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    • 1. 发明公开
    • PRESSURE GAUGE
    • 压力计
    • EP0775303A1
    • 1997-05-28
    • EP95912520.0
    • 1995-03-03
    • SINVENT A/S
    • HANNEBORG, AndersSERCK-HANSSEN, FinHLCKERS, Per
    • G01L7G01L9
    • G01L9/003G01L7/041G01L9/0002G01L9/0005G01L9/0027
    • Pressure gauge for very high pressures and based upon a principle similar to the Bourdon tube, comprising a beam-shaped measuring element (10A) having an elongate cavity (12) lying eccentrically in the cross section of the measuring element, and being supported by a holder member (15) at one end. The measuring element is composed of two substantially plate-shaped parts (13, 14) manufactured in planar technology, preferably of silicium or quartz. One plate part (14) is provided with an elongate recess (16) in that surface (14A) which faces against a cooperating surface (13A) on the other plate part (13), so as to form the eccentric cavity (12). Both plate parts (13, 14) are jointed at said surfaces (13A, 14A) in such a manner that said cavity (12) is sealingly closed. The measuring element (10A) is adapted to be subjected exteriorly to the very high pressures to be measured.
    • 用于非常高的压力并且基于类似于波登管的原理的压力计包括具有在测量元件的横截面中偏心地位于其中的细长空腔(12)的梁形测量元件(10A),并且由 (15)的一端。 测量元件由平面技术制造的两个基本为板状的部件(13,14)组成,优选由硅或石英制成。 一个板部件(14)在该表面(14A)中设有与另一个板部件(13)上的协作表面(13A)相对的长形凹部(16),从而形成偏心空腔(12)。 两个板部件(13,14)以这样的方式在所述表面(13A,14A)处接合,使得所述空腔(12)被密封地关闭。 测量元件(10A)适于在外部承受要测量的非常高的压力。