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    • 2. 发明公开
    • Method for fabrication of patterned carbon nanotube films
    • Herstellungsverfahren einer gemustertenKohlenstoffnanoröhrenschicht
    • EP1096533A1
    • 2001-05-02
    • EP00306690.9
    • 2000-08-07
    • LUCENT TECHNOLOGIES INC.University of North Carolina
    • Bower, Christopher AndrewZhou, OttoZhu, Wei
    • H01J9/02C01B31/02
    • B82Y30/00B82Y40/00C01B32/16C01B2202/02H01J9/025Y10S977/742Y10S977/842Y10S977/844Y10T428/24893
    • A method for fabricating adherent, patterned carbon nanotube films is provided. According to the invention, a substrate is patterned with a carbide-forming material, a carbon-dissolving material, or a low melting point metal. Carbon nanotubes are then deposited onto the patterned substrate, but have relatively poor adhesion to either the substrate material or the patterned material. The substrate is then annealed, typically in vacuum, at a temperature dependent on the particular patterning material, e.g., a temperature at which carbide formation occurs, at which carbon dissolution occurs, or at which the low melting point metal melts. The annealing thereby provides an adherent nanotube film over the patterned areas, while the nanotubes deposited onto the non-patterned areas are easily removed, e.g., by blowing, rubbing, brushing and/or ultrasonication in a solvent such as methanol.
    • 提供了一种制造粘附的图案化碳纳米管膜的方法。 根据本发明,用碳化物形成材料,碳溶解材料或低熔点金属对基材进行图案化。 然后将碳纳米管沉积到图案化的衬底上,但对衬底材料或图案化材料的粘附性相对较差。 然后在取决于特定图形材料的温度,例如发生碳化物形成的温度,发生碳溶解或低熔点金属熔化的温度下,将基材通常在真空中退火。 因此退火在图案化区域上提供粘附的纳米管薄膜,而沉积在非图案化区域上的纳米管容易地被去除,例如通过在诸如甲醇的溶剂中吹塑,摩擦,刷涂和/或超声波处理。