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1. 发明公开

EP3669979A1 MULTILEVEL MICROFLUIDIC DEVICE 审中-公开
公开(公告)号：EP3669979A1
公开(公告)日：2020-06-24
申请号：EP18214388.3
申请日：2018-12-20
申请人： IMEC vzw
发明人： LENCI, Silvia
IPC分类号： B01L3/00
摘要： The present invention relates to a multi-level microfluidic device comprising a silicon wafer substrate and a stack of layers arranged on the silicon wafer substrate. The stack comprises a plurality of fluidic silicon layers, wherein each fluidic silicon layer comprises a microfluidic structure at least one intermediate layer. The at least one intermediate layer is arranged between two fluidic silicon layers, and a fluid inlet and a fluid outlet in fluid connection with at least one of the fluidic silicon layers. Each layer in the stack is formed by deposition or growth. The invention also relates to methods for manufacturing microfluidic devices.

2. 发明公开

EP3979636A1 MIRROR SYSTEM FOR A PROJECTION APPARATUS 有权
公开(公告)号：EP3979636A1
公开(公告)日：2022-04-06
申请号：EP20199133.8
申请日：2020-09-30
申请人： Imec VZW
发明人： SAITO, Daisuke , ROCHUS, Veronique , LENCI, Silvia , BRONDANI TORRI, Guilherme
IPC分类号： H04N9/31 , G02B26/08
摘要： The invention relates to a mirror system (10) for a projection apparatus (60), wherein the projection apparatus (60) comprises a light source (61) and an aperture (62), wherein the mirror system (10) comprises a support surface (11); and a plurality of mirrors (12) arranged on the support surface (11); wherein each of the plurality of mirrors (12) is arranged tiltable between a first and a second tilting position, wherein the first and the second tilting position are discrete positions; wherein each mirror (12) in the first tilting position is arranged to reflect a light beam (63) that is emitted from the light source (61) onto the aperture (62); wherein each mirror (12) in the second tilting position is arranged to reflect the light beam (63) that is emitted from the light source (61) away from the aperture (62); wherein a tilting axis of each of the plurality of mirrors (12) passes through or lies below the center of gravity (C) of the mirror (12); and wherein the first and the second tilting position of each of the plurality of mirrors (12) are asymmetrical to each other, especially relative to an axis that is perpendicular to the support surface (11).

3. 发明公开

EP3176571A1 TWO-DIMENSIONAL ELECTRON GAS SENSOR 审中-公开
标题翻译：二维电子气体传感器
公开(公告)号：EP3176571A1
公开(公告)日：2017-06-07
申请号：EP15198045.5
申请日：2015-12-04
申请人： IMEC VZW , Stichting IMEC Nederland
发明人： LENCI, Silvia , OFFERMANS, Peter , BROM-VERHEIJDEN, Greja Johanna Adriana
IPC分类号： G01N27/12 , G01N27/414
CPC分类号： G01N27/129 , G01N27/4141
摘要： A sensor device (1) is disclosed for sensing a fluid in an adjoining space. The device comprises a substrate (2) and a membrane layer (4) comprising a two-dimensional electron gas (2DEG) layer stack. In the substrate (2), an opening is provided to expose a suspended membrane region (3) of the membrane layer (4). The fluid can interact in a sensing region (12) of the suspended membrane region (3) with a 2DEG formed at a heterojunction interface in the 2DEG layer stack. The device further comprises electrical contacts (10) contacting the 2DEG layer stack. The membrane layer (4) comprises a heater structure (13) for locally heating the sensing region. The membrane layer (4) further has at least one trench, opening or implantation structure (14) provided therein for isolating the 2DEG in at least one part (15,16) of the 2DEG layer stack, such that at least one conductive channel is formed between the electrical contacts (10).
摘要翻译：公开了用于感测邻接空间中的流体的传感器装置（1）。该器件包括衬底（2）和包括二维电子气（2DEG）层堆叠的膜层（4）。在衬底（2）中，设置开口以暴露膜层（4）的悬浮膜区域（3）。流体可以在悬浮膜区域（3）的感测区域（12）中与在2DEG层堆叠中的异质结界面处形成的2DEG相互作用。该装置还包括接触2DEG层堆叠的电触点（10）。膜层（4）包括用于局部加热感测区域的加热器结构（13）。膜层（4）还具有至少一个设置在其中的沟槽开口或注入结构（14），用于隔离2DEG层堆叠的至少一个部分（15,16）中的2DEG，使得至少一个导电沟道形成在电触头（10）之间。

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