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2. 发明公开

EP3306677A2 HIGH QUANTUM EFFICIENCY OPTICAL DETECTORS 审中-公开
标题翻译：高量子效率光学探测器
公开(公告)号：EP3306677A2
公开(公告)日：2018-04-11
申请号：EP17183582.0
申请日：2010-01-15
申请人： Raytheon Company
发明人： VAMPOLA, John L , KILCOYNE, Sean P , MILLS, Robert E , VEEDER, Kenton T
IPC分类号： H01L31/075 , H01L27/146
CPC分类号： H01L31/075 , H01L27/1463 , H01L27/1464 , Y02E10/548
摘要： An optical detector (10) includes a detector surface (19) operable to receive light, a depleted field region (14) coupled to the underside of the detector surface (19), a charge collection node (20) underlying the depleted field region (14), an active pixel area (12) that includes the portion of the depleted field region (14) above the charge collection node (20) and below the detector surface (19), and two or more guard regions (16a-b) coupled to the underside of the detector surface (19) and outside of the active pixel area (12). The depleted field region (14) includes an intrinsic or a near-intrinsic material. The charge collection node (20) has a first width, and the guard regions (16a-b) are separated by a second width that is greater than the first width of the charge collection node (20). The guard regions (16a-b) are operable to prevent crosstalk to an adjacent optical detector.
摘要翻译：光检测器（10）包括可操作来接收光的检测器表面（19），耦合到检测器表面（19）的下侧的耗尽场区（14），位于耗尽场区域之下的电荷收集节点（20）包括电荷收集节点（20）上方和检测器表面（19）下方的耗尽场区（14）的一部分的有源像素区域（12）以及两个或更多个保护区域（16a-b）耦合到检测器表面（19）的下侧并且在有源像素区域（12）的外侧。耗尽的场区（14）包括本征或近于本征的材料。电荷收集节点（20）具有第一宽度，并且防护区（16a-b）以大于电荷收集节点（20）的第一宽度的第二宽度隔开。防护区域（16a-b）可操作以防止对相邻光学检测器的串扰。

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