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1. 发明公开

EP3019849A1 METHOD AND APPARATUS FOR DETERMINING CLEANLINESS OF A SAMPLE 有权
标题翻译： VERFAHREN UND VORRICHTUNG ZUR BESTIMMUNG DER SAUBERKEIT EINER PROBE
公开(公告)号：EP3019849A1
公开(公告)日：2016-05-18
申请号：EP13889047.0
申请日：2013-07-11
申请人： Persys Technology Ltd. , Vanek, Yitzhak
发明人： VANEK, Yitzhak , MENDELOVICI, Leo , DRIMER,Gideon
IPC分类号： G01N15/10
CPC分类号： G01N15/0612 , G01N2015/0046
摘要： A method and apparatus for determining cleanliness of a sample is provided. The method includes taking a first reading of particles count of a sample placed into a chamber. The method further includes directing a stream of air over the sample, and taking a second reading of particles count of the sample. The method further includes calculating a difference between the first reading and the second reading, and determining a cleanliness of the sample based upon the difference. The method further includes option of taking an additional reading while a stream of ionized air is directed towards the sample. The method further includes trapping the impurities particles released from the sample by applying a vacuum through the filter, and analyzing the trapped particles to determine nature and chemical composition of the impurities particles.
摘要翻译：提供了一种用于确定样品清洁度的方法和装置。该方法包括对放置在室中的样品的颗粒计数进行一读。该方法还包括将空气流引导到样品上，并对样品的颗粒计数进行二次读取。该方法还包括计算第一读数和第二读数之间的差，以及基于该差来确定样本的清洁度。该方法还包括在电离气流指向样品时进行附加读数的选项。该方法还包括通过通过过滤器施加真空来捕获从样品释放的杂质颗粒，并分析捕获的颗粒以确定杂质颗粒的性质和化学组成。

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