彼此连接。设置在第一和第二支撑部分的一部分上的掺杂层（24）形成第一位移检测部分（25）和第二位移检测部分（26）。第一和第二位移检测部分的长度比第一和第二支撑件沿第二方向的长度短。

3. 发明授权

EP3118598B1 PRESSURE SENSOR 有权
公开(公告)号：EP3118598B1
公开(公告)日：2020-12-09
申请号：EP15762325.7
申请日：2015-02-27
申请人： Seiko Instruments Inc. , The University of Tokyo
发明人： SHIMOYAMA Isao , MATSUMOTO Kiyoshi , TAKAHASHI Hidetoshi , NGUYEN Minh-Dung , UCHIYAMA Takeshi , OUMI Manabu , SHINOHARA Yoko , SUDA Masayuki
IPC分类号： G01L9/00 , H01L29/84 , G01L23/18

4. 发明公开

EP3205993A1 PRESSURE SENSOR 有权
标题翻译：压力传感器
公开(公告)号：EP3205993A1
公开(公告)日：2017-08-16
申请号：EP15849018.5
申请日：2015-09-28
申请人： The University of Tokyo , Seiko Instruments Inc.
发明人： SHIMOYAMA Isao , MATSUMOTO Kiyoshi , TAKAHASHI Hidetoshi , NGUYEN Minh-Dung , UCHIYAMA Takeshi , OUMI Manabu , SHINOHARA Yoko , SUDA Masayuki
IPC分类号： G01L9/00 , H01L29/84
摘要： The present invention is a pressure sensor (1) which includes a sensor main body (2) having a cavity, a cantilever (3) having a lever main body (20) and a lever support portion (21A, 21B) and which is bent according to a pressure difference between the cavity and the outside of the sensor main body (2), and a displacement detection unit (4) which detects displacement of the cantilever (3) based on resistance variation in resistance values of the main body-resistance portion (31) formed in the lever main body (20) and a lever-resistance portion (32) formed in the lever support portion (21A, 21B). A division groove (40) is formed in the lever support (21A), and the division groove (40) divides the lever-resistance portion (32) into a first resistance portion (32a) which is electrically connected to a detection electrode (35) in series and a second resistance portion (32b) which is positioned so as to be closer to the other adjacent lever support portion (21B) than the first resistance portion (32a). The first resistance portion (32a) of the lever support portion (21A, 21B) is electrically connected to the detection electrode (35) via a parallel path of a first path (S1) passing through the main body-resistance portion (31) and a second path (S2) passing through the second resistance portion (32b).
摘要翻译：本发明是一种压力传感器（1），其包括具有空腔的传感器主体（2），具有杆主体（20）和杆支撑部（21A，21B）的悬臂（3）根据所述腔体与所述传感器主体（2）的外部之间的压力差以及基于所述主体电阻的电阻值的电阻变化来检测所述悬臂（3）的位移的位移检测单元（4）形成在杠杆主体20中的杠杆部分31和形成在杠杆支撑部分21A，21B中的杠杆阻力部分32。在杠杆支承部21A上形成有分割槽40，分割槽40将杠杆阻力部32分割为与检测电极35电连接的第一电阻部32a，）以及第二阻力部（32b），该第二阻力部（32b）被配置为比第一阻力部（32a）更靠近另一个相邻的杆支承部（21B）。杆支撑部（21A，21B）的第一阻力部（32a）经由穿过主体电阻部（31）的第一路径（S1）的平行路径与检测电极（35）电连接，穿过第二电阻部分（32b）的第二路径（S2）。

5. 发明公开

EP2846143A1 PRESSURE SENSOR 审中-公开
标题翻译： DRUCKSENSOR
公开(公告)号：EP2846143A1
公开(公告)日：2015-03-11
申请号：EP13785081.4
申请日：2013-03-19
申请人： Seiko Instruments Inc. , The University of Tokyo
发明人： SHIMOYAMA Isao , MATSUMOTO Kiyoshi , TAKAHASHI Hidetoshi , NGUYEN Minh-Dung , SHINOHARA Yoko , UCHIYAMA Takeshi , OUMI Manabu , SHINOGI Masataka
IPC分类号： G01L9/00 , G01L13/06 , H01L29/84
CPC分类号： G01L1/16 , G01L1/10 , G01L9/0002 , G01L9/0045 , G01L9/008 , G01L13/06 , G01L23/04
摘要： A pressure sensor includes a sensor body which has a first surface and a cavity with an opening in the first surface, a cantilever which has a base end portion supported on the first surface and a distal end portion provided to form a gap from a peripheral edge of the opening inside the opening, is flexurally deformed according to a pressure difference between an inside and an outside of the cavity, and is formed of a semiconductor material, and a displacement measurement unit which measures a displacement of the cantilever vibrating according to the pressure difference at a frequency larger than a lower limit frequency f LOW (Hz) defined by Expression (1), where a width (µm) of the gap is represented by G, a volume (ml) of the cavity is represented by V, and a proportional constant is represented by k. f LOW = k ⋅ G 2 / V
摘要翻译：压力传感器包括传感器主体，其具有第一表面和在第一表面中具有开口的空腔，悬臂，其具有支撑在第一表面上的基端部分，以及远端部分，设置成从周边边缘形成间隙在开口内的开口内部，根据空腔的内外压力而弯曲变形，由半导体材料形成，位移测量单元，其根据压力测量悬臂振动的位移由式（1）定义的频率大于下限频率f LOW（Hz）的频率的差，其中间隙的宽度（μm）由G表示，空腔的体积（ml）由V表示，比例常数由k表示。 f LOW = k

6. 发明授权

EP2803974B1 GAS SENSOR 有权
公开(公告)号：EP2803974B1
公开(公告)日：2020-04-15
申请号：EP12865116.3
申请日：2012-12-27
申请人： The University of Tokyo , Omron Corporation
发明人： SHIMOYAMA Isao , MATSUMOTO Kiyoshi , KAN Tetsuo , TAKEI Yusuke , TAKAHASHI Hidetoshi , ISHIZU Koutaro , HONDA Masahito
IPC分类号： G01N21/552 , G01N33/00

7. 发明公开

EP2669648A1 DIFFERENTIAL PRESSURE SENSOR 审中-公开
标题翻译：差压传感器
公开(公告)号：EP2669648A1
公开(公告)日：2013-12-04
申请号：EP12740019.0
申请日：2012-01-11
申请人： The University of Tokyo
发明人： SHIMOYAMA Isao , MATSUMOTO Kiyoshi , TAKAHATA Tomoyuki , KAN Tetsuo , KUWANA Kenta , TAKAHASHI Hidetoshi , NGUYEN Minh-Dung
IPC分类号： G01L13/06 , H04R21/02
CPC分类号： G01L9/06 , G01L9/0002 , G01L9/0042 , G01L9/0054 , G01L13/02 , G01L19/147 , H04R21/02
摘要： There is provided a differential pressure sensor capable of measuring a pressure fluctuation with a simple structure. The differential pressure sensor includes a main body formed with an air chamber, and an opening that causes an interior of the air chamber to be in communication with an exterior, and a detector provided at the opening. The detector includes a cantilever provided in a manner tiltable so as to block off the opening, and the cantilever is formed with a Piezo resistor layer.
摘要翻译：提供了一种能够以简单的结构测量压力波动的差压传感器。差压传感器包括形成有空气室的主体和使空气室的内部与外部连通的开口以及设置在开口处的检测器。检测器包括以可倾斜的方式设置的悬臂以阻挡开口，并且悬臂形成有压电电阻器层。

8. 发明公开

EP2803974A1 GAS SENSOR 审中-公开
标题翻译：气体传感器
公开(公告)号：EP2803974A1
公开(公告)日：2014-11-19
申请号：EP12865116.3
申请日：2012-12-27
申请人： The University of Tokyo , Omron Corporation
发明人： SHIMOYAMA Isao , MATSUMOTO Kiyoshi , KAN Tetsuo , TAKEI Yusuke , TAKAHASHI Hidetoshi , ISHIZU Koutaro , HONDA Masahito
IPC分类号： G01N21/27
CPC分类号： G01N21/27 , G01N21/553 , G01N33/0036 , G01N33/004 , G01N2201/0612 , G01N2201/067
摘要： A gas sensor is proposed, which can detect a gas by a novel configuration while reduction in size is achieved. The gas sensor (1) does not need a light absorption path as in a prior art so that the size can be reduced correspondingly. Further, in the gas sensor (1), a gas is absorbed in an ionic liquid (IL), and a dielectric constant of the ionic liquid (IL) that changes by absorbing the gas can be measured according to a change in light intensity that occurs by a surface plasmon resonance phenomenon in a metal layer (7). Thus, the gas sensor (1) including the novel configuration that can detect a gas based on the change in the light intensity can be realized.
摘要翻译：提出了一种气体传感器，该气体传感器能够通过新型配置来检测气体，同时实现尺寸的减小。气体传感器（1）不像现有技术那样需要光吸收路径，从而可以相应地减小尺寸。此外，在气体传感器（1）中，气体被离子液体（IL）吸收，并且可以根据光强度的变化来测量通过吸收气体而改变的离子液体（IL）的介电常数，通过金属层（7）中的表面等离子体共振现象而发生。因此，可以实现包括能够基于光强度的变化来检测气体的新颖构造的气体传感器（1）。

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