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    • 3. 发明公开
    • STACKED FAN-OUT PACKAGE STRUCTURE
    • EP4006969A3
    • 2022-12-28
    • EP22150096.0
    • 2016-09-01
    • MediaTek Inc.
    • LIU, Nai-WeiLIN, Tzu-HungPENG, I-HsuanHSIAO, Ching-WenHUANG, Wei-Che
    • H01L23/538H01L23/31H01L21/60H01L25/03H01L21/56
    • The invention refers to semiconductor package structure (10) comprising a first semiconductor die (100) having a first surface and a second surface opposite thereto, a first molding compound (102) surrounding the first semiconductor die, a first redistribution layer (RDL) structure (104) disposed on the second surface of the first semiconductor die and laterally extending on the first molding compound, a second semiconductor die (200) disposed via an adhesion layer (203) on the first RDL structure having a first surface and a second surface opposite thereto, a second molding compound (202) surrounding the second semiconductor die, a second RDL structure (204) disposed on the second surface (200b) of the second semiconductor die (200) and laterally extending on the second molding compound (202); and a first protective layer (202a) covering a sidewall of the first RDL structure and a sidewall of the first molding compound he first protective layer is an extending portion (202a) of the second molding compound (202), wherein the semiconductor package structure (10; 20; 40) further comprises a backside film (500) disposed on the first surface (100a) of the first semiconductor die (100), and wherein the extending portion (202a) conformally extends along the sidewall (104a) of the first RDL structure (104) and the sidewall (102a) of the first molding compound (102) to the backside film (500), thereby entirely covering the sidewall of the first RDL structure (104) and the sidewall of the first molding compound (102).
    • 4. 发明公开
    • STACKED FAN-OUT PACKAGE STRUCTURE
    • EP4006969A2
    • 2022-06-01
    • EP22150096.0
    • 2016-09-01
    • MediaTek Inc.
    • LIU, Nai-WeiLIN, Tzu-HungPENG, I-HsuanHSIAO, Ching-WenHUANG, Wei-Che
    • H01L23/538H01L23/31H01L21/60H01L21/56
    • The invention refers to semiconductor package structure (10) comprising a first semiconductor die (100) having a first surface and a second surface opposite thereto, a first molding compound (102) surrounding the first semiconductor die, a first redistribution layer (RDL) structure (104) disposed on the second surface of the first semiconductor die and laterally extending on the first molding compound, a second semiconductor die (200) disposed via an adhesion layer (203) on the first RDL structure having a first surface and a second surface opposite thereto, a second molding compound (202) surrounding the second semiconductor die, a second RDL structure (204) disposed on the second surface (200b) of the second semiconductor die (200) and laterally extending on the second molding compound (202); and a first protective layer (202a) covering a sidewall of the first RDL structure and a sidewall of the first molding compound he first protective layer is an extending portion (202a) of the second molding compound (202), wherein the semiconductor package structure (10; 20; 40) further comprises a backside film (500) disposed on the first surface (100a) of the first semiconductor die (100), and wherein the extending portion (202a) conformally extends along the sidewall (104a) of the first RDL structure (104) and the sidewall (102a) of the first molding compound (102) to the backside film (500), thereby entirely covering the sidewall of the first RDL structure (104) and the sidewall of the first molding compound (102).