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    • 3. 发明公开
    • Method and system for forming a patterned structure on a substrate
    • 方法和系统,用于在衬底上制造图案化结构
    • EP2883709A1
    • 2015-06-17
    • EP13197502.1
    • 2013-12-16
    • Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO
    • Hendriks, Rob JacobArutinov, GariSmits, Edsger Constant Pieter
    • B41M3/00B41M5/46
    • B41M3/006B41M5/46B41M2205/14H05K3/207
    • The present disclosure concerns a method and system for providing a patterned structure (3p) on an acceptor substrate (4). The method comprises providing a donor substrate (10) arranged between a light source (5) and an acceptor substrate (4). A mask (7) is arranged between the light source (5) and the donor substrate (10). The mask (7) comprises a mask pattern (7p) for patterning light (6). The patterned light (6p) impinging the donor substrate (10) causes the donor material (3) to be released from the donor substrate (10) and transfer to the acceptor substrate (4) to form the patterned structure (3p) thereon. The patterned light (6p) is divided by the mask pattern (7p) into a plurality of separate homogeneously sized beams (6b) simultaneously impinging the donor substrate (10) for causing the donor material (3) to be released from the donor substrate (10) in the form of separate homogeneously sized droplets (3d).
    • 本公开涉及一种用于上的受体底物(4)提供一种图案化结构(3P)的方法和系统。 该方法包括提供供体基板(10)的光源之间布置(5),并通过受体底物(4)。 掩模(7)的光源(5)和供体基底(10)之间设置。 掩模(7)包括用于形成图案的光掩模图案(7P)(6)。 图案化的光(6P)入射到供体基底(10)使供体材料(3)从所述施主衬底(10)和转移到受体底物(4)被释放以在其上形成图案化结构(3P)。 图案化的光(6P)被掩模图案(7P)分成单独的均匀尺寸的梁(6b)的同时照射用于使供体材料(3)的供体基底(10)的一个多元化以从供体基底释放( (10)在单独的均匀尺寸的液滴3d的形式)。
    • 5. 发明公开
    • Roll-to-roll apparatus and method for manufacturing a product comprising a target substrate provided with at least one foil shaped component
    • 滚子装置和程序用于制备产物的与目标衬底,其上设置有至少一个片状元件
    • EP2765614A1
    • 2014-08-13
    • EP13154951.1
    • 2013-02-12
    • Nederlandse Organisatie voor Toegepast -Natuurwetenschappelijk Onderzoek TNO
    • van den Brand, JeroenAritunov, GariSmits, Edsger Constant PieterDietzel, Andreas Heinrich
    • H01L31/0392
    • B32B37/0053B32B37/025B32B37/22B32B2457/00H01L31/03926H01L31/206Y02E10/50Y02P70/521
    • A roll-to-roll apparatus is disclosed for manufacturing a product comprising a target substrate (TS) provided with at least one foil shaped component (CP). The apparatus comprises
      - a transfer body (10) with a cylindrical transfer surface (14) provided with a pattern of at least one binding area (16) having a relatively high affinity for an alignment liquid (LQ) in comparison to a surrounding area (18),
      - a liquid application facility (20) for applying the alignment liquid (LQ) onto said cylindrical transfer surface (14),
      - a substrate supply facility (32, 34) for supplying the substrate (TS),
      - a rotation facility (40) coupled to the transfer body (10) for rotating the cylindrical transfer surface (14) around a rotation axis (12) of the cylindrical transfer surface,
      - a component application facility (50) for applying a respective foil shaped component (CP) onto the alignment liquid (LQ) in the at least one binding area (16),
      and
      - a control facility (70) for controlling the apparatus so that the applied respective foil shaped component (CP) is displaced to an assembly position where it faces the substrate (TS), while it is aligned to the binding area through capillary forces exerted by the alignment liquid during said displacement, and causing the apparatus to bring the aligned respective foil shaped component into contact with the target substrate in said assembly position in order to transfer the foil shaped component to the target substrate.
    • 的辊对辊装置是游离缺失盘用于制造产品,其包括设置有至少一个箔片形部件(CP)的目标衬底(TS)。 该装置包括: - 一个转印体(10)配有相比于周围区域设置有具有用于相对高的亲和力的至少一个结合区(16)的图案的圆柱转印表面(14)(在对准液体(LQ) 18), - 一个液体施加设施(20),用于将所述对准液体(LQ)固定到所述筒状移送表​​面(14), - 在衬底供应设施(32,34)用于供给基板(TS), - 旋转设施 (40)联接到所述转印体(10),用于围绕所述圆柱形转表面的旋转轴线(12),旋转筒状移送表​​面(14) - 用于施加respectivement箔形部件的组件程序设施(50)(CP )到对齐液体(LQ)(在至少一个结合区域16),以及 - 用于控制该设备的控制设施(70),所以没有应用respectivement箔形部件(CP)在组装位置,在其移动到 面对所述基板(TS),而它被对准以TH e到所述位移过程中由对准液体施加毛细力结合区,以及使所述装置以使对准respectivement箔形部件与在所述组件位置的目标底物接触,以将箔片形部件转移到目标基材上。