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1. 发明公开

EP0450771A3 Method and apparatus for writing by the emission of atoms 失效
标题翻译：用于排放原子的方法和装置
公开(公告)号：EP0450771A3
公开(公告)日：1993-02-24
申请号：EP91301998.0
申请日：1991-03-11
申请人： International Business Machines Corporation
发明人： Guethner, Peter Hermann , Mamin, Harry Jonathon , Rugar, Daniel
IPC分类号： H01J37/317 , G03F1/08 , G11B9/00
CPC分类号： B82B3/00 , G01Q80/00 , G11B9/14 , H01J2237/31738 , Y10S977/857
摘要： Submicron structures are written on a surface (12) by positioning in nanometer range proximity, preferably within current tunnelling range, of the surface a scanning tip (11) of a material that emits atoms upon application of an applied voltage of low magnitude. While the tip is maintained within said range, it is moved relative to the surface, and a series of short voltage pulses are concurrently applied between the tip and surface. These pulses cause atoms of tip material to directly transfer to the surface and concurrently cause remaining atoms (21) of tip material to migrate to the tip and continuously reform the tip and maintain its sharp configuration, thereby insuring uninterrupted writing ability. Various tip materials exhibiting low field evaporation potentials may be used; however, gold is preferred if deposition is to be under ambient conditions. Heating the tip enhances the ability of the material to emit atoms. The deposited structures (20) may be selectively sensed or erased by application of appropriate voltages.
摘要翻译：亚微米结构通过在施加低幅度施加电压时发射原子的材料的扫描尖端的表面定位在表面的纳米范围附近，优选在当前隧道范围内定位。当尖端保持在所述范围内时，其相对于表面移动，并且在尖端和表面之间同时施加一系列短脉冲。这些脉冲使尖端材料的原子直接转移到表面，并且同时引起尖端材料的剩余原子迁移到尖端，并连续地改变尖端并保持其尖锐的构型，从而确保不间断的写入能力。可以使用表现出低场蒸发电位的各种尖端材料; 然而，如果沉积处于环境条件下，则优选金。加热尖端增强了材料发射原子的能力。可以通过施加适当的电压来选择性地感测或擦除沉积的结构。

2. 发明授权

EP0450771B1 Method and apparatus for writing by the emission of atoms 失效
标题翻译：通过原子发射写入方法和装置
公开(公告)号：EP0450771B1
公开(公告)日：1997-06-04
申请号：EP91301998.0
申请日：1991-03-11
申请人： International Business Machines Corporation
发明人： Guethner, Peter Hermann , Mamin, Harry Jonathon , Rugar, Daniel
IPC分类号： H01J37/317 , G03F1/08 , G11B9/00
CPC分类号： B82B3/00 , G01Q80/00 , G11B9/14 , H01J2237/31738 , Y10S977/857

3. 发明公开

EP0398085A1 High sensitivity position-sensing method 失效
标题翻译： Hochempfindliches Positionsmess-Verfahren。
公开(公告)号：EP0398085A1
公开(公告)日：1990-11-22
申请号：EP90108417.8
申请日：1990-05-04
申请人： International Business Machines Corporation
发明人： Mamin, Harry Jonathon , Rugar, Daniel
IPC分类号： G01D5/26 , H01J37/26
CPC分类号： G01Q10/06 , G01D5/266 , G01Q20/02
摘要： High sensitive position sensing apparatus and method for sensing the position of a movable member (14) comprises an optical directional coupler (10) providing four external ports (a,b,c,d). Light from a short coherence length diode laser (13) is injected into the first port (a). The coupler (10) serves as a beam splitter to direct one portion of the injected light to the member (14) via the second port (b) and a single mode optical fiber (11b). Part of this one portion is reflected concurrently from the member (14) and from the adjacent polished coating at the end face of said fiber (11b) back into said fiber (11b) and optically coupled via the third port (c) to a photodetector (15) to provide a signal whose amplitude is indicative of the position of the member (14), based upon the relative phase of said concurrent reflections.
The other portion of the injected light is optically coupled to and via the fourth port (d) to another photodetector (18) for roviding, as a reference, a signal proportional to the intensity of the injected light. These two signals are supplied to a subtractive circuit (21) for providing an output in which power fluctuations of the laser are minimized.
摘要翻译：用于感测可移动部件（14）的位置的高灵敏度位置检测装置和方法包括提供四个外部端口（a，b，c，d）的光学定向耦合器（10）。来自短相干长度二极管激光器（13）的光被注入到第一端口（a）中。耦合器（10）用作分束器，用于经由第二端口（b）和单模光纤（11b）将注入的光的一部分引导到构件（14）。该部分的一部分从构件（14）同时从所述光纤（11b）的端面处的相邻抛光涂层同时反射回所述光纤（11b），并通过第三端口（c）光耦合到光电检测器（15），以基于所述并发反射的相对相位来提供振幅指示所述构件（14）的位置的信号。注入光的另一部分光耦合到第四端口（d）并经由第四端口（d）耦合到另一光电检测器（18），用于作为参考，以与注入的光的强度成比例的信号。这两个信号被提供给减法电路（21），用于提供激光器的功率波动最小化的输出。

4. 发明授权

EP0398085B1 High sensitivity position-sensing method 失效
标题翻译：高灵敏度位置感测方法
公开(公告)号：EP0398085B1
公开(公告)日：1993-04-21
申请号：EP90108417.8
申请日：1990-05-04
申请人： International Business Machines Corporation
发明人： Mamin, Harry Jonathon , Rugar, Daniel
IPC分类号： G01D5/26 , H01J37/26
CPC分类号： G01Q10/06 , G01D5/266 , G01Q20/02

5. 发明公开

EP0450771A2 Method and apparatus for writing by the emission of atoms 失效
标题翻译： Methode undGerätzum Schreiben mittels Atomemission。
公开(公告)号：EP0450771A2
公开(公告)日：1991-10-09
申请号：EP91301998.0
申请日：1991-03-11
申请人： International Business Machines Corporation
发明人： Guethner, Peter Hermann , Mamin, Harry Jonathon , Rugar, Daniel
IPC分类号： H01J37/317 , G03F1/08 , G11B9/00
CPC分类号： B82B3/00 , G01Q80/00 , G11B9/14 , H01J2237/31738 , Y10S977/857
摘要： Submicron structures are written on a surface (12) by positioning in nanometer range proximity, preferably within current tunnelling range, of the surface a scanning tip (11) of a material that emits atoms upon application of an applied voltage of low magnitude. While the tip is maintained within said range, it is moved relative to the surface, and a series of short voltage pulses are concurrently applied between the tip and surface. These pulses cause atoms of tip material to directly transfer to the surface and concurrently cause remaining atoms (21) of tip material to migrate to the tip and continuously reform the tip and maintain its sharp configuration, thereby insuring uninterrupted writing ability. Various tip materials exhibiting low field evaporation potentials may be used; however, gold is preferred if deposition is to be under ambient conditions. Heating the tip enhances the ability of the material to emit atoms. The deposited structures (20) may be selectively sensed or erased by application of appropriate voltages.
摘要翻译：亚微米结构通过在施加低幅度施加电压时发射原子的材料的扫描尖端的表面定位在表面的纳米范围附近，优选在当前隧道范围内定位。当尖端保持在所述范围内时，其相对于表面移动，并且在尖端和表面之间同时施加一系列短脉冲。这些脉冲使尖端材料的原子直接转移到表面，并且同时引起尖端材料的剩余原子迁移到尖端，并连续地改变尖端并保持其尖锐的构型，从而确保不间断的写入能力。可以使用表现出低场蒸发电位的各种尖端材料; 然而，如果沉积处于环境条件下，则优选金。加热尖端增强了材料发射原子的能力。可以通过施加适当的电压来选择性地感测或擦除沉积的结构。

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