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1. 发明公开

EP4394839A1 APPARATUS AND METHOD FOR FABRICATION OF SHIELD PLATE 审中-公开
公开(公告)号：EP4394839A1
公开(公告)日：2024-07-03
申请号：EP23211225.0
申请日：2023-11-21
申请人： Jeol Ltd.
发明人： NEGISHI, Tsutomu , KOZUKA, Munehiro
IPC分类号： H01J37/09
CPC分类号： H01J37/09 , H01J2237/315120130101 , H01J2237/311420130101
摘要： There is provided a shield plate fabrication apparatus (100) capable of fabricating a shield plate (6) easily. The shield plate (6) is included in a sample milling apparatus (300) which mills a sample (S) by shielding a part of the sample (S) with the shield plate (6) and irradiating the sample (S) with a charged particle beam (IB). The fabrication apparatus (100) includes: a base plate holding shaft (10) for rotatably holding a base plate (2) and winding tape (4) around the base plate (2); and a tension mechanism (50) for applying tension to the tape (4) while it is being wound around the base plate (2).

2. 发明公开

EP4098995A1 SPECIMEN MACHINING DEVICE AND SPECIMEN MACHINING METHOD 审中-实审
公开(公告)号：EP4098995A1
公开(公告)日：2022-12-07
申请号：EP22176775.9
申请日：2022-06-01
申请人： Jeol Ltd.
发明人： KOZUKA, Munehiro , NEGISHI, Tsutomu , KIMURA, Tatsuhito , ISHIKAWA, Yoshikazu , KAWAHARA, Hisashi
IPC分类号： G01N1/32 , H01J37/22 , H01J37/305 , H01J37/30 , H01J37/302
摘要： A specimen machining device for machining a specimen by irradiating the specimen with an ion beam includes an ion source for irradiating the specimen with the ion beam, a shielding member disposed on the specimen to block the ion beam, a specimen stage for holding the specimen, a camera for photographing the specimen, a coaxial illumination device for irradiating the specimen with illumination light along an optical axis of the camera, and a processing unit for determining whether to terminate the machining based on an image photographed by the camera, wherein the processing unit performs processing for acquiring information indicating a target machined width, processing for acquiring the image, processing for measuring a machined width on the acquired image, and processing for terminating the machining when the measured machined width equals or exceeds the target machined width.

3. 发明授权

EP3023762B1 SPECIMEN HOLDER AND SPECIMEN PREPARATION DEVICE 有权转让
公开(公告)号：EP3023762B1
公开(公告)日：2020-07-29
申请号：EP15194591.2
申请日：2015-11-13
申请人： Jeol Ltd.
发明人： NEGISHI, Tsutomu , KASAI, Tooru
IPC分类号： G01N1/32 , G02B21/26 , H01J37/20 , H01J37/30 , H01J37/305

4. 发明公开

EP4339993A1 SAMPLE ION MILLING APPARATUS, SHIELD PLATE, AND SAMPLE ION MILLING METHOD 审中-实审
公开(公告)号：EP4339993A1
公开(公告)日：2024-03-20
申请号：EP23191520.8
申请日：2023-08-15
申请人： Jeol Ltd.
发明人： KOZUKA, Munehiro , NEGISHI, Tsutomu , KIMURA, Tatsuhito
IPC分类号： H01J37/09 , G01N1/32 , H01J37/20 , H01J37/305
摘要： There is provided a sample milling apparatus capable of mitigating heat damage to a sample. The apparatus (100) mills the sample (S) by irradiating it with an ion beam (IB) and includes: an ion source (10) for emitting the ion beam (IB); and a shield plate (20) placed on the sample (S) and covering a part of the sample (S). The shield plate (20) includes: a shield surface (2) on which the ion beam (IB) impinges; and a bottom surface (4) connected to the shield surface (2) and forming a bottom edge (3). The bottom surface (4) is smaller in area than the shield surface (2).

5. 发明公开

EP3023762A1 SPECIMEN HOLDER, SPECIMEN PREPARATION DEVICE, AND POSITIONING METHOD 有权转让
标题翻译： PROBENHALTER，PROBENPRÄPARIERUNGSVORRICHTUNGUND POSITIONIERUNGSVERFAHREN
公开(公告)号：EP3023762A1
公开(公告)日：2016-05-25
申请号：EP15194591.2
申请日：2015-11-13
申请人： JEOL Ltd.
发明人： NEGISHI, Tsutomu , KASAI, Tooru
IPC分类号： G01N1/32 , G02B21/26
摘要： A specimen holder (100) is used for an optical microscope (50), comprising: a specimen support (110) that supports a specimen (2) to enable the specimen (2) to tilt relative to the optical axis of the optical microscope(50); an adjustment plate (120) that has an observation surface (122) for making observations using the optical microscope (50); and an adjustment plate support (130) that supports the adjustment plate (120), so that the angle formed by the optical axis and the observation surface (122) is larger than the angle formed by the optical axis and a specimen surface (4) of the specimen (2).
摘要翻译：样品架（100）用于光学显微镜（50），其包括：样本支架（110），其支撑样本（2）以使样本（2）能够相对于光学显微镜的光轴倾斜 50）; 调整板（120），其具有使用所述光学显微镜（50）进行观察的观察面（122）。以及支撑调节板（120）的调节板支撑件（130），使得由光轴和观察表面（122）形成的角度大于由光轴和样本表面（4）形成的角度，的样品（2）。

6. 发明公开

EP4404234A1 SPECIMEN HOLDER, SPECIMEN HOLDER SET, AND SPECIMEN PREPARATION METHOD 审中-公开
公开(公告)号：EP4404234A1
公开(公告)日：2024-07-24
申请号：EP23215940.0
申请日：2023-12-12
申请人： JEOL Ltd.
发明人： NEGISHI, Tsutomu , MORI, Shinobu
IPC分类号： H01J37/20 , H01J37/305 , G01N1/28 , G01N1/32
CPC分类号： H01J37/20 , H01J2237/200720130101 , G01N1/32 , H01J2237/3174520130101 , H01J2237/2020720130101 , H01J2237/315120130101 , H01J37/3053
摘要： A specimen holder includes a holder main body, a specimen mount to which a specimen is to be fixed, and a pressing member which slidably presses the specimen mount against the holder main body, wherein a through-hole is provided in the specimen mount, and the specimen mount is tilted with respect to the holder main body by tilting a rod-like member which is inserted into the through-hole.

7. 发明公开

EP4099360A3 ION BEAM SPECIMEN MACHINING DEVICE AND INFORMATION PROVISION METHOD 审中-实审
公开(公告)号：EP4099360A3
公开(公告)日：2023-05-17
申请号：EP22176774.2
申请日：2022-06-01
申请人： Jeol Ltd.
发明人： KIMURA, Tatsuhito , KOZUKA, Munehiro , NEGISHI, Tsutomu , KAWAHARA, Hisashi
IPC分类号： H01J37/22 , G01N1/28 , G01N1/31 , H01J37/304 , H01J37/31 , G01N1/32 , H01J37/305
摘要： A specimen machining device 100 for machining a specimen 2 by irradiating the specimen with an ion beam IB includes an ion source 10 for irradiating the specimen with the ion beam, a specimen stage 20 for holding the specimen, a camera 60 for photographing the specimen, an information provision unit 70 for providing information indicating an expected machining completion time, and a storage unit 70 for storing past machining information, wherein the information provision unit performs processing for calculating the expected machining completion time based on the past machining information, processing for acquiring an image photographed by the camera, processing for calculating a machining speed based on the acquired image, and processing for updating the expected machining completion time based on the machining speed.

8. 发明公开

EP4099360A2 ION BEAM SPECIMEN MACHINING DEVICE AND INFORMATION PROVISION METHOD 审中-实审
公开(公告)号：EP4099360A2
公开(公告)日：2022-12-07
申请号：EP22176774.2
申请日：2022-06-01
申请人： Jeol Ltd.
发明人： KIMURA, Tatsuhito , KOZUKA, Munehiro , NEGISHI, Tsutomu , KAWAHARA, Hisashi
IPC分类号： H01J37/22 , G01N1/28 , G01N1/31 , H01J37/304 , H01J37/31
摘要： A specimen machining device 100 for machining a specimen 2 by irradiating the specimen with an ion beam IB includes an ion source 10 for irradiating the specimen with the ion beam, a specimen stage 20 for holding the specimen, a camera 60 for photographing the specimen, an information provision unit 70 for providing information indicating an expected machining completion time, and a storage unit 70 for storing past machining information, wherein the information provision unit performs processing for calculating the expected machining completion time based on the past machining information, processing for acquiring an image photographed by the camera, processing for calculating a machining speed based on the acquired image, and processing for updating the expected machining completion time based on the machining speed.

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