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    • 3. 发明公开
    • Liquid phase epitaxy apparatus
    • Vorrichtung zurFlüssigphasenepitaxie。
    • EP0126502A2
    • 1984-11-28
    • EP84200550.6
    • 1984-04-18
    • PHILIPS ELECTRONICS UK LIMITEDPhilips Electronics N.V.
    • Brice, John ChadwickPage, John Lincoln
    • C30B19/06
    • C30B19/063
    • A sliding boat liquid phase epitaxy apparatus comprising a base 1, substrate support means 2 superposed on the base 1, and a well member 5 abutting and disposed above the substrate support means 2 and having at least one well 22 capable of containing growth solution 28. The substrate support means 2 comprise a recessed substrate holder 16 which can be disposed under and in registration with the well 22. The well member 5 and the substrate support means 2 are relatively slidable in the length direction of the apparatus. A problem encountered in growing layers of material by a liquid phase epitaxy process using a sliding boat apparatus is to achieve adequate wipe-off of growth solution in order to provide a grown layer having a smooth surface. The bottom of the well member 5 is provided with a plurality of grooves 23 on the side of the/each well which traverses or is traversed by the recessed substrate holder 16 after growth of an epitaxial layer, and wherein the grooves 23 extend across at least a width of the well member 5 which is greater than and includes the width of the substrate holder recess 16.
    • 一种滑动舟状液相外延装置,包括基底1,叠置在基底1上的基底支撑装置2和邻接并设置在基底支撑装置2上方并且具有至少一个能够容纳生长溶液28的孔22的孔部件5。 衬底支撑装置2包括可以设置在井22的下面并与阱22成对准的凹陷衬底保持器16.阱构件5和衬底支撑装置2可在装置的长度方向上相对滑动。 通过使用滑动船装置的液相外延方法在生长材料层中遇到的问题是为了提供具有光滑表面的生长层,实现生长溶液的充分擦拭。 阱构件的底部在每个孔的侧面上设置有多个凹槽23,其在外延层生长之后穿过或被凹陷的衬底保持器16横越,并且其中沟槽23延伸穿过至少一个 阱构件5的宽度大于并包括衬底保持器凹部16的宽度。
    • 4. 发明公开
    • Method of preparing a plurality of castings having a predetermined composition
    • Verfahren zur Herstellung von mehreren Giessereierzeugnissen mit einer vorherbestimmten Zusammensetzung。
    • EP0096922A1
    • 1983-12-28
    • EP83200800.7
    • 1983-06-03
    • PHILIPS ELECTRONICS UK LIMITEDPhilips Electronics N.V.
    • Brice, John ChadwickBrough, Colin Richard
    • C30B19/04C30B29/40C30B29/48C30B19/10
    • C30B29/40C30B19/04C30B19/106C30B29/48
    • A method of simultaneously preparing a plurality of castings of a solution of an element or compound A in a solvent B which is an element and/or a compound, which solution is saturated at a temperature T s . A problem in liquid epitaxy growth processes is the simple preparation of growth charges which are of sufficiently reproducible composition and size to produce epitaxial layers of reproducible composition and thickness. A melt 12 consisting of B, or of B together with at least one of the constituents of A, or of a solution of A in B which is unsaturated at T s is prepared in a through 5 of a boat body of a liquid-tight boat assembly 1. An equilibrium is established at T_ 2 between the melt 12 and a solid body 13 which is an excess of any constituent in which the melt 12 is deficient with respect to the saturated solution, so as to form a saturated solution. The saturated solution is transferred into a plurality of moulds 9 in which this solution is allowed to solidify to form the castings. The solid body 13 is contained in a solid-retaining portion 6 of the trough 5, which portion 6 is separated from the remainder of the trough 5 by an apertured partition 8.
    • 一种同时制备元素或化合物A在作为元素和/或化合物的溶剂B中的溶液的多个铸件的方法,该溶液在温度Ts下饱和。 液体外延生长过程中的一个问题是生产电荷的简单制备,其具有足够可重复的组成和尺寸以产生具有可重复组成和厚度的外延层。 由B或B组成的熔体12与A的成分中的至少一种或在B中不饱和的A的A溶液一起制备在液密船的船体的通孔5中 组件1.在熔体12和固体13之间的T-2处建立了平衡,该固体体是熔体12相对于饱和溶液不足的任何组分的过量,以形成饱和溶液。 将饱和溶液转移到多个模具9中,其中允许该溶液固化以形成铸件。 固体13容纳在槽5的固体保持部分6中,该部分6通过有孔分隔件8与槽5的其余部分分离。