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1. 发明公开

EP1107291A2 Ceramic heating jig 有权
标题翻译： Keramischer Heizungshalter
公开(公告)号：EP1107291A2
公开(公告)日：2001-06-13
申请号：EP00310826.3
申请日：2000-12-06
申请人： Shin-Etsu Chemical Company, Ltd.
发明人： Kano, Shoji, c/o Adv. Funct. Mat. Research Center , Ito, Kenji, c/o Adv. Funct. Mat. Research Center , Sato, Akira, c/o Adv. Funct. Mat. Research Center
IPC分类号： H01L21/00
CPC分类号： H01L21/67103
摘要： There is disclosed a ceramic heating jig consisting of a susceptor 2 on which a work to be heated is placed, a ceramic heater 3 for heating the susceptor and at least one heat shielding plate 4 for shielding heat of the ceramic heater characterized in that the susceptor and the heat shielding plate are located so that each of them is located across the ceramic heater each leaving a certain space therefrom, a thickness of the susceptor is 0.5 mm to 5 mm, a thickness of the ceramic heater is 0.5 mm to 3 mm, a thickness of the heat shielding plate is 0.5 mm to 3 mm. Preferably, an interval between the members is 0.5 mm to 10 mm, and the members are elastically held as an integration by the elastic means 6 and the restraint means 7. There can be provided a ceramic heating jig wherein defects such as thermal deformation, breakage or the like of the susceptor or the like are hardly caused, temperature can be raised or lowered rapidly, and flatness of a susceptor can be kept even at high temperature.
摘要翻译：公开了一种陶瓷加热夹具，其由待加热的工件的基座2，用于加热基座的陶瓷加热器3和用于屏蔽陶瓷加热器的热的至少一个隔热板4组成，其特征在于，并且隔热板被定位成使得它们中的每一个都位于陶瓷加热器两侧，留下一定的空间，基座的厚度为0.5mm至5mm，陶瓷加热器的厚度为0.5mm至3mm，隔热板的厚度为0.5mm〜3mm。优选地，构件之间的间隔为0.5mm至10mm，并且通过弹性装置6和约束装置7将构件弹性地保持为一体。可以提供陶瓷加热夹具，其中诸如热变形，断裂的缺陷基座等不易引起温度升高或降低，即使在高温下也能保持基座的平坦度。

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