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1. 发明公开

EP2143995A1 DISCHARGE LAMP, CABLE FOR CONNECTION, LIGHT SOURCE DEVICE, AND EXPOSURE DEVICE 无效转让
标题翻译： ENTLADUNGSLAMPE，VERBINDUNGSKABEL，LICHTQUELLENVORRICHTUNG UND BELEUCHTUNGSVORRICHTUNG
公开(公告)号：EP2143995A1
公开(公告)日：2010-01-13
申请号：EP08739826.9
申请日：2008-04-03
申请人： Nikon Corporation
发明人： KIKUCHI, Takayuki , KITANO, Hiroshi
IPC分类号： F21V29/00 , H01J5/50 , H01J61/52 , H01L21/027 , F21Y101/00
CPC分类号： H01J5/62 , H01J5/54 , H01J61/523
摘要： A light source device having a large cooling action on the base member of a discharge lamp. A connector (41) on the sides of the power supply (32) and the air blower (34) and the base-side connector (52) of a discharge lamp (1) are connected to each other through a connection cable (57) having a power cable (33A) in which an air blow pipe (35A) is contained. An electric power is supplied from the power supply (32) to a base part (28) through the power cable (33A) of the connection cable (57), the base-side connector (52) and a flow passage bending member (51). The cool air from the air blower (34) is supplied to the groove part (28b) of the base part (28) through the air blow pipe (35A) of the connection cable (57), the base-side connector (52) and an air blow passage in the flow passage-bending member (51).
摘要翻译：一种在放电灯的基底上具有大的冷却作用的光源装置。电源（32）和鼓风机（34）的两侧的连接器（41）和放电灯（1）的基座侧连接器（52）通过连接电缆（57）彼此连接，具有容纳吹气管（35A）的电力电缆（33A）。通过连接电缆（57）的电源电缆（33A），基座侧连接器（52）和流路弯曲部件（51）将电力从电源（32）供给到基部（28））。来自鼓风机（34）的冷空气通过连接电缆（57）的送风管（35A），基座侧连接器（52）供给到基部（28）的槽部（28b）和流路弯曲部件（51）中的吹出通道。

2. 发明授权

EP2143995B1 DISCHARGE LAMP, CABLE FOR CONNECTION, LIGHT SOURCE DEVICE, AND EXPOSURE DEVICE 无效转让
标题翻译：放电灯，连接电缆，光源装置和照明装置
公开(公告)号：EP2143995B1
公开(公告)日：2015-07-01
申请号：EP08739826.9
申请日：2008-04-03
申请人： Nikon Corporation
发明人： KIKUCHI, Takayuki , KITANO, Hiroshi
IPC分类号： F21V29/00 , H01J5/50 , H01J61/52 , H01L21/027 , F21Y101/00
CPC分类号： H01J5/62 , H01J5/54 , H01J61/523
摘要： A light source device having a large cooling action on the base member of a discharge lamp. A connector (41) on the sides of the power supply (32) and the air blower (34) and the base-side connector (52) of a discharge lamp (1) are connected to each other through a connection cable (57) having a power cable (33A) in which an air blow pipe (35A) is contained. An electric power is supplied from the power supply (32) to a base part (28) through the power cable (33A) of the connection cable (57), the base-side connector (52) and a flow passage bending member (51). The cool air from the air blower (34) is supplied to the groove part (28b) of the base part (28) through the air blow pipe (35A) of the connection cable (57), the base-side connector (52) and an air blow passage in the flow passage-bending member (51).

3. 发明授权

EP2096658B1 Discharge lamp, in particular for exposure apparatus 无效转让
标题翻译：放电灯，特别是用于曝光装置
公开(公告)号：EP2096658B1
公开(公告)日：2012-12-26
申请号：EP07806424.3
申请日：2007-08-30
申请人： Nikon Corporation
发明人： SHIRASU, Hiroshi , AOKI, Yasuo , KOYAMA, Motoo , KIKUCHI, Takayuki
IPC分类号： H01J61/52 , H01J5/56 , F21V19/00
CPC分类号： F21V19/006 , G03F7/70016 , H01J5/56 , H01J61/523 , H01J61/822
摘要： A light source apparatus wherein it is possible, for example, to mount a discharge lamp to a mounting mechanism easily in a short amount of time, is provided. A light source apparatus is equipped with a discharge lamp (1), which has a glass tube (25) that forms a light emitting part and a base member (26) that is coupled thereto, and a mounting apparatus (31) that holds the discharge lamp (1) via the base member (26). Therein, the base member (26) has a flange part (26a) that contacts positioning plate (50) of the mounting apparatus (31), and a fixed part (26h) that is urged with a pressing force that presses the flange part (26a) to the positioning plate (50). Furthermore, the mounting apparatus (31) has a fixing arm (5 5A) that urges the fixed part (26h) by a compression coil spring (44A).

4. 发明公开

EP2096658A1 DISCHARGE LAMP, LIGHT SOURCE APPARATUS, EXPOSURE APPARATUS AND EXPOSURE APPARATUS MANUFACTURING METHOD 无效转让
标题翻译： Entladungslampe，insbesonderefürBelichtungsvorrichtung
公开(公告)号：EP2096658A1
公开(公告)日：2009-09-02
申请号：EP07806424.3
申请日：2007-08-30
申请人： Nikon Corporation
发明人： SHIRASU, Hiroshi , AOKI, Yasuo , KOYAMA, Motoo , KIKUCHI, Takayuki
IPC分类号： H01J5/50 , F21V29/00 , H01J61/52 , H01J61/86 , H01L21/027 , H01R33/22
CPC分类号： F21V19/006 , G03F7/70016 , H01J5/56 , H01J61/523 , H01J61/822
摘要： A light source apparatus wherein it is possible, for example, to mount a discharge lamp to a mounting mechanism easily in a short amount of time, is provided. A light source apparatus is equipped with a discharge lamp (1), which has a glass tube (25) that forms a light emitting part and a base member (26) that is coupled thereto, and a mounting apparatus (31) that holds the discharge lamp (1) via the base member (26). Therein, the base member (26) has a flange part (26a) that contacts positioning plate (50) of the mounting apparatus (31), and a fixed part (26h) that is urged with a pressing force that presses the flange part (26a) to the positioning plate (50). Furthermore, the mounting apparatus (31) has a fixing arm (5 5A) that urges the fixed part (26h) by a compression coil spring (44A).
摘要翻译：提供了一种光源装置，其中例如可以在短时间内容易地将放电灯安装到安装机构。光源装置配备有放电灯（1），其具有形成发光部的玻璃管（25）和与其连接的基座部件（26），以及安装装置（31），其保持放电灯（1）经由基座部件（26）。其特征在于，所述基部构件（26）具有与所述安装装置（31）的定位板（50）接触的凸缘部（26a）和被压紧所述凸缘部的按压力的固定部（26h） 26a）连接到定位板（50）。此外，安装装置（31）具有通过压缩螺旋弹簧（44A）推压固定部（26h）的固定臂（5A）。

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