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1. 发明公开

EP0834759A2 Microelectromechanical devices including rotating plates and related methods 失效
标题翻译： MikroelektromechanischeGerätemit rotierenden Platten undzugehörigeVerfahren
公开(公告)号：EP0834759A2
公开(公告)日：1998-04-08
申请号：EP97307510.4
申请日：1997-09-25
申请人： MCNC
发明人： Dhuler, Vijayakumar R. , Koester, David A. , Walters, Mark D. , Markus, Karen W.
IPC分类号： G02B26/08
CPC分类号： G02B26/0841 , B81B3/0051 , B81B2201/042 , B81B2203/058 , G02B26/101 , Y10S359/90 , Y10T428/24273 , Y10T428/24322 , Y10T428/24355 , Y10T428/24479
摘要： The invention relates to an electromechanical device which includes a first frame (50) having a first aperture therein, a second frame (52) suspended in the first frame, the second frame having a second aperture therein, and a plate (54) suspended in the second aperture. A first pair of beams (56) support the second frame (52) along a first axis relative to the first frame (50) so that the second frame rotates about the first axis. A second pair of beams (58) supports the plate (54) along a second axis relative to the second frame (52) so that the plate rotates about the second axis relative to the second frame. The first and second axes preferably intersect at a 90° angle. A first set of actuators (60) provides mechanical force for rotating the second frame (52) relative to the first frame (50) about the first axis. A second set of actuators (62) provide mechanical force for rotating the plate (54) relative to the second frame (52) about the second axis. Accordingly, the plate (54) can be independently rotated relative to the first axis and the second axis.
摘要翻译：本发明涉及一种机电装置，其包括其中具有第一孔的第一框架（50），悬挂在第一框架中的第二框架（52），其中具有第二孔的第二框架和悬挂在第二个光圈。第一对梁（56）相对于第一框架（50）沿着第一轴支撑第二框架（52），使得第二框架围绕第一轴线旋转。第二对梁（58）相对于第二框架（52）沿着第二轴支撑板（54），使得板相对于第二框架绕第二轴线旋转。第一和第二轴优选以90°角相交。第一组致动器（60）提供用于围绕第一轴线相对于第一框架（50）旋转第二框架（52）的机械力。第二组致动器（62）提供用于围绕第二轴线相对于第二框架（52）旋转板（54）的机械力。因此，板（54）可以相对于第一轴线和第二轴线独立地旋转。

2. 发明公开

EP0834759A3 Microelectromechanical devices including rotating plates and related methods 失效
标题翻译：用旋转盘和相关方法微电子机械装置
公开(公告)号：EP0834759A3
公开(公告)日：1999-10-13
申请号：EP97307510.4
申请日：1997-09-25
申请人： MCNC
发明人： Dhuler, Vijayakumar R. , Koester, David A. , Walters, Mark D. , Markus, Karen W.
IPC分类号： G02B26/08
CPC分类号： G02B26/0841 , B81B3/0051 , B81B2201/042 , B81B2203/058 , G02B26/101 , Y10S359/90 , Y10T428/24273 , Y10T428/24322 , Y10T428/24355 , Y10T428/24479
摘要： The invention relates to an electromechanical device which includes a first frame (50) having a first aperture therein, a second frame (52) suspended in the first frame, the second frame having a second aperture therein, and a plate (54) suspended in the second aperture. A first pair of beams (56) support the second frame (52) along a first axis relative to the first frame (50) so that the second frame rotates about the first axis. A second pair of beams (58) supports the plate (54) along a second axis relative to the second frame (52) so that the plate rotates about the second axis relative to the second frame. The first and second axes preferably intersect at a 90° angle. A first set of actuators (60) provides mechanical force for rotating the second frame (52) relative to the first frame (50) about the first axis. A second set of actuators (62) provide mechanical force for rotating the plate (54) relative to the second frame (52) about the second axis. Accordingly, the plate (54) can be independently rotated relative to the first axis and the second axis.

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