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    • 4. 发明公开
    • Manufacturing method of magnetic head apparatus with spin valve effect magnetoresistive head
    • HerstellungsverfahrenfüreinMagnetkopfgerätmit magnetoresistivem Kopf mit Spinventil-Effekt
    • EP0768641A1
    • 1997-04-16
    • EP96115884.7
    • 1996-10-04
    • TDK Corporation
    • Uno, YasufumiMiyauchi, DaisukeMatsuzaki, Mikio
    • G11B5/39
    • G11B5/3903G11B5/3932Y10T29/49034
    • A method of manufacturing a magnetic head apparatus with a magnetoresistive head utilizing the spin valve effect includes a final heat treatment step (S14) of heating the multi-layered spin valve structure (15) with application of a magnetic field in a direction perpendicular to a track width direction of the spin valve magnetoresistive head so that a thin film layer of soft ferromagnetic material (3, 5) to be pinned by a thin film layer of antiferromagnetic material (6) has a uniaxial anisotropy. This final heat treatment step (S14) is executed after all the steps (S1, S3, S5, S7, S8, S9, S11) each of which includes a heat treatment stage executed at a temperature which will vary a uniaxial anisotropy of the pinned thin film layer of soft ferromagnetic material (3,5) are completed.
    • 利用自旋阀效应制造具有磁阻头的磁头装置的方法包括:加热多层自旋阀结构(15)的最终热处理步骤(S14),其中在垂直于 自旋阀磁阻头的轨道宽度方向,由反铁磁材料(6)的薄膜层固定的软铁磁材料(3,5)的薄膜层具有单轴各向异性。 在所有步骤(S1,S3,S5,S7,S8,S9,S11)之后执行该最终热处理步骤(S14),其中每个步骤包括在将改变被钉扎的单轴各向异性的温度下执行的热处理阶段 完成软铁磁材料薄膜层(3,5)。