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    • 2. 发明公开
    • Solar cell with flexible substrate of adjustable bandgap quantum well structure and preparation method therefor
    • 具有在柔性基板及其制造方法具有可调带隙量子阱结构的太阳能电池及其
    • EP2889921A1
    • 2015-07-01
    • EP14162260.5
    • 2014-03-28
    • Shenyang Institute of Engineering
    • Zhang, TieyanZhang, DongJu, ZhenheZhao, YanLi, YucaiSong, ShiweiWang, JianBian, JimingLiu, BaodanZheng, Hong
    • H01L31/075H01L31/0392H01L31/0376H01L31/0352H01L31/0304H01L31/18H01L31/20
    • H01L31/03048H01L31/035236H01L31/03762H01L31/03926H01L31/075H01L31/1848H01L31/202Y02E10/544Y02E10/548Y02P70/521
    • The present invention belongs to the field of flexible solar cell manufacturing technology, in particular relates to a solar cell with a flexible substrate of an adjustable bandgap quantum well structure and a preparation method therefor. The solar cell of the present invention has a specific structure of Al electrode/GZO/P-type nc-Si:H/I layer In x Ga 1-x N intrinsic film/N-type nc-Si:H/GZO/Al back electrode/AIN insulating layer/polyimide (PI) flexible substrate. The preparation method for the present invention comprises the steps of: firstly, preparing an AIN insulating layer and an Al back electrode by a magnetron sputtering method; then preparing a Ga-doped ZnO (GZO) transparent conductive film, an N-type hydrogenated nano-crystalline silicon (nc-Si:H) film, an In x Ga 1-x N quantum well intrinsic crystal film, a P-type nc-Si:H film and another GZO transparent conductive film in sequence by an Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition (ECR-PEMOCVD) system; and finally preparing an Al metal electrode. The solar cell with a flexible substrate of an adjustable bandgap quantum well structure has excellent flexibility and light weight, is easy to carry, and has industrial potential and market space. Besides, the preparation process of the solar cell of the present invention is simple, which enables the solar cell to be produced in large scale.
    • 本发明属于的柔性太阳能电池的制造技术领域,具体涉及具有可调节的带隙量子阱结构的柔性基板和用于其的制备方法的太阳能电池。 本发明的太阳能电池具有Al电极/ GZO / p型纳米硅的具体结构:H / I层的In x镓1-X N的固有膜/ N型纳米硅:H / GZO / Al的 背面电极/ AIN绝缘层/聚酰亚胺(PI)的柔性基板。 用于本发明的制备方法包括以下步骤:首先,准备由AIN磁控溅射法绝缘层和Al背电极; 然后制备N型的掺Ga的ZnO(GZO)透明导电膜,氢化纳米晶硅(纳米硅:H)膜,的在X镓1-X N量子阱内在晶膜,在P型 纳米硅:H膜和另一个GZO透明导电通过电子回旋共振等离子体增强化学气相沉积(ECR PEMOCVD)系统的薄膜在序列; 最后准备Al的金属电极。 具有可调节的带隙量子阱结构的柔性基板上的太阳能电池具有优异的柔韧性,重量轻,便于携带,并且具有工业潜力和市场空间。 此外,本发明的太阳能电池的制备过程简单,这使得能够在大规模要制造的太阳能电池。