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1. 发明公开

EP1502746A1 Inkjet printhead and method of manufacturing the same 有权
标题翻译： Tintenstrahldruckkopf unddazugehörigesHerstellungsverfahren
公开(公告)号：EP1502746A1
公开(公告)日：2005-02-02
申请号：EP04254512.9
申请日：2004-07-28
申请人： Samsung Electronics Co., Ltd.
发明人： Song, Hoon , Oh, Yong-soo , Shin, Jong-woo , Lim, Hyung-taek
IPC分类号： B41J2/16 , B41J2/14
CPC分类号： B41J2/1629 , B41J2/14137 , B41J2/1601 , B41J2/1628 , B41J2/1631 , B41J2/1635 , B41J2/1639 , B41J2/1642 , B41J2/1643 , B41J2/1646 , B41J2002/1437
摘要： Provided are an inkjet printhead and a method of manufacturing the same. The inkjet printhead includes a substrate (100), which includes an ink chamber (106) formed in an upper portion thereof to store ink, a manifold (110) formed in a lower portion thereof to supply the ink to the ink chamber, and an ink channel (108) formed between the ink chamber and the manifold to connect the ink chamber to the manifold, a nozzle plate (120), which includes a plurality of passivation layers (121,123,125) stacked on the substrate, a heat dissipation layer (127) disposed on the plurality of passivation layers and made of a thermal conductive metal material, and a nozzle (104) passing therethrough and connected to the ink chamber, and a heater (122) and a conductor (124), each of which is interposed between the plurality of passivation layers of the nozzle plate, the heater heating the ink filled in the ink chamber and the conductor applying current to the heater. The heat dissipation layer includes a first metal layer (127a) formed on the plurality of passivation layers and a second metal layer (127b) formed on the first metal layer.
摘要翻译：提供一种喷墨打印头及其制造方法。喷墨打印头包括：基板（100），其包括形成在其上部的墨水室（106），用于存储墨水;形成在其下部的歧管（110），以将墨水供应到墨水室;以及在所述墨室和所述歧管之间形成的墨水通道（108），用于将所述墨水室连接到所述歧管;喷嘴板（120），其包括堆叠在所述基板上的多个钝化层（121,123,125），散热层）设置在所述多个钝化层上并由导热金属材料制成，以及通过其并连接到所述墨室的喷嘴（104）以及加热器（122）和导体（124），所述加热器（122）和导体在喷嘴板的多个钝化层之间，加热器加热填充在墨水室中的墨水和导体向加热器施加电流。散热层包括形成在多个钝化层上的第一金属层（127a）和形成在第一金属层上的第二金属层（127b）。

2. 发明公开

EP1481806A1 Ink-jet printhead and method for manufacturing the same 有权
标题翻译：喷墨打印头及其制造方法
公开(公告)号：EP1481806A1
公开(公告)日：2004-12-01
申请号：EP04253091.5
申请日：2004-05-26
申请人： Samsung Electronics Co., Ltd.
发明人： Kim, Min-soo , Shin, Su-ho , Oh, Yong-soo , Lim, Hyung-taek , Shin, Jong-woo , Baek, Seog-soon
IPC分类号： B41J2/14 , B41J2/16 , B41J2/45
CPC分类号： B41J2/1646 , B41J2/1601 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1642 , B41J2/1643 , B41J2002/1437 , B41J2002/14387
摘要： An ink-jet printhead and a method of manufacturing the same are provided. The ink-jet printhead comprises a substrate, an ink chamber to be filled with ink to be ejected being formed on a surface of the substrate, a manifold which supplies ink to the ink chamber being formed on a rear surface of the substrate, and an ink passage which connects the ink chamber and the manifold being formed parallel to the surface of the substrate; a nozzle plate, which includes a plurality of passivation layers stacked on the substrate and formed of an insulating material, and a heat dissipating material formed of a metallic material having good thermal conductivity, and through which a nozzle connected to the ink chamber is formed; and a heater and a conductor, which are disposed between the passivation layers of the nozzle plate, the heater being positioned on the ink chamber and heating ink in the ink chamber, and the conductor applying a current to the heater.
摘要翻译：提供了一种喷墨打印头及其制造方法。该喷墨打印头包括基板，在基板的表面上形成有要被喷射的要被喷射的墨水的墨水腔室，向基板的后表面上形成的墨水腔室供应墨水的歧管，以及连接墨室和歧管的墨通道形成为平行于基板的表面; 喷嘴板，其包括堆叠在所述基板上并由绝缘材料形成的多个钝化层以及由具有良好导热性的金属材料形成的散热材料，并且通过所述散热材料形成与所述墨室连接的喷嘴; 以及设置在喷嘴板的钝化层之间的加热器和导体，加热器位于墨室上并且加热墨室中的墨，并且导体向加热器施加电流。

3. 发明授权

EP0813089B1 Deformable mirror device and manufacturing method thereof 失效
标题翻译：可变形反射镜装置及其制造方法
公开(公告)号：EP0813089B1
公开(公告)日：2004-07-14
申请号：EP97303985.2
申请日：1997-06-09
申请人： Samsung Electronics Co., Ltd.
发明人： Choi, Bum-kyoo , Kim, Yong-kweon , Shin, Jong-woo
IPC分类号： G02B26/08 , G09F9/37
CPC分类号： G02B26/0841

4. 发明授权

EP1481806B1 Ink-jet printhead and method for manufacturing the same 有权
标题翻译：喷墨打印头及其制造方法
公开(公告)号：EP1481806B1
公开(公告)日：2008-07-09
申请号：EP04253091.5
申请日：2004-05-26
申请人： SAMSUNG ELECTRONICS CO., LTD.
发明人： Kim, Min-soo , Shin, Su-ho , Oh, Yong-soo , Lim, Hyung-taek , Shin, Jong-woo , Baek, Seog-soon
IPC分类号： B41J2/14 , B41J2/16 , B41J2/45
CPC分类号： B41J2/1646 , B41J2/1601 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1642 , B41J2/1643 , B41J2002/1437 , B41J2002/14387

5. 发明公开

EP1428662A2 Monolithic ink-jet printhead and method for manufacturing the same 有权
标题翻译：整体式喷墨打印头及其制造方法
公开(公告)号：EP1428662A2
公开(公告)日：2004-06-16
申请号：EP03257587.0
申请日：2003-12-02
申请人： Samsung Electronics Co., Ltd.
发明人： Song, Hoon , Oh, Yong-soo , Shin, Jong-woo , Lee, Chang-seung , Lim, Hung-taek
IPC分类号： B41J2/16 , B41J2/14
CPC分类号： B41J2/1643 , B41J2/14129 , B41J2/14137 , B41J2/1601 , B41J2/1606 , B41J2/1625 , B41J2/1626 , B41J2/1628 , B41J2/1631 , B41J2/1642 , B41J2/1646 , B41J2002/1437
摘要： A monolithic ink-jet printhead and a method for manufacturing the same are provided. The monolithic ink-jet printhead includes a substrate (110) having an ink chamber (132), a manifold (136), and an ink channel (134) and a nozzle plate (120) integrally formed with the substrate. The nozzle plate has a plurality of passivation layers sequentially stacked on the substrate, a metal layer (128) formed on the plurality of passivation layers, and a nozzle (138) through which ink is ejected from the ink chamber. A heater (142) for heating ink within the ink chamber and a conductor (144) for applying a current to the heater are provided between the passivation layers. A hydrophobic coating layer (129) is formed only on an outer surface of the metal layer. The hydrophobic coating layer is formed by forming the metal layer after forming a plating mold in a portion where the nozzle will be formed and then coating a material having the hydrophobic property on the metal layer. According to the above-described structure of the monolithic ink-jet printhead, ink ejection factors such as a directionality, a size, and an ejection speed of an ink droplet are improved so that an operating frequency can increase and a printing quality can be improved. Further, a surface of the printhead can be prevented from being polluted and has improved chemical resistance and abrasion resistance.
摘要翻译：提供了一种整体式喷墨打印头及其制造方法。整体式喷墨打印头包括具有墨室（132），歧管（136）和墨通道（134）的基板（110）以及与基板一体形成的喷嘴板（120）。喷嘴板具有依次堆叠在基板上的多个钝化层，形成在多个钝化层上的金属层（128）以及从墨室喷射墨的喷嘴（138）。用于加热墨室内的墨水的加热器（142）和用于向加热器施加电流的导体（144）设置在钝化层之间。疏水涂层（129）仅形成在金属层的外表面上。在形成喷嘴的部分中形成镀模之后形成金属层，然后在金属层上涂覆具有疏水性的材料，形成疏水涂层。根据上述单片式喷墨打印头的结构，墨滴的方向性，尺寸和喷射速度等墨水喷射因素得到改善，从而可以增加操作频率并且可以提高打印质量。此外，可以防止打印头的表面受到污染，并且具有改善的耐化学性和耐磨性。

6. 发明授权

EP1502746B1 Inkjet printhead and method of manufacturing the same 有权
标题翻译：喷墨打印头及其制造方法
公开(公告)号：EP1502746B1
公开(公告)日：2008-12-24
申请号：EP04254512.9
申请日：2004-07-28
申请人： Samsung Electronics Co., Ltd.
发明人： Song, Hoon , Oh, Yong-soo , Shin, Jong-woo , Lim, Hyung-taek
IPC分类号： B41J2/16 , B41J2/14
CPC分类号： B41J2/1629 , B41J2/14137 , B41J2/1601 , B41J2/1628 , B41J2/1631 , B41J2/1635 , B41J2/1639 , B41J2/1642 , B41J2/1643 , B41J2/1646 , B41J2002/1437

7. 发明授权

EP1428662B1 Monolithic ink-jet printhead and method for manufacturing the same 有权
标题翻译：该整体式喷墨打印头和制造过程
公开(公告)号：EP1428662B1
公开(公告)日：2008-02-27
申请号：EP03257587.0
申请日：2003-12-02
申请人： SAMSUNG ELECTRONICS CO., LTD.
发明人： Song, Hoon , Oh, Yong-soo , Shin, Jong-woo , Lee, Chang-seung , Lim, Hung-taek
IPC分类号： B41J2/16 , B41J2/14
CPC分类号： B41J2/1643 , B41J2/14129 , B41J2/14137 , B41J2/1601 , B41J2/1606 , B41J2/1625 , B41J2/1626 , B41J2/1628 , B41J2/1631 , B41J2/1642 , B41J2/1646 , B41J2002/1437

8. 发明公开

EP1484178A1 Monolithic ink-jet printhead and method of manufacuturing the same 审中-公开
标题翻译： Monolitischer Tintenstrahldruckkopf und Verfahren zu dessen Herstellung
公开(公告)号：EP1484178A1
公开(公告)日：2004-12-08
申请号：EP04253173.1
申请日：2004-05-28
申请人： Samsung Electronics Co., Ltd.
发明人： Shin, So-ho , Shin, Seung-joo , Baek, Seog-soon , Oh, Yong-soo , Shin, Jong-woo , Lee, Chang-seung , Bae, Ki-deok
IPC分类号： B41J2/14 , B41J2/16
CPC分类号： B41J2/1603 , B41J2/14137 , B41J2/1639 , B41J2002/1437 , Y10T29/49083 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49401
摘要： A monolithic ink-jet printhead and a method of manufacturing the same are provided. The monolithic ink-jet printhead comprises a substrate, an ink chamber to be filled with ink to be ejected being formed on a front surface of the substrate, a manifold which supplies ink to the ink chamber being formed on a rear surface of the substrate, and an ink channel being vertically formed through the substrate between the ink chamber and the manifold; sidewalls, which are formed to a predetermined depth from the front surface of the substrate and define side surfaces of the ink chamber; a bottom wall, which is formed at a position of to a predetermined depth from the front surface of the substrate and define a bottom surface of the ink chamber; a nozzle plate, which includes a plurality of passivation layers stacked on the substrate and formed of an insulating material and a heat dissipating layer stacked on the passivation layers and formed of a metallic material having good thermal conductivity and through which a nozzle connected to the ink chamber is formed; a heater, which is disposed between the passivation layers of the nozzle plate, positioned above the ink chamber, and heats ink in the ink chamber; and a conductor, which is disposed between the passivation layers of the nozzle plate, electrically connected to the heater, and delivers a current to the heater.
摘要翻译：提供了一种单片喷墨打印头及其制造方法。单片式喷墨打印头包括基板，在基板的前表面上形成有要喷射的墨水的墨水容器，向形成在基板的后表面上的墨水室供给墨水的歧管，以及在所述墨室和所述歧管之间通过所述基板垂直形成的墨通道; 侧壁，其从衬底的前表面形成预定的深度并限定墨腔的侧表面; 底壁，其形成在从基板的前表面到预定深度的位置并且限定墨室的底表面; 喷嘴板，其包括堆叠在所述基板上并由绝缘材料形成的多个钝化层，以及层叠在所述钝化层上并由具有良好导热性的金属材料形成的散热层，并且通过所述金属材料连接到所述墨水室形成; 设置在喷嘴板的钝化层之间的加热器，位于墨水室上方，并加热墨水室中的墨水; 以及布置在喷嘴板的钝化层之间的导体，其电连接到加热器，并将电流传递到加热器。

9. 发明公开

EP1428662A3 Monolithic ink-jet printhead and method for manufacturing the same 有权
标题翻译：该整体式喷墨打印头和制造过程
公开(公告)号：EP1428662A3
公开(公告)日：2004-06-23
申请号：EP03257587.0
申请日：2003-12-02
申请人： Samsung Electronics Co., Ltd.
发明人： Song, Hoon , Oh, Yong-soo , Shin, Jong-woo , Lee, Chang-seung , Lim, Hung-taek
IPC分类号： B41J2/16 , B41J2/14
CPC分类号： B41J2/1643 , B41J2/14129 , B41J2/14137 , B41J2/1601 , B41J2/1606 , B41J2/1625 , B41J2/1626 , B41J2/1628 , B41J2/1631 , B41J2/1642 , B41J2/1646 , B41J2002/1437
摘要： A monolithic ink-jet printhead and a method for manufacturing the same are provided. The monolithic ink-jet printhead includes a substrate (110) having an ink chamber (132), a manifold (136), and an ink channel (134) and a nozzle plate (120) integrally formed with the substrate. The nozzle plate has a plurality of passivation layers sequentially stacked on the substrate, a metal layer (128) formed on the plurality of passivation layers, and a nozzle (138) through which ink is ejected from the ink chamber. A heater (142) for heating ink within the ink chamber and a conductor (144) for applying a current to the heater are provided between the passivation layers. A hydrophobic coating layer (129) is formed only on an outer surface of the metal layer. The hydrophobic coating layer is formed by forming the metal layer after forming a plating mold in a portion where the nozzle will be formed and then coating a material having the hydrophobic property on the metal layer. According to the above-described structure of the monolithic ink-jet printhead, ink ejection factors such as a directionality, a size, and an ejection speed of an ink droplet are improved so that an operating frequency can increase and a printing quality can be improved. Further, a surface of the printhead can be prevented from being polluted and has improved chemical resistance and abrasion resistance.

10. 发明公开

EP0813089A2 Deformable mirror device and manufacturing method thereof 失效
标题翻译： Deformierbare Spiegelvorrichtung und Herstellungsmethode
公开(公告)号：EP0813089A2
公开(公告)日：1997-12-17
申请号：EP97303985.2
申请日：1997-06-09
申请人： Samsung Electronics Co., Ltd.
发明人： Choi, Bum-kyoo , Kim, Yong-kweon , Shin, Jong-woo
IPC分类号： G02B26/08 , G09F9/37
CPC分类号： G02B26/0841
摘要： A manufacturing method of a deformable mirror device includes the steps of forming an electrode layer (33a, 33b) on a substrate (30) in a predetermined pattern, forming a thick film (51) on the upper surfaces of the substrate (30) and the electrode layer (33a, 33b), forming a support plate (35) on the upper surface of the thick film (51), partially etching the thick film (51) to form at least one through hole (40), separating the support plate (35) into single portions, forming a post (39) on one side of the inner surface of the through hole (40), forming a reflecting plate (36) on the upper surface of the support plate (35), and removing the thick film (51).
摘要翻译：可变形反射镜装置的制造方法包括以下步骤：在基板（30）上以预定图案形成电极层（33a，33b），在基板（30）的上表面上形成厚膜（51）所述电极层（33a，33b）在所述厚膜（51）的上表面上形成支撑板（35），部分地蚀刻所述厚膜（51）以形成至少一个通孔（40）（35）形成单个部分，在通孔（40）的内表面的一侧上形成柱（39），在支撑板（35）的上表面上形成反射板（36），并且移除厚膜（51）。

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