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1. 发明公开

EP1615297A4 ANISOTROPIC CONDUCTIVE CONNECTOR AND CIRCUIT-DEVICE ELECTRICAL-INSPECTION DEVICE 审中-公开
标题翻译：各向异性导电连接器和电路元件电气研究SETUP
公开(公告)号：EP1615297A4
公开(公告)日：2007-11-28
申请号：EP04725789
申请日：2004-04-05
申请人： JSR CORP
发明人： SATO KATSUMI , INOUE KAZUO
IPC分类号： H01R11/01 , G01R1/073 , H01L21/66 , H01L23/498 , H01R13/24
CPC分类号： H01R13/2414 , G01R1/0735 , H01L23/49827 , H01L23/49838 , H01L2924/0002 , H01L2924/00
摘要： An anisotropic conductive connector that enables a predetermined electrical inspection on a circuit device whose clock frequency is, for example, more than 1 GHz, and a circuit-device electrical-inspection device having the anisotropic conductive connector are provided. The anisotropic conductive connector is equipped with an elastic anisotropic-conductive film. The film includes a plurality of connecting conductive parts disposed in accordance with the pattern corresponding to an electrode to be connected to the pattern and extending toward the direction of the thickness, and insulating parts for insulating the connecting conductive parts from each other. The anisotropic conductive connector is characterized in that within the elastic, anisotropic-conductive film, a conductive part for high-frequency shielding extends toward the direction of thickness. The circuit-device electrical-inspection device is characterized by comprising such an anisotropic conductive connector.

2. 发明公开

EP1548884A4 ANISOTROPIC CONDUCTIVE SHEET, ITS MANUFACTURING METHOD, AND ITS APPLICATION 审中-公开
标题翻译：各向异性导电片，制造方法及其应用
公开(公告)号：EP1548884A4
公开(公告)日：2007-05-09
申请号：EP03791285
申请日：2003-08-26
申请人： JSR CORP
发明人： INOUE KAZUO , SATO KATSUMI
IPC分类号： H01L23/498 , H01L23/60 , H01R11/01 , G01R1/06 , H01L21/66
CPC分类号： H01L23/49827 , H01L23/60 , H01L2924/0002 , H01L2924/09701 , H01L2924/00
摘要： An anisotropic conductive sheet not contaminating an object to be connected, not adhering to the object even if the sheet pressed by the object is left for a long time in a high-temperature environment, and preventing the sheet from being charged or suppressing the charging, and eliminating adverse influence of static electricity, its manufacturing method, and its application are disclosed. The anisotropic conductive sheet (10) comprises an anisotropic conductive sheet body (11) made of an elastic polymer material, having conductive portions (12) extending in the direction of thickness and insulating portions (13) insulating the conductive portions (12) from one another and a DLC film (15) provided on one or both sides of the anisotropic conductive sheet body (11) and so integrally formed as to cover at least the insulating portions.

3. 发明公开

EP1732120A4 PROBE APPARATUS, WAFER INSPECTING APPARATUS PROVIDED WITH THE PROBE APPARATUS AND WAFER INSPECTING METHOD 审中-公开
标题翻译：与探测装置，EQUIPPED晶圆检测设备和晶圆INVESTIGATIONS探测装置，
公开(公告)号：EP1732120A4
公开(公告)日：2012-02-29
申请号：EP05727781
申请日：2005-03-30
申请人： JSR CORP
发明人： IGARASHI HISAO , SATO KATSUMI , INOUE KAZUO
IPC分类号： H01L21/66 , G01R1/06 , G01R1/073 , G01R31/28
CPC分类号： G01R1/07364 , G01R1/07314 , G01R1/07371 , G01R1/07378

4. 发明公开

EP1744167A4 SHEET-LIKE PROBE, METHOD OF PRODUCING THE PROBE, AND APPLICATION OF THE PROBE 有权
标题翻译：片状探头，其制造方法探头的探头及应用
公开(公告)号：EP1744167A4
公开(公告)日：2012-02-29
申请号：EP05737142
申请日：2005-04-26
申请人： JSR CORP
发明人： SATO KATSUMI , INOUE KAZUO , FUJIYAMA HITOSHI , YOSHIOKA MUTSUHIKO , IGARASHI HISAO
IPC分类号： A63H31/08 , G01R1/06 , A63H17/045 , A63H29/22 , A63H30/00 , A63H30/04 , A63H31/00 , B60K17/16 , F16H1/14 , F16H1/20 , F16H1/28 , F16H48/08 , G01R1/067 , G01R1/073 , G01R3/00 , G01R31/26 , H01L21/06 , H01L21/66 , H01L51/50 , H05B33/14
CPC分类号： A63H29/22 , A63H30/04 , A63H31/00 , F16H48/08 , G01R1/06711 , G01R1/0735 , G01R3/00 , H01L51/5012 , H05B33/14 , Y10T29/49155

5. 发明公开

EP1608040A4 ANISOTROPIC CONDUCTIVE CONNECTOR, CONDUCTIVE PASTE COMPOSITION, PROBE MEMBER, WAFER INSPECTION DEVICE AND WAFER INSPECTION METHOD 审中-公开
标题翻译：各向异性导电连接器，导电浆料组合物，探针成员，晶圆检测设备和晶圆INVESTIGATIONS
公开(公告)号：EP1608040A4
公开(公告)日：2007-11-14
申请号：EP04722670
申请日：2004-03-23
申请人： JSR CORP
发明人： IGARASHI HISAO , SATO KATSUMI , INOUE KAZUO
IPC分类号： G01R1/073 , H01L23/498 , H01R13/24 , H01R11/01 , G01R1/06 , H01B1/22 , H01B5/00 , H01B5/16 , H01L21/66
CPC分类号： G01R1/0735 , H01L23/49827 , H01L2924/0002 , H01R13/2414 , H01L2924/00
摘要： An anisotropic conductive connector is disclosed which can maintain good conductive properties for a long time in a case where the connector is repeatedly used many times in electrical inspections of integrated circuits formed on a wafer. The anisotropic conductive connector has a high durability and a long life. Applications of such an anisotropic conductive connector are also disclosed. The anisotropic conductive connector comprising an elastic anisotropic conductive film that is provided with a plurality of conductive parts for connection which contain conductive particles and extend in the thickness direction is characterized in that each conductive particle contained in the conductive parts for connection is formed by covering the surface of a magnetic core particle with a coating layer composed of a highly conductive metal, and in that the coating layer has a high hardness.

6. 发明公开

EP1624309A4 SHEET-LIKE PROBE, PROCESS FOR PRODUCING THE SAME AND ITS APPLICATION 有权
标题翻译：伊斯坦布尔的“魔兽世界”，“ZH IHRER HERSTELLUNG”，“IHRER ANWENDUNG”
公开(公告)号：EP1624309A4
公开(公告)日：2006-05-31
申请号：EP04732418
申请日：2004-05-12
申请人： JSR CORP
发明人： INOUE KAZUO , SATO KATSUMI
IPC分类号： G01R1/073 , G01R3/00
CPC分类号： G01R1/0735 , G01R3/00
摘要： A sheet-like probe in which positional deviation between an electrode structure and an electrode under test due to temperature variation can be prevented surely in burn-in test even when a large area wafer having a diameter of 8 inch or larger or a circuit device where the electrode under test has an extremely small pitch is inspected, and thereby good electrical connection can be sustained stably. Its production process and application are also provided. In the sheet-like probe, a plurality of electrode structures, having surface electrode parts exposed to the surface and rear surface electrode parts exposed to the rear surface while being arranged according to a pattern corresponding to the electrodes being connected, comprise a contact film held by an insulating film of soft resin and a frame plate supporting that contact film.
摘要翻译：本文公开了一种片状探针，即使当检查对象是8英寸以上的大面积的晶片时，能够防止在老化试验中的温度变化来检查电极结构和电极之间的位置偏移的片状探针直径或电路器件，其检查的电极的间距极小，因此能够稳定地保持良好的电连接状态及其制造方法和应用。本发明的片状探针包括通过保持根据与要连接的各个电极相对应的图案布置的多个电极结构而获得的接触膜，并且具有暴露于前表面和背面的前表面电极部分通过由柔性树脂构成的绝缘膜暴露于背面的表面电极部分和支撑接触膜的框架板。

7. 发明公开

EP1640729A4 ANISOTROPIC CONDUCTIVE CONNECTOR AND WAFER INSPECTION DEVICE 审中-公开
标题翻译：各向异性导电连接器和晶圆检测装置
公开(公告)号：EP1640729A4
公开(公告)日：2010-06-16
申请号：EP04745480
申请日：2004-06-01
申请人： JSR CORP
发明人： IGARASHI HISAO , SATO KATSUMI , INOUE KAZUO
IPC分类号： G01R1/073 , H01L21/66 , H01R4/04 , H01R11/01
CPC分类号： G01R1/0735 , G01R1/07378 , H01R4/04 , H01R12/52

8. 发明公开

EP1503216A4 SHEET-FORM CONNECTOR AND PRODUCTION METHOD AND APPLICATION THEREFOR 有权
标题翻译：片状连接器和方法及用途
公开(公告)号：EP1503216A4
公开(公告)日：2008-03-26
申请号：EP03758872
申请日：2003-10-24
申请人： JSR CORP
发明人： SATO KATSUMI , INOUE KAZUO
IPC分类号： G01R31/02 , G01R1/06 , G01R1/067 , G01R1/073 , G01R31/28 , H01B5/16 , H01L21/66 , H01L23/498 , H01R11/01 , H01R33/76 , H05K1/11 , H05K3/40 , H05K3/42
CPC分类号： G01R1/07314 , G01R1/06711 , G01R1/06733 , H01L23/49811 , H01L23/49827 , H01L2924/0002 , H01L2924/09701 , H01R11/01 , H01R12/523 , H05K1/116 , H05K3/4007 , H05K3/423 , H05K2201/0367 , H05K2201/0394 , H05K2201/09436 , H05K2201/09481 , H05K2203/0733 , H01L2924/00
摘要： A sheet-form connector capable of forming an electrode structure having a small-diameter surface electrode unit, positively attaining a stable electric connection condition for a circuit device having electrodes formed at a small pitch, and providing a high durability without the electrode structure coming off an insulating sheet; and a production method and an application therefore. The sheet-form connector comprises an insulating sheet and a plurality of electrode structures provided to the insulating sheet to extend through the sheet in its thickness direction, wherein each of the electrode structures comprises a surface electrode part exposed to and protruding from the surface of the insulating sheet, a rear electrode part exposed to the rear surface of the insulating sheet, a shorting part extending continuously from the base end of the surface electrode part through the insulating sheet in its thickness direction until connected to the rear electrode part, and a holding part extending continuously from the base end of the surface electrode part along the surface of the insulating sheet toward the outer side.

9. 发明公开

EP1315241A4 ANISOTROPIC CONDUCTIVE SHEET 审中-公开
标题翻译： ANISOTROPISCHELEITFÄHIGEFOLIE
公开(公告)号：EP1315241A4
公开(公告)日：2008-03-19
申请号：EP01956808
申请日：2001-08-08
申请人： JSR CORP
发明人： IGARASHI HISAO , INOUE KAZUO , SETAKA RYOJI
IPC分类号： H01B1/20 , H01R13/24 , H01R11/01 , H01B5/16 , H01B13/00
CPC分类号： H01R13/2414 , H01B1/20 , Y10T428/254 , Y10T428/2991 , Y10T428/2998 , Y10T428/32
摘要： An anisotropic conductive sheet which can retain electric charge on the surface thereof under no pressurization, and move the charge on the surface in a thickness direction under a thickness-direction pressurization to thereby control charge amounts on the surface, and which comprises magnetic, conductive particles (P) contained in an elastomer-made sheet substrate (10) so as to be aligned in the thickness direction thereof and dispersed in the surface direction thereof, wherein a volume resistance R1 is 1 x 10 to 1 x 10 OMEGA .m and a ratio (R0/R1) of volume resistance R0 to volume resistance R1 is 1 x 10 to 1 x 10 , where R0 is a thickness-direction volume resistance under no pressurization, and R1 thickness-direction volume resistance under a thickness-direction pressure of 1 g/mm .
摘要翻译：本发明提供一种各向异性导电片，其能够在不加压的情况下在其表面上保持电荷，并且使厚度方向上的表面上的电荷在厚度方向加压下移动，从而控制表面上的电荷量，并且其包括磁性导电颗粒（P）包含在弹性体制成的片基板（10）中，以沿其厚度方向排列并在其表面方向上分散，其中体积电阻R1为1×10 7至1×10 12 > OMEGA·m，并且体积电阻R0与体积电阻R1之比（R0 / R1）为1×10 1至1×10 4，其中R 0为不加压时的厚度方向体积电阻，R1 在厚度方向压力下的厚度方向体积电阻为1g / mm 2。

10. 发明公开

EP1365479A4 ANISOTROPIC CONDUCTIVE CONNECTOR, ITS MANUFACTURE METHOD AND PROBE MEMBER 有权
标题翻译： “各向异性导电连接器，及其制造方法探头LINK”
公开(公告)号：EP1365479A4
公开(公告)日：2007-12-26
申请号：EP02711328
申请日：2002-02-06
申请人： JSR CORP
发明人： KOKUBO TERUKAZU , SENO KOJI , NAOI MASAYA , INOUE KAZUO
IPC分类号： H01R11/01 , G01R1/06 , G01R1/073 , G01R31/26 , H01L21/66 , H01R13/24 , H01R43/00 , H01B5/16
CPC分类号： H01R13/2414 , H01R43/007
摘要： Disclosed are an anisotropic conductive connector which can be easily aligned, held and fixed with respect to a wafer to be tested, even if the wafer has a large area and even if electrodes to be tested are arranged at small pitches and in which a satisfactory conductivity can be acquired for all conductive portions, and insulation from the adjoining conductive portions is set up; a method for manufacturing the connector; and a probe member. This anisotropic conductive connector comprises a frame plate having a plurality of holes for disposing anisotropic conductive films so formed as to correspond to the electrode regions of the wafer to be tested and a plurality of elastic anisotropic conductive films arranged in the respective anisotropic conductive film arranging holes and supported by the peripheral portions of the holes. Each of the elastic anisotropic conductive films includes a functional part having a plurality of conductive portions so arranged to correspond to the electrodes to be tested, extending in the direction of the thickness, and containing conductive particles exhibiting magnetism, and an insulating portion for insulating the conductive portions from one another and a supported part formed integrally with the periphery of the functional part and fixed to the peripheral portions of the anisotropic conductive film arranging holes . The supported portion contains conductive particles exhibiting the magnetism.

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