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    • 7. 发明公开
    • VERFAHREN ZUM FRAGMENTIEREN EINES STANGENARTIGEN MATERIALS, INSBESONDERE AUS POLYKRISTALLINEM SILIZIUM
    • VERFAHREN ZUM FRAGMENTIEREN EINES STANGENARTIGEN MATERIALS,INSBESONDERE AUS POLYKRISTALLINEM SILIZIUM
    • EP3122463A1
    • 2017-02-01
    • EP14717391.8
    • 2014-03-26
    • Selfrag AG
    • KÄPPELER, JohannesWEH, AlexanderKALKE, JürgenMÜLLER-SIEBERT, ReinhardKOLLY, JoëlMORACH, Marion Esther
    • B02C19/18
    • B02C19/18B02C2019/183
    • The invention relates to a method for fragmenting a rod-like semiconductor material (1), comprising the steps: a) providing a section (3) of the rod-like material (1) that is surrounded by a process fluid (2); b) arranging an electrode arrangement (4) comprising two electrodes (5, 6) in the region of this section (3) in such a way that the electrodes (5, 6) are immersed in the process fluid (2) and are at a distance from one another and are each at a distance from the rod-like material (1), c) generating high-voltage breakdowns through the rod-like material (1) and/or along the surface of the rod-like material (1) in the region of the electrodes (5, 6) by applying high-voltage pulses to the electrode arrangement (4), wherein, during the generation of the high-voltage breakdowns, a relative movement in the longitudinal direction of the rod-like material (1) is generated between the electrode arrangement (4) and the rod-like material (1). By virtue of the method according to the invention, it is possible to comminute rod-like semiconductor material into a fraction of relatively uniform size and shape with a low energy expenditure, and to maintain a low contamination with foreign material.
    • 本发明涉及一种分段棒状半导体材料(1)的方法,包括以下步骤:a)提供由工艺流体(2)包围的棒状材料(1)的部分(3); b)在该部分(3)的区域中布置包括两个电极(5,6)的电极布置(4),使得电极(5,6)浸入工艺流体(2)中并处于 彼此间距离并且与杆状材料(1)分开一段距离,c)通过杆状材料(1)和/或沿棒状材料的表面产生高压击穿( 1)通过向电极装置(4)施加高压脉冲而在电极(5,6)的区域中,其中,在产生高压击穿期间,在杆状件的纵向方向上的相对运动, 在电极装置(4)和棒状材料(1)之间产生类似材料(1)。 根据本发明的方法,可以以较低的能量消耗将棒状半导体材料粉碎成相当尺寸和形状的部分,并且能够保持对外来物质的低污染。