会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明公开
    • SEMICONDUCTOR DEVICE MANUFACTURING METHOD
    • HERSTELLUNGSVERFAHRENFÜRHALBLEITERBAUELEMENTE
    • EP1962333A4
    • 2009-09-02
    • EP06833633
    • 2006-11-29
    • OLYMPUS CORP
    • KOJIMA KAZUAKI
    • H01L21/301
    • H01L21/78
    • Provided is a method for manufacturing a highly reliable semiconductor device, which contributes to improvement of yield by reducing chipping or suppressing generation of chipping in a dicing step of a bonded substrate wherein different types of substrates are bonded. The semiconductor device has the bonded substrate composed of a semiconductor substrate and a different type substrate composed of a material other than that of the semiconductor bonded on the surface of the semiconductor substrate. The dicing step of making the bonded substrate into semiconductor chips is provided with a first dicing step of forming at least a groove having a depth of half or more of the thickness of the semiconductor substrate on the surface of the semiconductor substrate, and a second dicing step of cutting the entire bonded substrate along the groove to separate the bonded substrate into a plurality of semiconductor chips.
    • 本发明提供一种可靠性高的半导体装置的制造方法,该方法通过减少在贴合了不同种类的基板的贴合基板的切割工序中的碎屑的产生或破裂的产生,有助于提高成品率。 该半导体器件具有由半导体衬底和由与半导体衬底表面上键合的半导体材料不同的材料构成的不同类型衬底的键合衬底。 将接合衬底制作成半导体芯片的切割步骤设置有第一切割步骤和第二切割步骤,第一切割步骤至少在半导体衬底的表面上形成具有半导体衬底的厚度的一半以上的深度的凹槽, 沿凹槽切割整个键合衬底以将键合衬底分离成多个半导体芯片的步骤。