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1. 发明公开

EP1643532A2 Electron source apparatus 审中-公开
标题翻译： Elektronenquelle
公开(公告)号：EP1643532A2
公开(公告)日：2006-04-05
申请号：EP05255930.9
申请日：2005-09-23
申请人： Matsushita Toshiba Picture Display Co., Ltd.
发明人： Yamamoto, Makoto , Shiota, Akinori , Koga, Keisuke
IPC分类号： H01J17/49
CPC分类号： H01J1/312 , B82Y10/00 , H01J31/127
摘要： An electron source apparatus (10) includes a plurality of electron emission portions (4) arranged in a matrix on a Si substrate (1), and a plurality of emitter lines (3) and a plurality of gate lines (8) that are orthogonal to each other, and each of the plurality of electron emission portions (4) being controlled by signals from the plurality of emitter lines (3) and the plurality of gate lines (8) to perform an independent electron emission operation (4). Furthermore, device isolation regions (2) are provided surrounding the respective plurality of emitter lines (3), contact holes (3a) are formed in the respective plurality of emitter lines (3), a plurality of emitter line mounting electrodes (7) that correspond to the respective plurality of emitter lines (3) are provided in a region outside regions that are surrounded by the device isolation regions (2), and conductors (6) that are connected to the respective plurality of emitter line mounting electrodes (7) are connected via the contact holes (3a) to the respective plurality of emitter lines (3) corresponding to the respective plurality of emitter line mounting electrodes (7). Accordingly, the electron source apparatus (10) can achieve high density and size reduction.
摘要翻译：电子源装置（10）包括在Si衬底（1）上以矩阵布置的多个电子发射部分（4），以及多个正交的发射极线（3）和多条栅极线（8）并且多个电子发射部分（4）中的每一个由来自多个发射极线（3）和多个栅极线（8）的信号控制，以执行独立的电子发射操作（4）。此外，设置在相应的多个发射线（3）周围的器件隔离区域（2），在各个发射极线（3）中形成接触孔（3a），多个发射极线路安装电极（7）对应于相应的多个发射线（3）设置在被器件隔离区域（2）包围的区域外的区域中，以及连接到多个发射极线路安装电极（7）的导体（6）经由接触孔（3a）连接到对应于多个发射极线路安装电极（7）的各个发射极线（3）。因此，电子源装置（10）能够实现高密度化和小型化。

2. 发明公开

EP1643532A3 Electron source apparatus 审中-公开
标题翻译：电子源装置
公开(公告)号：EP1643532A3
公开(公告)日：2006-04-19
申请号：EP05255930.9
申请日：2005-09-23
申请人： Matsushita Toshiba Picture Display Co., Ltd.
发明人： Yamamoto, Makoto , Shiota, Akinori , Koga, Keisuke
IPC分类号： H01J17/49 , H01J1/312
CPC分类号： H01J1/312 , B82Y10/00 , H01J31/127
摘要： An electron source apparatus (10) includes a plurality of electron emission portions (4) arranged in a matrix on a Si substrate (1), and a plurality of emitter lines (3) and a plurality of gate lines (8) that are orthogonal to each other, and each of the plurality of electron emission portions (4) being controlled by signals from the plurality of emitter lines (3) and the plurality of gate lines (8) to perform an independent electron emission operation (4). Furthermore, device isolation regions (2) are provided surrounding the respective plurality of emitter lines (3), contact holes (3a) are formed in the respective plurality of emitter lines (3), a plurality of emitter line mounting electrodes (7) that correspond to the respective plurality of emitter lines (3) are provided in a region outside regions that are surrounded by the device isolation regions (2), and conductors (6) that are connected to the respective plurality of emitter line mounting electrodes (7) are connected via the contact holes (3a) to the respective plurality of emitter lines (3) corresponding to the respective plurality of emitter line mounting electrodes (7). Accordingly, the electron source apparatus (10) can achieve high density and size reduction.
摘要翻译：电子源设备（10）包括在Si衬底（1）上以矩阵形式布置的多个电子发射部分（4），以及多个发射极线（3）和多个栅极线（8）并且通过来自多个发射极线（3）和多个栅极线（8）的信号来控制多个电子发射部分（4）中的每一个，以执行独立电子发射操作（4）。此外，围绕相应的多个发射极线（3）提供器件隔离区（2），在相应的多个发射极线（3）中形成接触孔（3a），多个发射极线安装电极（7）与设置在由器件隔离区域（2）包围的区域外的区域对应的多个发射极线（3），以及与多个发射极线安装电极（7）连接的导体（6）经由接触孔（3a）与对应于多个发射极线安装电极（7）的相应多个发射极线（3）连接。因此，电子源装置（10）可以实现高密度和小尺寸减小。

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