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1. 发明授权

EP3109887B1 ROTARY X-RAY EMISSION TARGET AND X-RAY GUN 有权
公开(公告)号：EP3109887B1
公开(公告)日：2018-08-15
申请号：EP16181650.9
申请日：2014-03-12
申请人： Nikon Metrology NV
发明人： Hadland, Roger
IPC分类号： H01J35/02 , H01J35/04 , H01J35/10 , H05G1/12 , H02M7/10
CPC分类号： H01J35/025 , F16C33/768 , F16C35/042 , F16J15/16 , H01J29/48 , H01J35/04 , H01J35/06 , H01J35/101 , H01J35/106 , H01J35/108 , H01J35/16 , H01J37/065 , H01J2235/0236 , H01J2235/083 , H01J2235/086 , H01J2235/087 , H01J2235/1046 , H01J2235/1204 , H01J2235/1262 , H01J2235/20 , H01J2237/2482 , H02M1/32 , H02M7/106 , H05G1/12
摘要： Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.

2. 发明授权

EP3109886B1 ROTARY X-RAY TARGET ASSEMBLY 有权
公开(公告)号：EP3109886B1
公开(公告)日：2018-08-15
申请号：EP16181644.2
申请日：2014-03-12
申请人： Nikon Metrology NV
发明人： Hadland, Roger
IPC分类号： H01J35/02 , H01J35/04 , H01J35/10 , H05G1/12 , H02M7/10
CPC分类号： H01J35/025 , F16C33/768 , F16C35/042 , F16J15/16 , H01J29/48 , H01J35/04 , H01J35/06 , H01J35/101 , H01J35/106 , H01J35/108 , H01J35/16 , H01J37/065 , H01J2235/0236 , H01J2235/083 , H01J2235/086 , H01J2235/087 , H01J2235/1046 , H01J2235/1204 , H01J2235/1262 , H01J2235/20 , H01J2237/2482 , H02M1/32 , H02M7/106 , H05G1/12
摘要： Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.

3. 发明授权

EP3113205B1 ELECTRON BEAM APPARATUS AND X-RAY GUN 有权
标题翻译：电子束装置和X射线枪
公开(公告)号：EP3113205B1
公开(公告)日：2018-05-02
申请号：EP16181646.7
申请日：2014-03-12
申请人： Nikon Metrology NV
发明人： Hadland, Roger
IPC分类号： H01J35/02 , H01J35/04 , H01J35/10 , H05G1/12 , H02M7/10
CPC分类号： H01J35/025 , F16C33/768 , F16C35/042 , F16J15/16 , H01J29/48 , H01J35/04 , H01J35/06 , H01J35/101 , H01J35/106 , H01J35/108 , H01J35/16 , H01J37/065 , H01J2235/0236 , H01J2235/083 , H01J2235/086 , H01J2235/087 , H01J2235/1046 , H01J2235/1204 , H01J2235/1262 , H01J2235/20 , H01J2237/2482 , H02M1/32 , H02M7/106 , H05G1/12
摘要： Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.

4. 发明公开

EP3113205A1 ELECTRON BEAM APPARATUS AND X-RAY GUN 有权
标题翻译：电子束装置和X射线枪
公开(公告)号：EP3113205A1
公开(公告)日：2017-01-04
申请号：EP16181646.7
申请日：2014-03-12
申请人： Nikon Metrology NV
发明人： Hadland, Roger
IPC分类号： H01J35/02 , H01J35/04 , H01J35/10 , H05G1/12 , H02M7/10
CPC分类号： H01J35/025 , F16C33/768 , F16C35/042 , F16J15/16 , H01J29/48 , H01J35/04 , H01J35/06 , H01J35/101 , H01J35/106 , H01J35/108 , H01J35/16 , H01J37/065 , H01J2235/0236 , H01J2235/083 , H01J2235/086 , H01J2235/087 , H01J2235/1046 , H01J2235/1204 , H01J2235/1262 , H01J2235/20 , H01J2237/2482 , H02M1/32 , H02M7/106 , H05G1/12
摘要： Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.
摘要翻译：本文公开了用于x射线源，x射线枪，电子束装置，旋转真空密封件，用于x射线源的靶组件，用于旋转x射线发射靶的高电压发生器，以及一个x射线源。这些不同的方面可以分开和/或共同构造能够在高达500kV及以上的能量下操作的x射线源，其适用于商业和研究x射线应用，例如计算机断层扫描。特别地，高压发生器包括电连接第一电压倍增器和第二电压倍增器的中间的屏蔽电极。电子束设备包括控制光电检测器和光电发射器，光电发射器在其之间布置有透明导电屏蔽。旋转式真空密封件包括位于用于旋转轴的孔的高压端和低压端之间的中间位置处的可泵室。旋转靶组件构造成使得当轴承壳体和真空壳体之间的扭矩超过预定扭矩时，轴承壳体相对于真空壳体旋转。旋转X射线发射靶具有支撑在轮毂上的多个目标板，这些板布置在轮毂上以围绕轮毂的轴旋转提供环形目标区域。该X射线枪配备有屏蔽电极，其保持在与电子束发射阴极不同的相对于X射线靶的电势差。

5. 发明公开

EP3118883A1 ROTARY VACUUM SEAL AND TARGET ASSEMBLY 无效
标题翻译：紫罗兰帝国独联体国家
公开(公告)号：EP3118883A1
公开(公告)日：2017-01-18
申请号：EP16181645.9
申请日：2014-03-12
申请人： Nikon Metrology NV
发明人： Hadland, Roger
IPC分类号： H01J35/02 , H01J35/04 , H01J35/10 , H05G1/12 , H02M7/10
CPC分类号： H01J35/025 , F16C33/768 , F16C35/042 , F16J15/16 , H01J29/48 , H01J35/04 , H01J35/06 , H01J35/101 , H01J35/106 , H01J35/108 , H01J35/16 , H01J37/065 , H01J2235/0236 , H01J2235/083 , H01J2235/086 , H01J2235/087 , H01J2235/1046 , H01J2235/1204 , H01J2235/1262 , H01J2235/20 , H01J2237/2482 , H02M1/32 , H02M7/106 , H05G1/12
摘要： Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.
摘要翻译：本文公开了一种用于x射线源，x射线枪，电子束装置，旋转真空密封，用于x射线源的靶组件，旋转x射线发射靶和一个x射线源。这些各个方面可以单独地和/或一起实现能够在高达500kV及以上的能量下运行的x射线源，其适用于商业和研究的X射线应用，例如计算机断层扫描。特别地，高电压发生器包括电连接在第一电压倍增器和第二电压倍增器之间的屏蔽电极。电子束装置包括控制光电检测器和其间布置有透明导电屏蔽的光发射器。旋转式真空密封件包括在用于旋转轴的孔的高压和低压端之间的位置的泵送室。旋转目标组件被构造成使得当轴承壳体和真空壳体之间的扭矩超过预定扭矩时，轴承壳体相对于真空壳体旋转。旋转X射线发射目标具有支撑在轮毂上的多个目标板，所述板布置在轮毂上以围绕轮毂的轴线旋转提供环形目标区域。 X射线枪设置有相对于与电子束发射阴极不同的x射线靶保持在电位差的屏蔽电极。

6. 发明公开

EP3116016A1 ROTARY X-RAY EMISSION TARGET AND X-RAY GUN 有权
标题翻译：旋转的X排放目标和射线枪
公开(公告)号：EP3116016A1
公开(公告)日：2017-01-11
申请号：EP16181643.4
申请日：2014-03-12
申请人： Nikon Metrology NV
发明人： Hadland, Roger
IPC分类号： H01J35/02 , H01J35/04 , H01J35/10 , H05G1/12 , H02M7/10
CPC分类号： H01J35/025 , F16C33/768 , F16C35/042 , F16J15/16 , H01J29/48 , H01J35/04 , H01J35/06 , H01J35/101 , H01J35/106 , H01J35/108 , H01J35/16 , H01J37/065 , H01J2235/0236 , H01J2235/083 , H01J2235/086 , H01J2235/087 , H01J2235/1046 , H01J2235/1204 , H01J2235/1262 , H01J2235/20 , H01J2237/2482 , H02M1/32 , H02M7/106 , H05G1/12
摘要： Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.

7. 发明公开

EP3109888A1 ROTARY X-RAY EMISSION TARGET AND X-RAY GUN 有权转让
标题翻译： RÖNTGENQUELLE的ROTIERENDESRÖNTGENEMISSIONSTARGET
公开(公告)号：EP3109888A1
公开(公告)日：2016-12-28
申请号：EP16181651.7
申请日：2014-03-12
申请人： Nikon Metrology NV
发明人： Hadland, Roger
IPC分类号： H01J35/02 , H01J35/04 , H01J35/10 , H05G1/12 , H02M7/10
CPC分类号： H01J35/025 , F16C33/768 , F16C35/042 , F16J15/16 , H01J29/48 , H01J35/04 , H01J35/06 , H01J35/101 , H01J35/106 , H01J35/108 , H01J35/16 , H01J37/065 , H01J2235/0236 , H01J2235/083 , H01J2235/086 , H01J2235/087 , H01J2235/1046 , H01J2235/1204 , H01J2235/1262 , H01J2235/20 , H01J2237/2482 , H02M1/32 , H02M7/106 , H05G1/12
摘要： Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.
摘要翻译：本文公开了一种用于x射线源，x射线枪，电子束装置，旋转真空密封，用于x射线源的靶组件，旋转x射线发射靶和一个x射线源。这些各个方面可以单独地和/或一起实现能够在高达500kV及以上的能量下运行的x射线源，其适用于商业和研究的X射线应用，例如计算机断层扫描。特别地，高电压发生器包括电连接在第一电压倍增器和第二电压倍增器之间的屏蔽电极。电子束装置包括控制光电检测器和其间布置有透明导电屏蔽的光发射器。旋转式真空密封件包括在用于旋转轴的孔的高压和低压端之间的位置的泵送室。旋转目标组件被构造成使得当轴承壳体和真空壳体之间的扭矩超过预定扭矩时，轴承壳体相对于真空壳体旋转。旋转X射线发射目标具有支撑在轮毂上的多个目标板，所述板布置在轮毂上以围绕轮毂的轴线旋转提供环形目标区域。 X射线枪设置有相对于与电子束发射阴极不同的x射线靶保持在电位差的屏蔽电极。

8. 发明公开

EP3109887A1 ROTARY X-RAY EMISSION TARGET AND X-RAY GUN 有权
标题翻译：罗伯特·吉尔吉特斯（RÖNTGENEMISSIONSZIEL）
公开(公告)号：EP3109887A1
公开(公告)日：2016-12-28
申请号：EP16181650.9
申请日：2014-03-12
申请人： Nikon Metrology NV
发明人： Hadland, Roger
IPC分类号： H01J35/02 , H01J35/04 , H01J35/10 , H05G1/12 , H02M7/10
CPC分类号： H01J35/025 , F16C33/768 , F16C35/042 , F16J15/16 , H01J29/48 , H01J35/04 , H01J35/06 , H01J35/101 , H01J35/106 , H01J35/108 , H01J35/16 , H01J37/065 , H01J2235/0236 , H01J2235/083 , H01J2235/086 , H01J2235/087 , H01J2235/1046 , H01J2235/1204 , H01J2235/1262 , H01J2235/20 , H01J2237/2482 , H02M1/32 , H02M7/106 , H05G1/12
摘要： Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.
摘要翻译：本文公开了一种用于x射线源，x射线枪，电子束装置，旋转真空密封，用于x射线源的靶组件，旋转x射线发射靶和一个x射线源。这些各个方面可以单独地和/或一起实现能够在高达500kV及以上的能量下运行的x射线源，其适用于商业和研究的X射线应用，例如计算机断层扫描。特别地，高电压发生器包括电连接在第一电压倍增器和第二电压倍增器之间的屏蔽电极。电子束装置包括控制光电检测器和其间布置有透明导电屏蔽的光发射器。旋转式真空密封件包括在用于旋转轴的孔的高压和低压端之间的位置的泵送室。旋转目标组件被构造成使得当轴承壳体和真空壳体之间的扭矩超过预定扭矩时，轴承壳体相对于真空壳体旋转。旋转X射线发射目标具有支撑在轮毂上的多个目标板，所述板布置在轮毂上以围绕轮毂的轴线旋转提供环形目标区域。 X射线枪设置有相对于与电子束发射阴极不同的x射线靶保持在电位差的屏蔽电极。

9. 发明公开

EP3109886A1 ROTARY TARGET ASSEMBLY AND X-RAY GUN 有权
标题翻译： ROTIERENDE ZIELANORDNUNG UNDRÖNTGENSTRAHLPISTOLE
公开(公告)号：EP3109886A1
公开(公告)日：2016-12-28
申请号：EP16181644.2
申请日：2014-03-12
申请人： Nikon Metrology NV
发明人： Hadland, Roger
IPC分类号： H01J35/02 , H01J35/04 , H01J35/10 , H05G1/12 , H02M7/10
CPC分类号： H01J35/025 , F16C33/768 , F16C35/042 , F16J15/16 , H01J29/48 , H01J35/04 , H01J35/06 , H01J35/101 , H01J35/106 , H01J35/108 , H01J35/16 , H01J37/065 , H01J2235/0236 , H01J2235/083 , H01J2235/086 , H01J2235/087 , H01J2235/1046 , H01J2235/1204 , H01J2235/1262 , H01J2235/20 , H01J2237/2482 , H02M1/32 , H02M7/106 , H05G1/12
摘要： Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.
摘要翻译：本文公开了一种用于x射线源，x射线枪，电子束装置，旋转真空密封，用于x射线源的靶组件，旋转x射线发射靶和一个x射线源。这些各个方面可以单独地和/或一起实现能够在高达500kV及以上的能量下运行的x射线源，其适用于商业和研究的X射线应用，例如计算机断层扫描。特别地，高电压发生器包括电连接在第一电压倍增器和第二电压倍增器之间的屏蔽电极。电子束装置包括控制光电检测器和其间布置有透明导电屏蔽的光发射器。旋转式真空密封件包括在用于旋转轴的孔的高压和低压端之间的位置的泵送室。旋转目标组件被构造成使得当轴承壳体和真空壳体之间的扭矩超过预定扭矩时，轴承壳体相对于真空壳体旋转。旋转X射线发射目标具有支撑在轮毂上的多个目标板，所述板布置在轮毂上以围绕轮毂的轴线旋转提供环形目标区域。 X射线枪设置有相对于与电子束发射阴极不同的x射线靶保持在电位差的屏蔽电极。

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