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    • 3. 发明公开
    • Fluid control device
    • Fluidsteuerungsvorrichtung
    • EP2568174A1
    • 2013-03-13
    • EP12183346.1
    • 2012-09-06
    • MURATA MANUFACTURING CO., LTD.
    • Hirata, AtsuhikoAndo, YoshinoriMaeda, TakenobuKodama, YukiharuOmori, Kenta
    • F04B43/04F04B45/047
    • F04B43/046F04B45/047F04D33/00
    • A fluid control device (101) includes a vibrating plate unit (160), a driver, and a flexible plate. The vibrating plate unit includes a vibrating plate (141) with first and second main surfaces, a frame plate (161) surrounding the vibrating plate (141), and a link portion (162) linking the vibrating plate and the frame plate and elastically supporting the vibrating plate against the frame plate. The driver (142) is on the first main surface of the vibrating plate, and vibrates the vibrating plate. The flexible plate having a hole (152) faces the second main surface of the vibrating plate (141), being fixed to the frame plate (161). At least a portion of the vibrating plate (141) and the link portion (162) are thinner than the thickness of the frame plate so that the surface of the portion of the vibrating plate and the link portion, on the side of the flexible plate, can separate from the flexible plate.
    • 流体控制装置(101)包括振动板单元(160),驱动器和柔性板。 所述振动板单元包括具有第一和第二主表面的振动板(141),围绕所述振动板(141)的框架板(161)和连接所述振动板和所述框架板的弹性支撑 振动板抵靠框架板。 驱动器(142)位于振动板的第一主表面上,并使振动板振动。 所述柔性板具有与振动板(141)的第二主面相对的孔(152),固定在框架板(161)上。 所述振动板(141)和所述连接部(162)的至少一部分比所述框架板的厚度薄,使得所述振动板的所述部分的表面和所述连接部的所述柔性板 ,可以从柔性板分离。
    • 4. 发明公开
    • Fluid control device
    • 流体控制装置
    • EP2568175A1
    • 2013-03-13
    • EP12183352.9
    • 2012-09-06
    • MURATA MANUFACTURING CO., LTD.
    • Hirata, AtsuhikoAndo, YoshinoriMaeda, TakenobuKodama, YukiharuOmori, KentaMakino, Sho
    • F04B43/04F04B45/047
    • F04B43/043F04B45/047
    • A fluid control device (101) includes a vibrating plate unit (160), a driver (142), and a flexible plate (151). The vibrating plate unit (16) includes a vibrating plate (141) including a first main surface and a second main surface, and a frame plate (161) surrounding the surroundings of the vibrating plate (141). The driver (142) is provided on the first main surface of the vibrating plate (141), and vibrates the vibrating plate. The flexible plate (151) has a hole (152) formed thereon. Furthermore, the flexible plate (151) faces the second main surface of the vibrating plate (141), and adheres to the frame plate by the adhesive agent (120) that contains a plurality of particles (121) arranged such that the plurality of particles are interposed between the flexible plate and the vibrating plate.
    • 流体控制装置(101)包括振动板单元(160),驱动器(142)和挠性板(151)。 振动板单元(16)包括具有第一主表面和第二主表面的振动板(141)以及围绕振动板(141)的周围的框板(161)。 驱动器(142)设置在振动板(141)的第一主表面上,并且振动该振动板。 柔性板(151)上形成有孔(152)。 此外,可挠板151与振动板141的第二主面相对,通过粘接剂120附着在框板上,该粘接剂120具有多个粒子121, 介于柔性板和振动板之间。