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1. 发明公开

EP0466025A3 Resist material, method for the production of the same and process of forming resist patterns using the same 失效
标题翻译：耐蚀材料及其制造方法及使用其形成耐磨模式的方法
公开(公告)号：EP0466025A3
公开(公告)日：1992-09-02
申请号：EP91111109.4
申请日：1991-07-04
申请人： NIPPON TELEGRAPH AND TELEPHONE CORPORATION
发明人： Tanaka, Akinobu , Ban, Hiroshi , Nakamura, Jiro , Kimura, Takao , Kawai, Yoshio
IPC分类号： G03F7/075
CPC分类号： G03F7/0757
摘要： A resist material comprises a polysiloxane obtained by hydrolysis and condensation with dehydration of one or more alkoxysilanes having an oxirane ring, or of a mixture of the alkoxysilane(s) having an oxirane ring and one or more alkoxysilanes having no oxirane ring, and an acid generator. The resist material may contain one or more of a spectral sensitizer, an organic polymer having a hydroxyl group or an epoxy compound. Resist patterns are formed by coating an organic polymer on a substrate (1) and then the resist material on the film of the organic polymer to form a two layer resist having a bottom layer (2) of the organic polymer and top layer (3) of the resist material, prebaking, imagewise exposing high radiation, postbaking, and developing the resist with alkaline solutions to remove an unexposed portion of the top layer, and dry etching the bottom layer using the relic of the resist material as a mask. The temperature of the post baking is preferably lower than that of the prebaking.

2. 发明授权

EP0466025B1 Resist material, method for the production of the same and process of forming resist patterns using the same 失效
标题翻译：抗蚀剂材料，其制备方法和过程与此材料制备抗蚀剂像
公开(公告)号：EP0466025B1
公开(公告)日：1999-03-10
申请号：EP91111109.4
申请日：1991-07-04
申请人： NIPPON TELEGRAPH AND TELEPHONE CORPORATION
发明人： Tanaka, Akinobu , Ban, Hiroshi , Nakamura, Jiro , Kimura, Takao , Kawai, Yoshio
IPC分类号： G03F7/075
CPC分类号： G03F7/0757

3. 发明公开

EP0466025A2 Resist material, method for the production of the same and process of forming resist patterns using the same 失效
标题翻译：抗蚀剂材料，其制备方法和用于制备抗蚀剂用这种材料的图像。
公开(公告)号：EP0466025A2
公开(公告)日：1992-01-15
申请号：EP91111109.4
申请日：1991-07-04
申请人： NIPPON TELEGRAPH AND TELEPHONE CORPORATION
发明人： Tanaka, Akinobu , Ban, Hiroshi , Nakamura, Jiro , Kimura, Takao , Kawai, Yoshio
IPC分类号： G03F7/075
CPC分类号： G03F7/0757
摘要： A resist material comprises a polysiloxane obtained by hydrolysis and condensation with dehydration of one or more alkoxysilanes having an oxirane ring, or of a mixture of the alkoxysilane(s) having an oxirane ring and one or more alkoxysilanes having no oxirane ring, and an acid generator. The resist material may contain one or more of a spectral sensitizer, an organic polymer having a hydroxyl group or an epoxy compound. Resist patterns are formed by coating an organic polymer on a substrate (1) and then the resist material on the film of the organic polymer to form a two layer resist having a bottom layer (2) of the organic polymer and top layer (3) of the resist material, prebaking, imagewise exposing high radiation, postbaking, and developing the resist with alkaline solutions to remove an unexposed portion of the top layer, and dry etching the bottom layer using the relic of the resist material as a mask. The temperature of the post baking is preferably lower than that of the prebaking.
摘要翻译：的抗蚀材料包括通过水解和缩合与具有环氧乙烷环的一个或多个烷氧基硅烷的脱水而获得的聚硅氧烷，或环氧乙烷环和一种或多种烷氧基硅烷具有不具有环氧乙烷环的烷氧基硅烷（或多个）的混合物，并在酸发电机。抗蚀剂材料可以含有一种或多种光谱增感的，以具有羟基或环氧化合物的有机聚合物。抗蚀剂图案通过有机聚合物的涂层形成在基片（1），然后在有机聚合物的膜中的抗蚀剂材料，以形成两层抗蚀具有底层（2）的有机聚合物和顶层（3）的抗蚀剂材料，预烘烤，成像曝光高辐射，后烘焙，和发展与碱性溶液将抗蚀剂在顶部层的未曝光部分，以除去，和干蚀刻将抗蚀剂材料作为掩膜的遗迹底层，温度的该后烘烤的，优选比预烘烤的下部。

4. 发明公开

EP0200366A1 UV-Ray curable resin composition and coated optical fiber 失效
标题翻译：通过紫外线辐射固化树脂组合物和涂覆光纤的装置。
公开(公告)号：EP0200366A1
公开(公告)日：1986-11-05
申请号：EP86302369.3
申请日：1986-03-27
申请人： NIPPON TELEGRAPH AND TELEPHONE CORPORATION , JAPAN SYNTHETIC RUBBER CO., LTD.
发明人： Kimura, Takao , Yamakawa, Shinzo , Ohno, Ryotaro
IPC分类号： C08G18/67 , C08G18/69 , C08G18/62 , C03C25/02 , G02B6/16
CPC分类号： C08G18/698 , C03C25/106 , C08G18/6208 , C08G18/672 , C08G18/62 , C08G18/69
摘要： A UV-ray curable resin composition comprising a polyurethane derived from a polyether polyol and a diene polymer having hydroxyl group, said polyurethane having polymerizable double bond different from the carbon-carbon double bonds contained in said diene polymer having hydroxyl group, and a coated optical fiber having a coated layer comprising the cured product of said resin composition. This composition has good coating characteristics, and the cured product thereof has small modulus over a wide temperature range and good hydrolysis resistance, and water absorption resistance. The coated optical fiber has small transmission loss over a wide temperature range and has high strength even in water.

5. 发明公开

EP0155070A1 Coated optical fiber, fabrication process thereof and fabrication apparatus thereof 失效
标题翻译：涂覆光纤中，制造过程和装置及其制造。
公开(公告)号：EP0155070A1
公开(公告)日：1985-09-18
申请号：EP85300402.6
申请日：1985-01-22
申请人： NIPPON TELEGRAPH AND TELEPHONE CORPORATION
发明人： Wagatsuma, Makoto , Yamamoto, Fumio , Kimura, Takao , Shuto, Yoshito , Yamakawa, Shinzo
IPC分类号： C03C25/02 , G02B6/22
CPC分类号： C03C25/18 , B29C47/00 , B29C47/0014 , B29C47/0021 , B29C47/0023 , C03C25/1065
摘要： A coated optical fiber comprising an optical fiber (1); a first layer (18) of a thermoplastic rubber composition (15) which is disposed around the circumference of the optical fiber, has a Young's modulus of 0.1 GPa or less, and is capable of extrusion coating; and a second layer (19) of a thermoplastic resin composition (16) which is disposed around the circumference of the first layer, has a linear expansion coefficient of 1 x 10 -5°C-1 or less and a Young's modulus of 5 GPa or more, and is capable of extrusion coating. The optical fiber is coated simultaneously with the first and second layers immediately after the spinning of the optical fiber. An apparatus for fabricating the coated optical fiber has an extruding machine for extruding the thermoplastic rubber composition and the molecular-orientated thermoplastic resin composition; and a crosshead for simultaneously coating the optical fiber with the extruded thermoplastic rubber composition and molecular--orientated thermoplastic resin composition to form the first and second layer around the optical fiber. The coated optical fiber has excellent transmission characteristics at low and high temperatures and is inexpensive.

6. 发明授权

EP0200366B1 UV-Ray curable resin composition and coated optical fiber 失效
标题翻译：紫外线可固化树脂组合物和涂层光纤
公开(公告)号：EP0200366B1
公开(公告)日：1989-09-06
申请号：EP86302369.3
申请日：1986-03-27
申请人： NIPPON TELEGRAPH AND TELEPHONE CORPORATION , JAPAN SYNTHETIC RUBBER CO., LTD.
发明人： Kimura, Takao , Yamakawa, Shinzo , Ohno, Ryotaro
IPC分类号： C08G18/67 , C08G18/69 , C08G18/62 , C03C25/02 , G02B6/16
CPC分类号： C08G18/698 , C03C25/106 , C08G18/6208 , C08G18/672 , C08G18/62 , C08G18/69

7. 发明授权

EP0155070B1 Coated optical fiber, fabrication process thereof and fabrication apparatus thereof 失效
标题翻译：包覆光纤，其制造工艺及其制造装置
公开(公告)号：EP0155070B1
公开(公告)日：1989-03-29
申请号：EP85300402.6
申请日：1985-01-22
申请人： NIPPON TELEGRAPH AND TELEPHONE CORPORATION
发明人： Wagatsuma, Makoto , Yamamoto, Fumio , Kimura, Takao , Shuto, Yoshito , Yamakawa, Shinzo
IPC分类号： C03C25/02 , G02B6/22
CPC分类号： C03C25/18 , B29C47/00 , B29C47/0014 , B29C47/0021 , B29C47/0023 , C03C25/1065

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