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1. 发明授权

EP0442536B1 Atomic force sensor head for measuring the properties of a data store 失效
标题翻译：原子力传感器，用于测量的数据载体的性质。
公开(公告)号：EP0442536B1
公开(公告)日：1994-08-17
申请号：EP91105520.0
申请日：1987-05-12
申请人： International Business Machines Corporation
发明人： Dürig, Urs Theodor, Dr. , Rohrer, Heinrich, Dr. , Binnig, Gerd Karl, Prof. Dr.
IPC分类号： G01B11/30 , G01B7/34 , G11B11/08
CPC分类号： G01Q20/02 , G01D5/266 , G01Q60/38 , G01R33/0385 , G11B9/00 , G11B9/1418 , G11B11/007 , G11B11/10 , G11B17/32

2. 发明授权

EP0290648B1 Atomic force sensor head for investigating the topography of a surface 失效
标题翻译：用于调查表面形貌的原子传感器头
公开(公告)号：EP0290648B1
公开(公告)日：1992-03-11
申请号：EP87106900.1
申请日：1987-05-12
申请人： International Business Machines Corporation
发明人： Dürig, Urs Theodor, Dr. , Gimzewski, James Kazimierz, Dr. , Rohrer, Heinrich, Dr.
IPC分类号： G01L1/08 , G01L1/14
CPC分类号： G01Q20/02 , G01D5/266 , G01Q60/38 , G01R33/0385 , G11B9/00 , G11B9/1418 , G11B11/007 , G11B11/10 , G11B17/32

3. 发明授权

EP0166308B1 Apparatus and method for narrow line width pattern fabrication 失效
标题翻译：窄线宽幅图形制作装置及方法
公开(公告)号：EP0166308B1
公开(公告)日：1991-12-27
申请号：EP85107252.0
申请日：1985-06-14
申请人： International Business Machines Corporation
发明人： Binnig, Gerd Karl Dr. , Feenstra, Randall Meindert , Hodgson, Rodney Trevor , Rohrer, Heinrich, Dr. , Woodall, Jerry Mac Pherson
IPC分类号： C23C16/04 , H01J37/32 , H01L21/00
CPC分类号： H01J37/32 , C23C16/047 , H01J37/3174 , H01J2237/31738 , H01J2237/31759 , Y10S977/857

4. 发明授权

EP0100785B1 High-performance vibration filter 失效
标题翻译：高性能振动过滤器
公开(公告)号：EP0100785B1
公开(公告)日：1986-10-29
申请号：EP82107380.6
申请日：1982-08-13
申请人： International Business Machines Corporation
发明人： Binnig, Gerd, Dr. , Gerber, Christoph , Rohrer, Heinrich, Dr. , Weibel, Edmund
IPC分类号： F16F15/06
CPC分类号： G01Q30/18 , F16F15/046
摘要： The vibration filter comprises an inner ring (27) on which vibration-sensitive equipment may be installed, the ring (27) being suspended from a plurality of springs (24, 25, 26) elastically supported by posts (18, 19, 20) in turn mounted on an outer ring (1) which is spring-suspended the same as the inner ring (27) from a rigid bench (8). The springs (12, 13, 14; 24, 25, 26) and other elastic members (9, 10, 11; 15, 16, 17; 21, 22, 23; 28, 29, 30) have differing resonant frequencies. Between the bench (8) and the outer ring (1), and between the outer and inner rings (1, 27) there may be provided eddy current brakes consisting of strong permanent magnets (46, 48) arranged opposite individual copper or aluminum blocks (5, 47).

5. 发明公开

EP0290648A1 Atomic force sensor head for investigating the topography of a surface 失效
标题翻译： TastkopffüratomareKräftezum Untersuchen der Topographie einerOberfläche。
公开(公告)号：EP0290648A1
公开(公告)日：1988-11-17
申请号：EP87106900.1
申请日：1987-05-12
申请人： International Business Machines Corporation
发明人： Dürig, Urs Theodor, Dr. , Gimzewski, James Kazimierz, Dr. , Rohrer, Heinrich, Dr.
IPC分类号： G01L1/08 , G01L1/14
CPC分类号： G01Q20/02 , G01D5/266 , G01Q60/38 , G01R33/0385 , G11B9/00 , G11B9/1418 , G11B11/007 , G11B11/10 , G11B17/32
摘要： The atomic force sensor head comprises a cantilever beam (50) forming an integral part of a body (53) from which it extends such that it has a free end to carry a member (55) for interaction with a surface to be investigated. As said member (55) is brought close to said surface, atomic forces will cause a deflection of said cantilever (50). This deflection is translated into a variation of an electrical value, such as a capacitance. A capacitor (57) is formed by a pair of electrodes (51, 52) coated onto the cantilever beam (50) and said body (53), respectively. The deflection of said cantilever beam (50) causes a variation of the distance (s) between said electrodes (51, 52) and, hence, of the capacitance.
An improvement of the sensitivity and stability of this arrangement is made possible by filling the gap between the said electrodes (51, 52) with materials (54, 56) having different dielectric constants and different thicknesses. With a relation of 1:10 of the dielectric constants and a thickness relation of 1:5, an improvement factor of about 40 can be obtained. A 55
摘要翻译：原子力传感器头包括形成主体（53）的整体部分的悬臂梁（50），它从其延伸，使得其具有自由端以携带用于与要研究的表面相互作用的构件（55）。当所述构件（55）靠近所述表面时，原子力将引起所述悬臂（50）的偏转。该偏转被转换成诸如电容的电值的变化。电容器（57）由分别涂覆在悬臂梁（50）和主体（53）上的一对电极（51,52）形成。所述悬臂梁（50）的偏转导致所述电极（51,52）之间的距离（因此）与电容之间的距离的变化。通过用具有不同介电常数和不同厚度的材料（54,56）填充所述电极（51,52）之间的间隙，可以提高该布置的灵敏度和稳定性。介电常数为1:10，厚度关系为1:5，可获得约40的改进系数。

6. 发明公开

EP0071666A1 Electric travelling support 失效
标题翻译：电活动舞台。
公开(公告)号：EP0071666A1
公开(公告)日：1983-02-16
申请号：EP81106229.8
申请日：1981-08-10
申请人： International Business Machines Corporation
发明人： Binnig, Gerd, Dr. , Nievergelt, Hermann , Rohrer, Heinrich, Dr. , Weibel, Edmund
IPC分类号： H01L41/08 , G12B1/00
CPC分类号： G01Q10/04 , G12B1/00 , H02N2/0095 , H02N2/023 , H02N2/101
摘要： The travelling support (1) comprises a piezo-electric plate (2) resting on three legs (6) whose bottom surface is insulated from the bench (8) on which the support is to travel, by a dielectric (7). The piezo-electric plate (2) can be caused to contract by means of an actuating voltage applied via sliders (9, 10) to top and bottom electrodes on the plate (2). By applying a voltage to the legs (6), these may be clamped selectively by electrostatic forces effective across the dielectric (7). Appropriate control of the actuating and clamping voltages causes the support (1) to either move in a linear or rotary fashion. The displacements the support can perform per step are in the nanometer range.

7. 发明公开

EP0442536A2 Atomic force sensor head for measuring the properties of a data store 失效
标题翻译： AtomarerKräftesensorzur Messung der Eigenschaften einesDatenträgers。
公开(公告)号：EP0442536A2
公开(公告)日：1991-08-21
申请号：EP91105520.0
申请日：1987-05-12
申请人： International Business Machines Corporation
发明人： Dürig, Urs Theodor, Dr. , Rohrer, Heinrich, Dr. , Binnig, Gerd Karl, Prof. Dr.
IPC分类号： G01B11/30 , G01B7/34 , G11B11/08
CPC分类号： G01Q20/02 , G01D5/266 , G01Q60/38 , G01R33/0385 , G11B9/00 , G11B9/1418 , G11B11/007 , G11B11/10 , G11B17/32
摘要： The atomic force sensor head comprises a cantilever beam (82) forming an integral part of a body (83, 84) from which it extends such that it has a free end to carry a member (81) for interaction with the surface (86) of a recording medium (80) to be investigated. As said member (81) is brought close to said surface (86), atomic forces will cause a deflection of said cantilever beam (82). This deflection is translated into a variation of an electrical value, such as a capacitance. A capacitor (87) is formed by a pair of electrodes (82, 85) coated onto the cantilever beam (82) and said body (84), respectively. The deflection of said cantilever beam (82) causes a variation of the distance (s) between said electrodes (82,85) and, hence, of the capacitance.
An improvement of the sensitivity and stability of this arrangement is made possible by filling the gap between the said electrodes (82, 85) with materials having different dielectric constants and different thicknesses. With a relation of 1:10 of the dielectric constants and a thickness relation of 1:5, an improvement factor of about 40 can be obtained.
摘要翻译：原子力传感器头包括形成主体（83,84）的整体部分的悬臂梁（82），所述悬臂梁延伸，使得其具有自由端以携带用于与表面（86）相互作用的构件（81）的记录介质（80）。当所述构件（81）靠近所述表面（86）时，原子力将引起所述悬臂梁（82）的偏转。该偏转被转换成诸如电容的电值的变化。电容器（87）由分别涂覆在悬臂梁（82）和主体（84）上的一对电极（82,85）形成。所述悬臂梁（82）的偏转导致所述电极（82,85）之间的距离（因此）和电容之间的距离的变化。通过用具有不同介电常数和不同厚度的材料填充所述电极（82,85）之间的间隙，可以提高这种布置的灵敏度和稳定性。介电常数为1:10，厚度关系为1:5，可获得约40的改进系数。

8. 发明公开

EP0166308A3 Apparatus and method for narrow line width pattern fabrication 失效
标题翻译：窄线宽幅图形制作装置及方法
公开(公告)号：EP0166308A3
公开(公告)日：1989-02-08
申请号：EP85107252.0
申请日：1985-06-14
申请人： International Business Machines Corporation
发明人： Binnig, Gerd Karl Dr. , Feenstra, Randall Meindert , Hodgson, Rodney Trevor , Rohrer, Heinrich, Dr. , Woodall, Jerry Mac Pherson
IPC分类号： C23C16/04 , H01J37/32 , H01L21/00
CPC分类号： H01J37/32 , C23C16/047 , H01J37/3174 , H01J2237/31738 , H01J2237/31759 , Y10S977/857
摘要： The formation of lines (2) of the order of 0,8 nanometers wide is achieved using a tunneling current through a gas (6) that changes to provide a residue that is the basis of the line (2). The tunneling current energy is tuned to the energy required to dissociate the gas (6). The radius of the tunnel tip (3) and the tip (3)-to-substrate (1) distance (S) are of the order of less than ten nanometers.

9. 发明公开

EP0442536A3 Atomic force sensor head for measuring the properties of a data store 失效
标题翻译：用于测量数据存储的属性的原子传感器头
公开(公告)号：EP0442536A3
公开(公告)日：1992-01-02
申请号：EP91105520.0
申请日：1987-05-12
申请人： International Business Machines Corporation
发明人： Dürig, Urs Theodor, Dr. , Rohrer, Heinrich, Dr. , Binnig, Gerd Karl, Prof. Dr.
IPC分类号： G01B11/30 , G01B7/34 , G11B11/08
CPC分类号： G01Q20/02 , G01D5/266 , G01Q60/38 , G01R33/0385 , G11B9/00 , G11B9/1418 , G11B11/007 , G11B11/10 , G11B17/32
摘要： The atomic force sensor head comprises a cantilever beam (82) forming an integral part of a body (83, 84) from which it extends such that it has a free end to carry a member (81) for interaction with the surface (86) of a recording medium (80) to be investigated. As said member (81) is brought close to said surface (86), atomic forces will cause a deflection of said cantilever beam (82). This deflection is translated into a variation of an electrical value, such as a capacitance. A capacitor (87) is formed by a pair of electrodes (82, 85) coated onto the cantilever beam (82) and said body (84), respectively. The deflection of said cantilever beam (82) causes a variation of the distance (s) between said electrodes (82,85) and, hence, of the capacitance. An improvement of the sensitivity and stability of this arrangement is made possible by filling the gap between the said electrodes (82, 85) with materials having different dielectric constants and different thicknesses. With a relation of 1:10 of the dielectric constants and a thickness relation of 1:5, an improvement factor of about 40 can be obtained.

10. 发明公开

EP0166308A2 Apparatus and method for narrow line width pattern fabrication 失效
标题翻译：装置和具有较窄线宽形成图案的方法。
公开(公告)号：EP0166308A2
公开(公告)日：1986-01-02
申请号：EP85107252.0
申请日：1985-06-14
申请人： International Business Machines Corporation
发明人： Binnig, Gerd Karl Dr. , Feenstra, Randall Meindert , Hodgson, Rodney Trevor , Rohrer, Heinrich, Dr. , Woodall, Jerry Mac Pherson
IPC分类号： C23C16/04 , H01J37/32 , H01L21/00
CPC分类号： H01J37/32 , C23C16/047 , H01J37/3174 , H01J2237/31738 , H01J2237/31759 , Y10S977/857
摘要： The formation of lines (2) of the order of 0,8 nanometers wide is achieved using a tunneling current through a gas (6) that changes to provide a residue that is the basis of the line (2). The tunneling current energy is tuned to the energy required to dissociate the gas (6). The radius of the tunnel tip (3) and the tip (3)-to-substrate (1) distance (S) are of the order of less than ten nanometers.

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