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1. 发明公开

EP2201336A1 SOLID STATE MICROANEMOMETER DEVICE AND METHOD OF FABRICATION 有权
标题翻译：固态微型计量器装置和制造方法
公开(公告)号：EP2201336A1
公开(公告)日：2010-06-30
申请号：EP08837158.8
申请日：2008-10-08
申请人： Memsys, Inc.
发明人： PLOWMAN, Thomas, E. , JEWETT, Warren, R.
IPC分类号： G01F1/684 , G01F1/688 , G01F1/692
CPC分类号： G01F1/6845 , G01F1/688 , G01F1/692
摘要： The invention is a solid state microanemometer and a method of making thereof. Specifically, the invention relates to a microanemometer including an electrically conductive resistor in the form of a semiconductor wafer doped with an impurity having an upper surface, a lower surface having a peripheral edge; a substrate bonded to the semiconductor wafer having an upper surface, a cavity having a peripheral edge and a peripheral margin defined on the upper surface and bounded by the peripheral edge of the cavity wherein the lower surface of the semiconductor wafer rests on and is supported by at least part of the peripheral edge of the cavity such that the semiconductor wafer is over the cavity; and a means for electrically connecting the resistor to a current source. The microanemometer also includes a plurality of metal conductors in contact with the resistor. The semiconductor wafer has sloped sidewalls and the metal conductors are placed on sloped sidewalls of the wafer to effectively increase available active area of the resistor.
摘要翻译：本发明是一种固态微型风速计及其制造方法。具体而言，本发明涉及一种微型风速计，其包括：半导体晶片形式的导电电阻器，其掺杂有具有上表面，下表面和外周边缘的杂质; 结合到半导体晶片的衬底，其具有上表面，空腔，该空腔具有周边边缘和在该上表面上限定的外围边缘并且由该空腔的外围边缘界定，其中该半导体晶片的下表面贴靠在该半导体晶片上并由其支撑至少部分所述空腔的外围边缘，使得所述半导体晶片位于所述空腔之上; 以及用于将电阻器电连接到电流源的装置。微型风速计还包括与电阻器接触的多个金属导体。半导体晶片具有倾斜的侧壁，并且金属导体被放置在晶片的倾斜侧壁上以有效地增加电阻器的可用有效面积。

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