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1. 发明授权

EP0831464B1 Apparatus for optical differential measurement of glide height above a magnetic disk 失效
标题翻译：装置用于在磁性板的差动Gleitabstandes的光学测量
公开(公告)号：EP0831464B1
公开(公告)日：2003-05-02
申请号：EP97306927.1
申请日：1997-09-05
申请人： International Business Machines Corporation
发明人： Lu, Huizong , Taheri, Ali Reza
IPC分类号： G11B5/60 , G11B21/21
CPC分类号： G01B11/14

2. 发明公开

EP0831464A1 Apparatus for optical differential measurement of glide height above a magnetic disk 失效
标题翻译：设备用于差分的光学测量Gleitabstandes磁盘
公开(公告)号：EP0831464A1
公开(公告)日：1998-03-25
申请号：EP97306927.1
申请日：1997-09-05
申请人： International Business Machines Corporation
发明人： Lu, Huizong , Taheri, Ali Reza
IPC分类号： G11B5/60 , G11B21/21
CPC分类号： G01B11/14
摘要： A glide height tester for inspecting a surface of a spinning magnetic disk includes a glide plate, which is mounted to pivot above the disk surface. A reflective surface fastened to the glide plate is imaged by an interferometric apparatus which produces a calculated output indicating a first angle of the glide plate. The interferometric apparatus includes a Wollaston prism, which can be rotated 90-degrees to provide an output indicating a second angle of the glide plate, perpendicular to the first angle.
摘要翻译：该装置包括：其中，所述椭圆偏振返回光束被分成在第三方向和第四方向极化的第二返回子光束（48）极化的第一返回子光束极性伊辛分束器（24）。垂直于所述第三方向。第一光电检测器（66）测量所述第一返回子束的强度。第二光电检测器（68）测量所述第二返回子束的强度。光学装置的一部分是一个关于在光轴垂直于反射表面延伸到测量反射表面的旋转的第二方向，垂直于所述第一枢转方向旋转的基座。

3. 发明公开

EP0831296A1 Optical apparatus for rapid defect analysis 失效
标题翻译： Optische Vorrichtung zur schnellen Defektanalyse
公开(公告)号：EP0831296A1
公开(公告)日：1998-03-25
申请号：EP97307118.6
申请日：1997-09-12
申请人： International Business Machines Corporation
发明人： Dorundo, Alan D. , Lisanke, Michael Gerard , Lu, Huizong , McCormick, Richard J. , Pena, Lanphuong Thi , Schnetzer, Eric V. , Taheri, Ali Reza
IPC分类号： G01B9/02 , G01B11/06 , G01N21/88
CPC分类号： G01B11/0608 , G01B9/02019 , G01B9/02048 , G01B9/02068 , G01B2290/70 , G01N21/9506
摘要： An apparatus for inspecting the surface of a sample includes a narrow scanning interferometer, which is used to locate defects, or anomalies in the surface, and a wide scanning interferometer, which is used to develop profiles of individual defects found by the narrow scanning interferometer. The sample may be driven in rotation about an axis, while the interferometers are independently moved radially to the axis.
摘要翻译：用于检查样品表面的装置包括用于定位缺陷或表面异常的窄扫描干涉仪，以及用于形成由窄扫描干涉仪发现的各个缺陷的轮廓的宽扫描干涉仪。样品可以围绕轴线旋转驱动，而干涉仪独立地径向移动到轴线。

4. 发明授权

EP0831296B1 Optical apparatus for rapid defect analysis 失效
标题翻译：用于快速故障分析的光学器件
公开(公告)号：EP0831296B1
公开(公告)日：2003-03-05
申请号：EP97307118.6
申请日：1997-09-12
申请人： International Business Machines Corporation
发明人： Dorundo, Alan D. , Lisanke, Michael Gerard , Lu, Huizong , McCormick, Richard J. , Pena, Lanphuong Thi , Schnetzer, Eric V. , Taheri, Ali Reza
IPC分类号： G01B9/02 , G01B11/06 , G01N21/88
CPC分类号： G01B11/0608 , G01B9/02019 , G01B9/02048 , G01B9/02068 , G01B2290/70 , G01N21/9506

5. 发明公开

EP0831297A1 Optical apparatus for inspecting laser texture 失效
标题翻译：通过激光的装置，用于有纹理的表面的检查的光学设备
公开(公告)号：EP0831297A1
公开(公告)日：1998-03-25
申请号：EP97307174.9
申请日：1997-09-16
申请人： International Business Machines Corporation
发明人： Barenboim, Michael , Chrusch, Peter B. , Harper, Benny Michael , Kerstens, Pieter J.M. , Lisanke, Michael Gerard , Baumgart, Peter Michael , Karni, Benjamin , Seing, Hong S. , Lu, Huizong , Pena, Lanphuong Thi , Taheri, Ali Reza , Tam, Andrew Ching
IPC分类号： G01B11/22 , G01B9/02 , G11B5/84
CPC分类号： G01B9/02019 , G01B9/02057 , G01B11/22 , G01B2290/45 , G01B2290/70 , G11B5/8404
摘要： An inspection apparatus determines the profile of textured spots extending in a pattern along a surface of a magnetic disk. The apparatus illuminates first and second, adjacently disposed test spots on the surface. The disk and the interferometer are moved, relative to one another, so that one of the test spots traverses the textured spots in the pattern while the other test spot is moved along a flat portion of the disk surface. In one embodiment, the inspection apparatus is built into the device forming the textured spots, providing feedback controlling the texturing process.

6. 发明公开

EP0831295A1 Optical differential profile measurement apparatus and process 失效
标题翻译： Vorrichtung und Verfahren zur optischen Profilmessung
公开(公告)号：EP0831295A1
公开(公告)日：1998-03-25
申请号：EP97306583.2
申请日：1997-08-28
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人： Lu, Huizong , Taheri, Ali Reza
IPC分类号： G01B9/02 , G01B11/06 , G01N21/88
CPC分类号： G01B11/303 , G01B11/0608 , G01N21/9506
摘要： An interferometer (10) forms a pair of projected sub-beams by decomposing a single coherent, linearly-polarized beam (14). These sub-beams are focused by an objective lens (52) onto a pair of test spots on a test surface (12). The reflections of these sub-beams are recombined to form an elliptically polarized return beam, which is broken into return sub-beams of opposing polarities in a polarizing beam splitter (64). The intensities of these return sub-beams are used to calculate a difference in height between the two test spots. When these test spots are aligned along a path of relative motion with the test surface, the resulting differences in height are added to form an accumulative profile of the test surface (12).
摘要翻译：干涉仪（10）通过分解单个相干线性偏振光束（14）形成一对投影子光束。这些子光束被物镜（52）聚焦在测试表面（12）上的一对测试点上。这些子光束的反射被重新组合以形成椭圆偏振的返回光束，其在偏振光束分离器（64）中被分解成相反极性的返回子光束。这些返回子光束的强度用于计算两个测试点之间的高度差。当这些测试点沿着与测试表面相对运动的路径对准时，加上所得到的高度差异以形成测试表面（12）的累积轮廓。

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