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    • 1. 发明公开
    • Planar optical element
    • 平面光学元件
    • EP0522637A3
    • 1993-08-04
    • EP92201994.8
    • 1992-07-02
    • Philips Electronics N.V.
    • Venhuizen, Antonius Henricus JohannesRikken, Gerardus Ladislaus Johannes Andreas
    • G02F1/01G02F1/37G02B6/12
    • G02B6/122G02F1/065G02F1/377G02F2201/06
    • The invention relates to a planar optical element comprising a light-conducting layer 10 on a supporting material 11 having a refractive index which is lower than that of the light-conducting layer, which light-conducting layer comprises one or more waveguide channels 13. The waveguide channels are laterally delimited by metal layers 14,15 which extend on either side of each waveguide channel, which metal layers are located between the supporting material and the light-conducting layer and directly contact said light-conducting layer. Preferably, the metal layers are provided in the form of electrodes, such that an electric field can be applied transversely across one or more waveguide channels. Such a planar optical element can be used, for example, as an optical switch and in a device for doubling the frequency of a lightwave.
    • 本发明涉及一种平面光学元件,该平面光学元件包括在导光层的折射率低于支撑材料11的光导层10,该光导层包括一个或多个波导通道13。 波导通道由金属层14,15横向限定,金属层14,15在每个波导通道的任一侧延伸,金属层位于支撑材料和导光层之间并直接接触所述光导层。 优选地,金属层以电极的形式提供,使得电场可横向跨越一个或多个波导通道施加。 这样的平面光学元件可以用作例如光开关和将光波频率加倍的装置。
    • 5. 发明公开
    • Optoelectronic semiconductor device comprising a waveguide and method of manufacturing such a device
    • 与辐射导体以及制造这种装置的方法的光电子半导体器件。
    • EP0536829A1
    • 1993-04-14
    • EP92202973.1
    • 1992-09-29
    • Philips Electronics N.V.
    • Venhuizen, Antonius Henricus Johannes
    • G02B6/12G02F1/01
    • G02B6/13G02B6/1221G02B6/42G02B6/4233G02F1/065
    • Optoelectronic semiconductor devices which have a groove-shaped waveguide in an oxide layer provided on a silicon substrate are compact, easy to manufacture, and - when the waveguide comprises a non-linear optical material - applicable inter alia for frequency doubling of laser radiation.
      In the known device, scattering losses occur in the waveguide owing to the roughness of the groove which arises during etching of the groove.
      In a device according to the invention, the groove and a portion of the oxide layer are formed by local, preferably thermal oxidation of the silicon substrate. The groove formed at the area of the oxidation mask has a smoother surface and as a result the waveguide has lower losses. When the device comprises a GaAs/AlGaAs diode laser, it forms an efficient, compact, inexpensive and blue-emitting laser source which is suitable for use in an optical disc system. Preferably, the diode laser is situated in a deeper and wider further groove in the oxide layer. In a method according to the invention, a layer of silicon oxide and a groove therein are formed simultaneously through the use of local oxidation. Grooves of different widths and depths are obtained in that masks of various widths are used during this.
    • 设置在硅衬底其中在具有槽状的波导光电子半导体器件在氧化物层结构紧凑,易于制造,以及 - 当所述波导包括一非线性光学材料 - 用于激光辐射的倍频适用特别。 在已知的装置中,散射损耗发生由于槽的蚀刻过程中它产生凹槽的粗糙度波导英寸 在一个设备gemäß本发明,所述槽和所述氧化物层的一部分由硅衬底的地方,优选热氧化形成。 在氧化掩模的区域所形成的凹槽具有一个更光滑的表面,结果在波导具有更低的损耗。 当该装置包括由GaAs /的AlGaAs二极管激光器,它形成高效,紧凑的,廉价的和蓝色发射激光源的所有其适合用于在光盘系统中的使用。优选的是,二极管激光器位于更深的和抗蚀剂进一步槽的 在氧化物层中。 在方法gemäß本发明,氧化硅和一个槽构成的层在其中的同时,通过使用局部氧化形成。 不同的宽度和深度的凹槽获得并在此过程中使用的各种宽度的面具。
    • 6. 发明公开
    • Planar optical element
    • Planares优化元素。
    • EP0522637A2
    • 1993-01-13
    • EP92201994.8
    • 1992-07-02
    • Philips Electronics N.V.
    • Venhuizen, Antonius Henricus JohannesRikken, Gerardus Ladislaus Johannes Andreas
    • G02F1/01G02F1/37G02B6/12
    • G02B6/122G02F1/065G02F1/377G02F2201/06
    • The invention relates to a planar optical element comprising a light-conducting layer 10 on a supporting material 11 having a refractive index which is lower than that of the light-conducting layer, which light-conducting layer comprises one or more waveguide channels 13. The waveguide channels are laterally delimited by metal layers 14,15 which extend on either side of each waveguide channel, which metal layers are located between the supporting material and the light-conducting layer and directly contact said light-conducting layer. Preferably, the metal layers are provided in the form of electrodes, such that an electric field can be applied transversely across one or more waveguide channels. Such a planar optical element can be used, for example, as an optical switch and in a device for doubling the frequency of a lightwave.
    • 本发明涉及一种平面光学元件,该平面光学元件包括在导光层的折射率低于支撑材料11的光导层10,该光导层包括一个或多个波导通道13。 波导通道由金属层14,15横向限定,金属层14,15在每个波导通道的任一侧延伸,金属层位于支撑材料和导光层之间并直接接触所述光导层。 优选地,金属层以电极的形式提供,使得电场可横向跨越一个或多个波导通道施加。 这样的平面光学元件可以用作例如光开关和将光波频率加倍的装置。